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A review of MEMS-based microscale and nanoscale tensile and bending testing

https://doi.org/10.1007/bf02410523
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What this work says

Outgoing claims: the papers this work cites, builds on, or argues with.

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Micromechanical fatigue testing
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A new microtensile tester for the study of MEMS materials with the aid of atomic force microscopy
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In-situ tensile testing of nano-scale specimens in SEM and TEM
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Application of the in situ TEM deformation technique to observe how “clean” and doped grain boundaries respond to local stress concentrations
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Diffusional creep of polycrystalline materials
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A methodology for determining mechanical properties of freestanding thin films and MEMS materials
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In situ tensile strength measurement and Weibull analysis of thick film and thin film micromachined polysilicon structures
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Versatile tool for characterising long-term stability and reliability of micromechanical structures
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High-cycle fatigue and durability of polycrystalline silicon thin films in ambient air
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Application of MEMS force sensors for in situ mechanical characterization of nano-scale thin films in SEM and TEM
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TEM investigations of the superdislocations and their interaction with particles in dispersion strengthened intermetallics
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Tensile properties of free-standing aluminum thin films
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CONTINUOUS SEM OBSERVATIONS OF CREEP‐FATIGUE DAMAGE PROCESSES
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Measurement of forces and spring constants of microinstruments
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Stress relaxation of free-standing aluminum beams for microelectromechanical systems applications
inferredcites →https://doi.org/10.1063/1.1735751openalex-snapshot
Tensile Properties of Thin, Evaporated Gold Films
inferredcites →https://doi.org/10.1109/84.585788openalex-snapshot
M-TEST: A test chip for MEMS material property measurement using electrostatically actuated test structures
inferredcites →https://doi.org/10.1109/84.661392openalex-snapshot
Specimen size effect on tensile strength of surface-micromachined polycrystalline silicon thin films
inferredcites →https://doi.org/10.1109/84.788636openalex-snapshot
Subcritical crack growth in silicon MEMS
inferredcites →https://doi.org/10.1109/84.911103openalex-snapshot
Microscale materials testing using MEMS actuators
inferredcites →https://doi.org/10.1109/84.946774openalex-snapshot
Effect of specimen size on Young's modulus and fracture strength of polysilicon
inferredcites →https://doi.org/10.1109/84.967383openalex-snapshot
High-cycle fatigue of single-crystal silicon thin films
inferredcites →https://doi.org/10.1109/t-ed.1987.22981openalex-snapshot
Measurement and Interpretation of stress in aluminum-based metallization as a function of thermal history
inferredcites →https://doi.org/10.1115/imece1999-0281openalex-snapshot
Investigation of Micro-Scale Materials Behavior With MEMS
inferredcites →https://doi.org/10.1117/12.359366openalex-snapshot
Strength of polysilicon for MEMS devices
inferredcites →https://doi.org/10.1117/12.360459openalex-snapshot
Small-area in-situ MEMS test structure to measure fracture strength by electrostatic probing
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Reliability of silicon nitride as structural material in MEMS
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Mechanical deflection of cantilever microbeams: A new technique for testing the mechanical properties of thin films
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A new method for tensile testing of thin films
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The Fracture Toughness of Polysilicon Microdevices: A First Report
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Microinstruments for submicron material studies
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Determination of elastic modulus of thin films and small specimens using beam bending methods
inferredcites →https://doi.org/10.1557/proc-130-295openalex-snapshot
Nanomechanics of Thin Films: Emphasis: Tensile Properties
inferredcites →https://doi.org/10.1557/proc-518-51openalex-snapshot
Young's Modulus, Yield Strength and Fracture Strength of Microelements Determined by Tensile Testing
inferredcites →https://doi.org/10.1557/proc-605-19openalex-snapshot
Testing of Critical Features of Polysilicon MEMS
inferredcites →https://doi.org/10.1557/proc-634-b1.2.1openalex-snapshot
TEM Observation of Nanocrystalline Copper During Deformation

What points at this work

Incoming claims: where this work appears in other papers’ reference lists and arguments.

