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Overcoming the excessive compressive strain in AlGaN epitaxy by introducing high Si-doping in AlN templates

https://doi.org/10.35848/1347-4065/ab990a
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33/33 checkable references clean · checked 2026-07-26

Every reference with a DOI in the deposited reference list resolved to a known work in Crossref or DataCite at the dated check, and none carried a retraction, withdrawal, or removal notice.

The 33 checked references that resolve
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Preparation of a Freestanding AlN Substrate from a Thick AlN Layer Grown by Hydride Vapor Phase Epitaxy on a Bulk AlN Substrate Prepared by Physical Vapor Transport
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6 kW/cm<sup>2</sup> UVC laser threshold in optically pumped lasers achieved by controlling point defect formation
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A 271.8 nm deep-ultraviolet laser diode for room temperature operation
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High Output Power from 260 nm Pseudomorphic Ultraviolet Light-Emitting Diodes with Improved Thermal Performance
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Performance and Reliability of Deep-Ultraviolet Light-Emitting Diodes Fabricated on AlN Substrates Prepared by Hydride Vapor Phase Epitaxy
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High-quality and highly-transparent AlN template on annealed sputter-deposited AlN buffer layer for deep ultra-violet light-emitting diodes
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AlGaN-based ultraviolet light-emitting diode on high-temperature annealed sputtered AlN template
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Band parameters for nitrogen-containing semiconductors
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On compensation in Si-doped AlN
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Silicon induced defect reduction in AlN template layers for epitaxial lateral overgrowth
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Strain Relaxation Mechanisms in AlGaN Epitaxy on AlN Templates
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Mobile dislocation density and strain relaxation rate evolution during InxGa1−xAs∕GaAs heteroepitaxy
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