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The relationship between accelerating voltage and electron detection modes to linewidth measurement in an SEM

https://doi.org/10.1002/sca.4950100104
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What this work says

Outgoing claims: the papers this work cites, builds on, or argues with.

inferredcites →https://doi.org/10.1002/sca.4950020406openalex-snapshot
Detector system for backscattered electrons by conversion to secondary electrons
inferredcites →https://doi.org/10.1002/sca.4950080607openalex-snapshot
Design and Application of a Quadrupole Detector for Low‐Voltage Scanning Electron Microscopy
inferredcites →https://doi.org/10.1007/3-540-36507-9openalex-snapshot
Electron-Beam Interactions with Solids: Application of the Monte Carlo Method to Electron Scattering Problems
inferredcites →https://doi.org/10.1063/1.97540openalex-snapshot
Low-loss electron images of uncoated photoresist in the scanning electron microscope
inferredcites →https://doi.org/10.1088/0950-7671/37/7/307openalex-snapshot
Wide-band detector for micro-microampere low-energy electron currents
inferredcites →https://doi.org/10.1111/j.1365-2818.1984.tb00499.xopenalex-snapshot
Testing of detector strategies in scanning electron microscopy by isodensities
inferredcites →https://doi.org/10.1111/j.1365-2818.1987.tb02817.xopenalex-snapshot
A model for calculating secondary and backscattered electron yields
inferredcites →https://doi.org/10.1117/12.949749openalex-snapshot
SEM-based System For Calibration Of Linewidth SRMs For The IC industry
inferredcites →https://doi.org/10.6028/jres.092.017openalex-snapshot
Submicrometer linewidth metrology in the optical microscope
inferredcites →https://doi.org/10.6028/jres.092.018openalex-snapshot
Submicrometer microelectronics dimensional metrology: scanning electron microscopy

What points at this work

Incoming claims: where this work appears in other papers’ reference lists and arguments.

