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Atomic Layer Deposition of Functional Layers for on Chip 3D Li‐Ion All Solid State Microbattery
36/36 checkable references clean · checked 2026-07-25
Every reference with a DOI in the deposited reference list resolved to a known work in Crossref or DataCite at the dated check, and none carried a retraction, withdrawal, or removal notice.
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The 36 checked references that resolve
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High-power lithium ion microbatteries from interdigitated three-dimensional bicontinuous nanoporous electrodes
resolves10.1002/adma.201306126
Three‐Dimensional Self‐Supported Metal Oxides for Advanced Energy Storage
resolves10.1149/1.3237018
Excimer Laser Annealing Effects of Silicon-rich Silicon Nitride Films Prepared by Using Catalytic Chemical Vapor Deposition
resolves10.1126/science.aad3345
On-chip and freestanding elastic carbon films for micro-supercapacitors
resolves10.1016/j.jpowsour.2007.10.003
Fabrication and properties of a carbon/polypyrrole three-dimensional microbattery
resolves10.1088/0268-1242/27/7/074002
Atomic layer deposition for photovoltaics: applications and prospects for solar cell manufacturing
resolves10.1021/nl203434g
Three-Dimensional Ni/TiO<sub>2</sub> Nanowire Network for High Areal Capacity Lithium Ion Microbattery Applications
resolves10.1002/aenm.201301612
Silicon‐Microtube Scaffold Decorated with Anatase TiO<sub>2</sub> as a Negative Electrode for a 3D Litium‐Ion Microbattery
resolves10.1002/adma.201200397
Emerging Applications of Atomic Layer Deposition for Lithium‐Ion Battery Studies
resolves10.1088/0957-4484/25/50/504007
Atomic layer deposition of lithium phosphates as solid-state electrolytes for all-solid-state microbatteries
resolves10.1021/cm200899k
Atomic Layer Deposition of Li<sub>2</sub>O–Al<sub>2</sub>O<sub>3</sub> Thin Films
resolves10.1039/b923490j
Lanthanum titanate and lithium lanthanum titanate thin films grown by atomic layer deposition
resolves10.1021/jp409399y
Atomic Layer Deposition of Spinel Lithium Manganese Oxide by Film-Body-Controlled Lithium Incorporation for Thin-Film Lithium-Ion Batteries
resolves10.1149/2.011305jes
Atomic Layer Deposition of LiCoO<sub>2</sub>Thin-Film Electrodes for All-Solid-State Li-Ion Micro-Batteries
resolves10.1002/adma.201401805
Rational Design of Atomic‐Layer‐Deposited LiFePO<sub>4</sub> as a High‐Performance Cathode for Lithium‐Ion Batteries
resolves10.1021/nn300553r
Nanoengineering Strategies for Metal–Insulator–Metal Electrostatic Nanocapacitors
resolves10.1021/nn301981p
Hierarchical Three-Dimensional Microbattery Electrodes Combining Bottom-Up Self-Assembly and Top-Down Micromachining
resolves10.1149/2.0091503jes
Chemical Vapor Deposition of Lithium Phosphate Thin-Films for 3D All-Solid-State Li-Ion Batteries
resolves10.1021/nl204047z
Electrolyte Stability Determines Scaling Limits for Solid-State 3D Li Ion Batteries
resolves10.1021/nl9014843
Self-Supported Three-Dimensional Nanoelectrodes for Microbattery Applications
resolves10.1149/1.3111821
Thin Film Batteries with Li3PO4 Solid Electrolyte Fabricated by Pulsed Laser Deposition
resolves10.1039/C3TA14928E
Synthesis of ion conducting Li
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Al
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Si
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O thin films by atomic layer deposition
resolves10.1107/S1600577514013939
TomoPy: a framework for the analysis of synchrotron tomographic data
The 5 references without a DOI — listed, not checked
no DOI — not checkede_1_2_8_13_1
no DOI — not checkede_1_2_8_27_1
no DOI — not checkedData Sheet www.cymbet.comVol.1 Cymbet Corporation 2010(accessed Aug. 2016).
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no DOI — not checkedD. M.Pelt K. J.Batenburg Proc. 13th Int. Meet. on Fully Three‐Dimensional Image Reconstruction in Radiology and Nuclear Medicine 2015.
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