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Al-doped zinc oxide films deposited by simultaneous rf and dc excitation of a magnetron plasma: Relationships between plasma parameters and structural and electrical film properties
Optimization of aluminum-doped zinc oxide films deposited at low temperature by radio-frequency sputtering on flexible substrates for solar cell applications
Effects of pre-strain applied at a polyethylene terephthalate substrate before the coating of Al-doped ZnO film on film quality and optical and electrical properties
Effect of stress on optical band gap of ZnO thin films with substrate temperature by spray pyrolysis
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no DOI — not checkedPhysical and sensing properties of ZnO:F:Al thin films deposited by sol–gel
no DOI — not checkedLow-resistivity ZnO:F:Al transparent thin films
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