inferred← citeshttps://doi.org/10.2139/ssrn.4732211openalex-extracted
Structural, Chemical and Luminescence Properties of Bi Doped Zno
inferred← citeshttps://doi.org/10.1002/sca.20238openalex-snapshot
Modeling for accurate dimensional scanning electron microscope metrology: then and now
inferred← citeshttps://doi.org/10.1002/sca.21075openalex-snapshot
Does your SEM Really tell the truth?—how would you know? Part 1
inferred← citeshttps://doi.org/10.1002/sca.21124openalex-snapshot
Does your SEM really tell the truth? How would you know? Part 2
inferred← citeshttps://doi.org/10.1002/sca.4950110302openalex-snapshot
Specimen biasing to enhance or suppress secondary electron emission from charging specimens at low accelerating voltages,
inferred← citeshttps://doi.org/10.1002/sca.4950120306openalex-snapshot
Characterization of polymer blends and block copolymers by conventional and low voltage SEM
inferred← citeshttps://doi.org/10.1002/sca.4950130403openalex-snapshot
Detectors for low voltage scanning electron microscopy
inferred← citeshttps://doi.org/10.1002/sca.4950230502openalex-snapshot
Application of the low‐loss scanning electron microscope image to integrated circuit technology. Part 1– applications to accurate dimension measurements
inferred← citeshttps://doi.org/10.1002/sca.4950230605openalex-snapshot
Imaging of specimens at optimized low and very low energies in scanning electron microscopes
inferred← citeshttps://doi.org/10.1007/bf00975812openalex-snapshot
Calibrating a scanning electron microscope by means of a linear measure having one certified dimension
inferred← citeshttps://doi.org/10.1007/bf00976432openalex-snapshot
Measurement of linear dimensions of submicron structures with a scanning electron microscope
inferred← citeshttps://doi.org/10.1007/bf00979646openalex-snapshot
Calibration of scanning electron microscopes by means of pitch structures
inferred← citeshttps://doi.org/10.1016/0167-9317(89)90096-8openalex-snapshot
Optimization of the metrological S.E.M. settings
inferred← citeshttps://doi.org/10.1016/b978-0-12-029912-6.50008-7openalex-snapshot
Advances in Voltage-Contrast Detectors in Scanning Electron Microscopes
inferred← citeshttps://doi.org/10.1016/b978-0-8155-1281-3.50009-9openalex-snapshot
MICROLITHOGRAPHY METROLOGY
inferred← citeshttps://doi.org/10.1016/j.ultramic.2019.112847openalex-snapshot
A new method for measuring nanoparticle diameter from a set of SEM images using a remarkable point
inferred← citeshttps://doi.org/10.1016/j.ultramic.2021.113300openalex-snapshot
Influence of electron landing energy on the measurement of the dimensional properties of nanoparticle populations imaged by SEM
inferred← citeshttps://doi.org/10.1017/s0424820100180604openalex-snapshot
Approaches to Quantitative Electron Detection in the Scanning Electron Microscope for Topographic Studies
inferred← citeshttps://doi.org/10.1017/s0424820100180860openalex-snapshot
Monte Carlo Modelling of Secondary Electron Yield from Rough Surfaces
inferred← citeshttps://doi.org/10.1017/s1431927600021383openalex-snapshot
Factors Affecting the Performance of Backscattered Electron Detectors at Low Beam Accelerating Voltages in SEM
inferred← citeshttps://doi.org/10.1017/s1431927616011430openalex-snapshot
Comparison of Electron Imaging Modes for Dimensional Measurements in the Scanning Electron Microscope
inferred← citeshttps://doi.org/10.1017/s1551929514001370openalex-snapshot
Low-Loss Electron Imaging for Enhanced Surface Detail in the Scanning Electron Microscope: The Contributions of Oliver C. Wells
inferred← citeshttps://doi.org/10.1063/1.1141127openalex-snapshot
Low-profile high-efficiency microchannel-plate detector system for scanning electron microscopy applications
inferred← citeshttps://doi.org/10.1063/1.1141548openalex-snapshot
Low accelerating voltage SEM imaging and metrology using backscattered electrons
inferred← citeshttps://doi.org/10.1063/1.5050341openalex-snapshot
Flow through polydisperse pores in an anodic alumina membrane: A new method to measure the mean pore diameter
inferred← citeshttps://doi.org/10.1088/1361-6501/ab1495openalex-snapshot
Methodology to evaluate the uncertainty associated with nanoparticle dimensional measurements by SEM
inferred← citeshttps://doi.org/10.1109/16.43666openalex-snapshot
A new approach to accurate X-ray mask measurements in a scanning electron microscope
inferred← citeshttps://doi.org/10.1117/12.44423openalex-snapshot
Linewidth measurement comparison between a photometric optical microscope and a scanning electron microscope backed with Monte Carlo trajectory computations
inferred← citeshttps://doi.org/10.1117/12.44426openalex-snapshot
Cross-sectional imaging in SEM: signal formation mechanism and CD measurements
inferred← citeshttps://doi.org/10.1117/12.953106openalex-snapshot
Scanning Photon And Scanning Electron Metrology On Photomasks
inferred← citeshttps://doi.org/10.1201/9781420028782-34openalex-snapshot
Photomask Critical Dimension Metrology in the Scanning Electron Microscope
inferred← citeshttps://doi.org/10.1201/9781420028782-41openalex-snapshot
Tools for Mask Image Evaluation
inferred← citeshttps://doi.org/10.1201/9781420028782.ch22openalex-snapshot
Photomask Critical Dimension Metrology in the Scanning Electron Microscope
inferred← citeshttps://doi.org/10.1201/9781420028782.ch29openalex-snapshot
Tools for Mask Image Evaluation
inferred← citeshttps://doi.org/10.1201/9781420045550-9openalex-snapshot
The Scanning Electron Microscope *
inferred← citeshttps://doi.org/10.1201/9781420045550.ch9openalex-snapshot
The Scanning Electron Microscope
inferred← citeshttps://doi.org/10.6028/jres.098.033openalex-snapshot
Interalaboratory study on the lithographically produced scanning electron microscope magnification standard prototype
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