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A Review on Active 3D Microstructures via Direct Laser Lithography

https://doi.org/10.1002/aisy.202100051
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The 6 references without a DOI — listed, not checked
no DOI — not checkede_1_2_6_5_1
no DOI — not checkede_1_2_6_11_1
no DOI — not checkedProgress in EUV Lithography toward Manufacturing
no DOI — not checkedTheoretical Foundations and Application of Photonic Crystals
no DOI — not checkedH.Xu M. M.Sanchez V.Magdanz L.Schwarz F.Hebenstreit O. G.Schmidt arXiv:1703.08510.
no DOI — not checkedLaser 3D Manufacturing
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