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Effect of sputtering power on piezoresistivity and interfacial strength of SiCN thin films prepared by magnetic sputtering

https://doi.org/10.1016/j.ceramint.2021.09.299
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Every reference with a DOI in the deposited reference list resolved to a known work in Crossref or DataCite at the dated check, and none carried a retraction, withdrawal, or removal notice.

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The 44 checked references that resolve
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The 1 reference without a DOI — listed, not checked
no DOI — not checkedDesign optimization and simulation of a diamond based piezoresistive pressure sensor for high temperature application
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