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A review of microelectromechanical systems for nanoscale mechanical characterization
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MEMS-based microstructures for nanomechanical characterization of thin films
inferred← citeshttps://doi.org/10.1088/0965-0393/15/1/s15openalex-snapshot
Plastic deformation in nanoscale gold single crystals and open-celled nanoporous gold
inferred← citeshttps://doi.org/10.1088/1361-6439/aad927openalex-snapshot
A novel scanning force microscopy probe with thermal-electrical actuation and piezo-resistive sensing
inferred← citeshttps://doi.org/10.1088/1361-6439/aaf60dopenalex-snapshot
Elastic–plastic characterization of microstructures through pull-in 4 point bending test
inferred← citeshttps://doi.org/10.1088/1361-6439/abeaeaopenalex-snapshot
Design and manufacture of a micro-tensile testing machine for in situ optical observation and DIC analysis: application to 3D-printed and compression-molded ABS
inferred← citeshttps://doi.org/10.1088/1361-6463/aa6e2bopenalex-snapshot
Lessons learned from nanoscale specimens tested by MEMS-based apparatus
inferred← citeshttps://doi.org/10.1088/1361-6501/ae891copenalex-snapshot
High-throughput resonance testing: a characterization tool to study nanowire mechanics
inferred← citeshttps://doi.org/10.1088/1757-899x/1348/1/012004openalex-snapshot
Development and validation of a micro-tensile tester for lead-free solder alloys
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Microfabricated fiducial markers for digital image correlation-based micromechanical testing of LIGA Ni alloys
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Lattice Anharmonicity in Defect-Free Pd Nanowhiskers
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Non-linear FEM simulation of the elasto-plastic behaviour in MEMS specimens
inferred← citeshttps://doi.org/10.1109/icept.2008.4607079openalex-snapshot
Design of testing chip for measuring mechanical properties of thin films
inferred← citeshttps://doi.org/10.1109/jmems.2009.2020380openalex-snapshot
New On-Chip Nanomechanical Testing Laboratory - Applications to Aluminum and Polysilicon Thin Films
inferred← citeshttps://doi.org/10.1109/jmems.2011.2182503openalex-snapshot
Electrostatic Tensile Testing Device With Nanonewton and Nanometer Resolution and Its Application to $\hbox{C}_{60}$ Nanowire Testing
inferred← citeshttps://doi.org/10.1109/jmems.2012.2190711openalex-snapshot
High-Throughput On-Chip Large Deformation of Silicon Nanoribbons and Nanowires
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Residual Stress Extraction of Surface-Micromachined Fixed-Fixed Nickel Beams Using a Wafer-Scale Technique
inferred← citeshttps://doi.org/10.1109/jsen.2021.3135888openalex-snapshot
MEMS-Based Platforms for Multi-Physical Characterization of Nanomaterials: A Review
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Strain rate dependence of mechanical properties for sub 100 nm-thick Au film using Electrostatically Actuated NAno Tensile testing device
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Overview of Testing Methods for Mechanical and Adhesion Properties of Materials in Semiconductor Packages
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Fatigue properties of conventionally manufactured and micro‐powder‐injection‐moulded 17‐4PH micro‐components
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A review of deformation and fatigue of metals at small size scales
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Mechanical Property Measurement at the Micro/Nano‐scale1
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Focused ion beam preparation of microbeams for in situ mechanical analysis of electroplated nanotwinned copper with probe type indenters
inferred← citeshttps://doi.org/10.1115/1.1839214openalex-snapshot
A Study of Creep in Polysilicon MEMS Devices
inferred← citeshttps://doi.org/10.1115/1.2166652openalex-snapshot
Mechanical Characterization of Released Thin Films by Contact Loading
inferred← citeshttps://doi.org/10.1115/1.4035511openalex-snapshot
Mechanics of Crystalline Nanowires: An Experimental Perspective
inferred← citeshttps://doi.org/10.1115/1.4062106openalex-snapshot
Elastic–Plastic Properties of Mesoscale Electrodeposited LIGA Nickel Alloy Films: Analysis of Measurement Uncertainties
inferred← citeshttps://doi.org/10.1116/6.0000544openalex-snapshot
Atomic force microscopy for nanoscale mechanical property characterization
inferred← citeshttps://doi.org/10.1142/s0129156416400048openalex-snapshot
SOI Technologies from Microelectronics to Microsystems — Meeting the More than Moore Roadmap Requirements
inferred← citeshttps://doi.org/10.1142/s2010194512003637openalex-snapshot
ADHESION ASSESSMENT OF BNT FILMS ON TITANIUM SUBSTRATES USING A TENSILE TEST
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Various Fatigue Testing of Polycrystalline Silicon Microcantilever Beam in Bending
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Microscale Characterization of Mechanical Properties
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Isolation and pathogenicity testing of avian reticuloendotheliosis virus from layer chickens in China
inferred← citeshttps://doi.org/10.1201/b18729-3openalex-snapshot
Toughness Evaluation of Thin Hard Coatings and Films
inferred← citeshttps://doi.org/10.1201/b18729-7openalex-snapshot
