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Influence of oxygen content on structure and material properties of reactively sputtered Al-Ge-O-N thin films
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What this work says
Outgoing claims: the papers this work cites, builds on, or argues with.
inferredcites →https://doi.org/10.1002/pssc.201100518openalex-snapshot
Optical and electrical properties of sputtered InNO thin films
inferredcites →https://doi.org/10.1002/sia.3765openalex-snapshot
Charge referencing issues in XPS of insulators as evidenced in the case of Al‐Si‐N thin films
inferredcites →https://doi.org/10.1002/sia.740151108openalex-snapshot
Intercomparison of surface analysis of thin aluminium oxide films
inferredcites →https://doi.org/10.1007/s12540-016-5492-0openalex-snapshot
Al-Si-N/a-SiN:H thin-film coating for polycarbonate glazing applications
inferredcites →https://doi.org/10.1016/0021-9517(83)90209-9openalex-snapshot
Surface characterization of model Urushibara catalysts
inferredcites →https://doi.org/10.1016/0022-3697(67)90084-4openalex-snapshot
On the preparation, optical properties and electrical behaviour of aluminium nitride
inferredcites →https://doi.org/10.1016/0025-5408(89)90141-4openalex-snapshot
Preparation and characterization of germanium oxide thin films
inferredcites →https://doi.org/10.1016/0039-6028(94)00746-2openalex-snapshot
Oxidation of Ge(100) and Ge(111) surfaces: an UPS and XPS study
inferredcites →https://doi.org/10.1016/0040-6090(95)08256-5openalex-snapshot
Metastable single-phase polycrystalline aluminium oxynitride films grown by MSIP: constitution and structure
inferredcites →https://doi.org/10.1016/0148-9062(75)90761-5openalex-snapshot
Standard X-ray diffraction powder patterns
inferredcites →https://doi.org/10.1016/0169-4332(91)90063-popenalex-snapshot
XPS valence band studies of the bonding chemistry of germanium oxides and related systems
inferredcites →https://doi.org/10.1016/0257-8972(95)02418-2openalex-snapshot
Germanium nitride layers prepared by supersonic r.f. plasma jet
inferredcites →https://doi.org/10.1016/0368-2048(74)85015-2openalex-snapshot
ESCA study of molecular GeS3-x Tex As2 glasses
inferredcites →https://doi.org/10.1016/j.apsusc.2011.01.104openalex-snapshot
An XPS study of Au alloyed Al–O sputtered coatings
inferredcites →https://doi.org/10.1016/j.apsusc.2016.10.006openalex-snapshot
Germanium nitride and oxynitride films for surface passivation of Ge radiation detectors
inferredcites →https://doi.org/10.1016/j.jcrysgro.2008.06.021openalex-snapshot
Correlation between the oxygen content and the morphology of AlN films grown by r.f. magnetron sputtering
inferredcites →https://doi.org/10.1016/j.matchemphys.2015.08.015openalex-snapshot
The influence of nitrogen and oxygen additions on the thermal characteristics of aluminium-based thin films
inferredcites →https://doi.org/10.1016/j.materresbull.2017.10.044openalex-snapshot
Al-Si-N thin films deposited by laser ablation: Effect of plasma parameters on mechanical and optical properties
inferredcites →https://doi.org/10.1016/j.msea.2008.01.063openalex-snapshot
Mechanical properties of sputtered silicon oxynitride films by nanoindentation
inferredcites →https://doi.org/10.1016/j.surfcoat.2007.05.094openalex-snapshot
Microstructure and mechanical properties of Al–Si–N transparent hard coatings deposited by magnetron sputtering
inferredcites →https://doi.org/10.1016/j.surfcoat.2012.04.028openalex-snapshot
Two-phase single layer Al-O-N nanocomposite films with enhanced resistance to cracking
inferredcites →https://doi.org/10.1016/j.surfcoat.2014.08.053openalex-snapshot
Morphology, microstructure evolution and optical properties of Al–Si–N nanocomposite coatings
inferredcites →https://doi.org/10.1016/j.tsf.2006.10.125openalex-snapshot
SiOxNy thin films deposited by reactive sputtering: Process study and structural characterisation
inferredcites →https://doi.org/10.1016/j.tsf.2008.07.014openalex-snapshot
Celebrating the 100th anniversary of the Stoney equation for film stress: Developments from polycrystalline steel strips to single crystal silicon wafers
inferredcites →https://doi.org/10.1016/j.tsf.2009.10.094openalex-snapshot
Formation processes of Ge3N4 films by radical nitridation and their electrical properties
inferredcites →https://doi.org/10.1016/s0022-3093(97)00450-xopenalex-snapshot
Oxygen bonding in GeO2 glass
inferredcites →https://doi.org/10.1016/s0040-6090(02)00660-0openalex-snapshot
The properties of nanocomposite aluminium–silicon based thin films deposited by filtered arc deposition
