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Competition between surface and strain energy during grain growth in free-standing and attached Ag and Cu films on Si substrates

https://doi.org/10.1016/s0169-4332(01)00782-6
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The 23 checked references that resolve
resolves10.1063/1.99542
Room-temperature copper metallization for ultralarge-scale integrated circuits by a low kinetic-energy particle process
resolves10.1116/1.578677
Relationship of crystallographic orientation and impurities to stress, resistivity, and morphology for sputtered copper films
resolves10.1557/JMR.1999.0162
Thin Film Microstructure Control Using Glancing Angle Deposition by Sputtering
resolves10.1063/1.96543
Surface-energy-driven secondary grain growth in thin Au films
resolves10.1016/0040-6090(72)90103-4
Anomalous large grains in alloyed aluminum thin films I. Secondary grain growth in aluminum-copper films
resolves10.1063/1.348452
Abnormal grain growth in aluminum alloy thin films
resolves10.1063/1.94842
Surface-energy-driven secondary grain growth in ultrathin (<100 nm) films of silicon
resolves10.1063/1.345756
The effects of dopants on surface-energy-driven secondary grain growth in silicon films
resolves10.1063/1.339460
Grain growth and grain size distributions in thin germanium films
resolves10.1063/1.1722742
Theory of Thermal Grooving
resolves10.1016/0001-6160(58)90020-8
The effect of thermal grooving on grain boundary motion
resolves10.1103/PhysRevB.29.6443
Embedded-atom method: Derivation and application to impurities, surfaces, and other defects in metals
resolves10.1063/1.336194
Secondary grain growth in thin films of semiconductors: Theoretical aspects
resolves10.1016/S0169-4332(01)00243-4
Dependence of stresses on grain orientations in thin polycrystalline films on substrates: an explanation of the relationship between preferred orientations and stresses
resolves10.1063/1.1698268
A Direct Method of Determining Preferred Orientation of a Flat Reflection Sample Using a Geiger Counter X-Ray Spectrometer
resolves10.1088/0022-3727/3/6/303
Crystal growth and orientations in vacuum-condensed silver films and their systematic dependance on the residual air pressure, film thickness, rate of deposition and substrate temperature
resolves10.1116/1.1312731
Characterization of silver coatings deposited from a hollow cathode source
resolves10.1016/S0040-6090(99)00691-4
Correlation between texture and average grain size in polycrystalline Ag thin films
resolves10.1007/BF00544515
A model for development of orientation of vapour deposits
resolves10.1023/A:1004696531491
Textures and structures of vapor deposits
resolves10.1063/1.344969
Epitaxial grain growth in thin metal films
resolves10.1103/PhysRevLett.50.1285
Semiempirical, Quantum Mechanical Calculation of Hydrogen Embrittlement in Metals
resolves10.1007/BF02666406
Texture and microstructure of thin copper films
The 1 reference without a DOI — listed, not checked
no DOI — not checked10.1016/S0169-4332(01)00782-6_BIB10
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