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Integration of On-machine Surface Measurement into Fast Tool Servo Machining

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What this work says

Outgoing claims: the papers this work cites, builds on, or argues with.

inferredcites →https://doi.org/10.1007/s00170-015-7051-0openalex-snapshot
Investigation of a scale-up manufacturing approach for nanostructures by using a nanoscale multi-tip diamond tool
inferredcites →https://doi.org/10.1007/s00170-017-1271-4openalex-snapshot
Review on fast tool servo machining of optical freeform surfaces
inferredcites →https://doi.org/10.1016/j.cirp.2013.05.003openalex-snapshot
Manufacturing and measurement of freeform optics
inferredcites →https://doi.org/10.1016/j.cirp.2019.05.005openalex-snapshot
On-machine and in-process surface metrology for precision manufacturing
inferredcites →https://doi.org/10.1016/j.cirp.2020.04.111openalex-snapshot
Fast-tool-servo micro-grooving freeform surfaces with embedded metrology
inferredcites →https://doi.org/10.1016/j.measurement.2010.06.003openalex-snapshot
Characterization of surface defects in fast tool servo machining of microlens array using a pattern recognition and analysis method
inferredcites →https://doi.org/10.3390/mi9070334openalex-snapshot
Kinematics Error Compensation for a Surface Measurement Probe on an Ultra-Precision Turning Machine

What points at this work

Incoming claims: where this work appears in other papers’ reference lists and arguments.

inferred← citeshttps://doi.org/10.2139/ssrn.4588154openalex-extracted
inferred← citeshttps://doi.org/10.1016/j.eng.2025.07.041openalex-snapshot
Galvanometer-Based Alignment-Error-Free Full-in-Situ Imaging and Laser Processing System with Applications to Pan-Semiconductor Manufacturing
inferred← citeshttps://doi.org/10.1016/j.measurement.2024.115098openalex-snapshot
On-machine correction of form error for structured surfaces with anisotropic diffusion filter
inferred← citeshttps://doi.org/10.1051/matecconf/202440113007openalex-snapshot
Development of an on-machine surface measurement system for an ultra-precision five-axis machine
inferred← citeshttps://doi.org/10.1088/1361-6501/ac91e7openalex-snapshot
Novel scanning system with error separation for high-accuracy profile measurement
inferred← citeshttps://doi.org/10.1109/icac57885.2023.10275199openalex-snapshot
A Machine Vision Based In-Line Quality Assessment Method for the Fabrication of Structured Surfaces
inferred← citeshttps://doi.org/10.3390/app112110302openalex-snapshot
Fabrication of Sinusoidal Microstructures on Curved Copper Surface by Ultra-Precision Diamond Cutting with a Rotary B-Axis and Fast Tool Servo System
inferred← citeshttps://doi.org/10.3390/machines13020140openalex-snapshot
Advances in Computer Numerical Control Geometric Error Compensation: Integrating AI and On-Machine Technologies for Ultra-Precision Manufacturing
inferred← citeshttps://doi.org/10.3390/pr11051337openalex-snapshot
A Review of Advances in Fabrication Methods and Assistive Technologies of Micro-Structured Surfaces
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