inferredcites →https://doi.org/10.1016/s0040-6090(99)00564-7openalex-snapshot
Statistical evaluation of refractive index, growth rate, hardness and Young's modulus of aluminium oxynitride films
inferredcites →https://doi.org/10.1016/s0257-8972(01)01619-xopenalex-snapshot
Characterization of nitride coatings by XPS
inferredcites →https://doi.org/10.1016/s0955-2219(00)00039-xopenalex-snapshot
Progress in SiAlON ceramics
inferredcites →https://doi.org/10.1021/ic50128a045openalex-snapshot
Core electron binding energies in some Group IIIA, VB, and VIB compounds
inferredcites →https://doi.org/10.1039/c2jm32815aopenalex-snapshot
Nanocomposite Al–Ge–N thin films and their mechanical and optical properties
inferredcites →https://doi.org/10.1063/1.1805194openalex-snapshot
Ge metal-insulator-semiconductor structures with Ge3N4 dielectrics by direct nitridation of Ge substrates
inferredcites →https://doi.org/10.1063/1.2799260openalex-snapshot
Humidity-dependent stability of amorphous germanium nitrides fabricated by plasma nitridation
inferredcites →https://doi.org/10.1063/1.3061729openalex-snapshot
Standard X-Ray Diffraction Powder Patterns
inferredcites →https://doi.org/10.1063/1.3323093openalex-snapshot
Role of negatively charged defects in the lattice contraction of Al–Si–N
inferredcites →https://doi.org/10.1063/1.4833835openalex-snapshot
Nonmetal sublattice population induced defect structure in transition metal aluminum oxynitrides
inferredcites →https://doi.org/10.1063/1.4894776openalex-snapshot
Effect of oxygen incorporation on the structure and elasticity of Ti-Al-O-N coatings synthesized by cathodic arc and high power pulsed magnetron sputtering
inferredcites →https://doi.org/10.1088/0022-3727/36/15/316openalex-snapshot
Methods for the determination of the optical constants of thin films from single transmission measurements: a critical review
inferredcites →https://doi.org/10.1088/0022-3727/49/13/135309openalex-snapshot
Stoichiometric silicon oxynitride thin films reactively sputtered in Ar/N 2 O plasmas by HiPIMS
inferredcites →https://doi.org/10.1088/0022-3735/16/12/023openalex-snapshot
Determination of the thickness and optical constants of amorphous silicon
inferredcites →https://doi.org/10.1098/rspa.1909.0021openalex-snapshot
The tension of metallic films deposited by electrolysis
inferredcites →https://doi.org/10.1111/jace.12197openalex-snapshot
Optical Properties of (Oxy)Nitride Materials: A Review
inferredcites →https://doi.org/10.1116/1.571870openalex-snapshot
Auger and photoelectron line energy relationships in aluminum–oxygen and silicon–oxygen compounds
inferredcites →https://doi.org/10.1134/s1063785015100077openalex-snapshot
Experimental determination of the top of the valence band in amorphous Al2O3 and γ-Al2O3
inferredcites →https://doi.org/10.1149/1.2411387openalex-snapshot
Preparation and Properties of Amorphous Germanium Nitride Films
inferredcites →https://doi.org/10.1364/ao.33.001203openalex-snapshot
Optical properties of GeOx films obtained by laser deposition and dc sputtering in a reactive atmosphere
inferredcites →https://doi.org/10.1364/josa.52.001377openalex-snapshot
Refraction and Dispersion of Synthetic Sapphire
inferredcites →https://doi.org/10.1557/jmr.1992.1247openalex-snapshot
Optical and physical properties of sputtered Si:Al:O:N films
inferredcites →https://doi.org/10.1557/jmr.1992.1564openalex-snapshot
An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments
inferredcites →https://doi.org/10.4028/www.scientific.net/kem.89-91.275openalex-snapshot
PVD Coatings in the System Si-Al-O-N
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Incoming claims: where this work appears in other papers’ reference lists and arguments.
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inferred← citeshttps://doi.org/10.1016/j.vacuum.2022.111451openalex-snapshot
Microstructure and properties of mono-crystalline germanium enhanced by high-current pulsed electron beam
inferred← citeshttps://doi.org/10.1021/acs.inorgchem.9b01631openalex-snapshot
In Situ Formation of Ge Nanoparticles by Annealing of Al-Ge-N Thin Films Followed by HAXPES and XRD
inferred← citeshttps://doi.org/10.1021/jacs.2c06023openalex-snapshot
Two-Dimensional Wedge-Shaped Magnetic EuS: Insight into the Substrate Step-Guided Epitaxial Synthesis on Sapphire
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Understanding the microstructural evolution and mechanical properties of transparent Al-O-N and Al-Si-O-N films
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Milled-Si@C Composites as Potential Anode Materials for Li- ion Batteries
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