Toughness Evaluation of Thin Hard Coatings and Films
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Nomarski imaging interferometry to measure the displacement field of micro-electro-mechanical systems
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Lateral scanning confocal microscopy for the determination of in-plane displacements of microelectromechanical systems devices
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Nanometric sensing with laser feedback interferometry
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Mechanical Properties of Collagen Fibrils
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In situ Transmission Electron Microscopy Observations of Toughening Mechanisms in Ultra-fine Grained Columnar Aluminum Thin Films
inferred← citeshttps://doi.org/10.1557/jmr.2015.26openalex-snapshot
Small scale mechanical testing of irradiated materials
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In situ thermomechanical testing for micro/nanomaterials
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MEMS for In Situ Testing—Handling, Actuation, Loading, and Displacement Measurements
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Patterning Nanomaterials on Fragile Micromachined Structures using Electron Beam Lithography
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A Review of Tension Test Methods for Thin Films
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Material selection for optimum design of MEMS pressure sensors
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A low-cost laboratory device for microcompression testing in the small-strain region
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A Review of Patented Works on the Mechanical Characterization of Materials at Micro- and Nano-Scale
inferred← citeshttps://doi.org/10.2174/2210681212666220217121830openalex-snapshot
Preparation and Chemical/Physical Characterization of Individual Nanoscaled Fibrils
inferred← citeshttps://doi.org/10.25439/rmt.27575796openalex-snapshot
Fabrication and characterisation of polypropylene nanofibres by melt electrospinning and meltblowing
inferred← citeshttps://doi.org/10.25772/dk4p-c087openalex-snapshot
Mechanical Characterization of Patterned Silver Columnar Nanorods with the Atomic Force Microscope.
inferred← citeshttps://doi.org/10.3139/146.110149openalex-snapshot
Overview on established and novel FIB based miniaturized mechanical testing using in-situ SEM
inferred← citeshttps://doi.org/10.31390/gradschool_dissertations.2422openalex-snapshot
Constitutive Modeling and Experiments for the Micro and Nano Behaviors in Metals
inferred← citeshttps://doi.org/10.32657/10356/15555openalex-snapshot
Temperature dependent elastic, lattice vibronic and thermal properties of nanomaterials
inferred← citeshttps://doi.org/10.32657/10356/46439openalex-snapshot
Thermal stress analysis and characterization of thermo-mechanical properties of thin films on an elastic substrate
inferred← citeshttps://doi.org/10.3390/membranes7040067openalex-snapshot
Analysis of the Comprehensive Tensile Relationship in Electrospun Silk Fibroin/Polycaprolactone Nanofiber Membranes
inferred← citeshttps://doi.org/10.3390/mi6091365openalex-snapshot
A Monolithic Micro-Tensile Tester for Investigating Silicon Dioxide Polymorph Micromechanics, Fabricated and Operated Using a Femtosecond Laser
inferred← citeshttps://doi.org/10.3390/nano8010029openalex-snapshot
A Tensile Constitutive Relationship and a Finite Element Model of Electrospun Nanofibrous Mats
inferred← citeshttps://doi.org/10.3390/s23031688openalex-snapshot
Numerical Approaches for Recovering the Deformable Membrane Profile of Electrostatic Microdevices for Biomedical Applications
inferred← citeshttps://doi.org/10.4018/979-8-3373-0230-0.ch005openalex-snapshot
Nanofibers for High-Capacity and Sustainable Energy Solutions
inferred← citeshttps://doi.org/10.4028/www.scientific.net/amr.123-125.399openalex-snapshot
Adhesion Strength of BNT Films Hydrothermally Deposited on Titanium Substrates
inferred← citeshttps://doi.org/10.4028/www.scientific.net/kem.609-610.39openalex-snapshot
Design and Fabrication of a Micro Spring with Steel Structures for the Microtensile Testing of Thin Films
inferred← citeshttps://doi.org/10.4028/www.scientific.net/msf.633-634.615openalex-snapshot
Ductility of Thin Metallic Films
inferred← citeshttps://doi.org/10.53879/id.50.08.p0005openalex-snapshot
NANOFIBERS: FABRICATION, CHARACTERIZATION AND THEIR BIOMEDICAL APPLICATIONS
inferred← citeshttps://doi.org/10.5772/28725openalex-snapshot
Standalone Tensile Testing of Thin Film Materials for MEMS/NEMS Applications
inferred← citeshttps://doi.org/10.5772/61267openalex-snapshot
Mechanical Property Evaluation of Electrodeposited Nanocrystalline Metals by Micro-testing
inferred← citeshttps://doi.org/10.5772/intechopen.80589openalex-snapshot
Evaluation Methods of Mechanical Properties of Micro-Sized Specimens
inferred← citeshttps://doi.org/10.70675/9e8c6ee5z8a6az4863zb09dzac3fdca55630openalex-snapshot
Rupture ductile des matériaux CFC irradiés
inferred← citeshttps://doi.org/10.70675/c1430488z2d26z4e46zb5e8z5b95a6c94371openalex-snapshot
Mechanics of bio-based thermosetting polymers and water-induced rejuvenation
inferred← citeshttps://doi.org/10.7567/jjap.52.110118openalex-snapshot
Nano-Scale Tensile Testing and Sample Preparation Techniques for Silicon Nanowires
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