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Modeling and finite element analysis of mechanical behavior of flexible MEMS components

https://doi.org/10.1007/s00542-011-1232-z
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12/12 checkable references clean · checked 2026-07-22

Every reference with a DOI in the deposited reference list resolved to a known work in Crossref or DataCite at the dated check, and none carried a retraction, withdrawal, or removal notice.

2 without a DOI — not checked. A reference deposited without a DOI is never matched by title or guessed at; it stays outside the checked set, and this line discloses that.

The 12 checked references that resolve
resolves10.1023/A:1026369320215
An introduction to mechanical-properties-related issues in MEMS structures
resolves10.1007/3-540-28248-3
Nanotribology and Nanomechanics
resolves10.1007/s10470-009-9295-9
Mechanical fatigue analysis of gold microbeams for RF-MEMS applications by pull-in voltage monitoring
resolves10.1007/s10832-004-5110-2
Fabrication of PZT Composite Thick Films for High Frequency Membrane Resonators
resolves10.1007/BF02410529
An experimental/computational approach to identify moduli and residual stress in MEMS radio-frequency switches
resolves10.1007/s11012-008-9111-0
A three-scale FE approach to reliability analysis of MEMS sensors subject to impacts
resolves10.1007/s10470-006-8120-y
Modeling and characterization of three kinds of MEMS resonators fabricated with a thick polysilicon technology
resolves10.1088/0960-1317/17/8/026
Mechanical properties of flexible microcomponents with a mobile load
resolves10.3139/146.101482
Nanomechanical studies of MEMS structures
resolves10.1109/IMNC.2007.4456253
Mechanical characteristics of multilayer MEMS components
resolves10.1109/ESIME.2010.5464576
Effects of the geometrical dimensions on stress and strain of electrostatically actuated MEMS resonators at pull-in and stiction positions
resolves10.1023/A:1024818616082
System Level Modeling of Microsystems Using Order Reduction Methods
The 2 references without a DOI — listed, not checked
no DOI — not checkedLobontiu N, Garcia E (2004) Mechanics of microelectromechanical systems. Cornell University, Ithaca
no DOI — not checkedPustan M, Rymuza Z (2007) Analysis of mechanical characteristics of microsuspensions. In: Proceedings of the 7th international conference of European society for precision engineering and nanotechnology, Bremen, pp 225–228
What this badge says. CiteStamped means the CHECKABLE references of this work were clean at the dated check: each resolved to a known work in a public registry, and none carried a retraction notice at that time. It says nothing about the quality, findings, or importance of the work itself, and nothing about references deposited without a DOI.

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