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Structural, optical, electrical and resistive switching properties of ZnO thin films deposited by thermal and plasma-enhanced atomic layer deposition

https://doi.org/10.1016/j.apsusc.2013.05.141
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The 27 checked references that resolve
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A comprehensive review of ZnO materials and devices
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Transparent and Conductive ZnO Thin Films Prepared by Atmospheric-Pressure Chemical Vapor Deposition Using Zinc Acetylacetonate
resolves10.1063/1.1534627
Transparent thin film transistors using ZnO as an active channel layer and their electrical properties
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ZnO thin-film transistors with polycrystalline (Ba,Sr)TiO3 gate insulators
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Transparent ZnO thin-film transistor fabricated by rf magnetron sputtering
resolves10.1149/2.092203jes
High Uniformity of Resistive Switching Characteristics in a Cr/ZnO/Pt Device
resolves10.1063/1.3659296
Surface effect on resistive switching behaviors of ZnO
resolves10.1063/1.2834852
Unipolar resistive switching characteristics of ZnO thin films for nonvolatile memory applications
resolves10.1063/1.1940727
Surface chemistry of atomic layer deposition: A case study for the trimethylaluminum/water process
resolves10.1063/1.4774400
Bipolar resistive switching characteristics of low temperature grown ZnO thin films by plasma-enhanced atomic layer deposition
resolves10.1021/am300458q
Highly Tunable Electrical Properties in Undoped ZnO Grown by Plasma Enhanced Thermal-Atomic Layer Deposition
resolves10.1088/0268-1242/27/7/074011
ALD grown zinc oxide with controllable electrical properties
resolves10.1088/0268-1242/26/8/085013
Electrical parameters of ZnO films and ZnO-based junctions obtained by atomic layer deposition
resolves10.1021/cm1020959
Dopant Control by Atomic Layer Deposition in Oxide Films for Memristive Switches
resolves10.1116/1.3609974
Plasma-Assisted Atomic Layer Deposition: Basics, Opportunities, and Challenges
resolves10.1016/j.apsusc.2010.11.138
The properties of plasma-enhanced atomic layer deposition (ALD) ZnO thin films and comparison with thermal ALD
resolves10.1016/S0169-4332(96)01022-7
Atomic layer deposition of ZnO transparent conducting oxides
resolves10.1002/adfm.201001342
Structural and Electrical Properties of Atomic Layer Deposited Al‐Doped ZnO Films
resolves10.1063/1.116699
Correlation between photoluminescence and oxygen vacancies in ZnO phosphors
resolves10.1016/S0040-6090(01)01363-3
Photoluminescence and structure of ZnO films deposited on Si substrates by metal-organic chemical vapor deposition
resolves10.1063/1.2836819
Extremely low temperature growth of ZnO by atomic layer deposition
resolves10.1038/nmat2023
Nanoionics-based resistive switching memories
resolves10.1038/nnano.2008.160
Memristive switching mechanism for metal/oxide/metal nanodevices
resolves10.1088/0957-4484/22/25/254029
Resistive switching mechanisms in random access memory devices incorporating transition metal oxides: TiO<sub>2</sub>, NiO and Pr<sub>0.7</sub>Ca<sub>0.3</sub>MnO<sub>3</sub>
resolves10.1002/adma.201004306
High‐Performance Programmable Memory Devices Based on Co‐Doped BaTiO<sub>3</sub>
resolves10.1038/nnano.2009.456
Atomic structure of conducting nanofilaments in TiO2 resistive switching memory
The 3 references without a DOI — listed, not checked
no DOI — not checked10.1016/j.apsusc.2013.05.141_bib0015
no DOI — not checked10.1016/j.apsusc.2013.05.141_bib0050
no DOI — not checked10.1016/j.apsusc.2013.05.141_bib0140
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