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Comparative study on dry etching of polycrystalline diamond thin films
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What this work says
Outgoing claims: the papers this work cites, builds on, or argues with.
inferredcites →https://doi.org/10.1016/0925-9635(95)00368-1openalex-snapshot
Surface smoothing of diamond membranes by reactive ion etching process
inferredcites →https://doi.org/10.1016/j.apsusc.2010.03.034openalex-snapshot
Fabrication of diamond nanorods for gas sensing applications
inferredcites →https://doi.org/10.1016/j.diamond.2003.10.007openalex-snapshot
Structuring single- and nano-crystalline diamond cones
inferredcites →https://doi.org/10.1016/j.diamond.2005.04.011openalex-snapshot
Micromachining of CVD diamond by RIE for MEMS applications
inferredcites →https://doi.org/10.1016/j.diamond.2005.09.033openalex-snapshot
Fabrication and characterization of diamond micro-optics
inferredcites →https://doi.org/10.1016/j.diamond.2007.12.065openalex-snapshot
High aspect ratio diamond microelectrode array for neuronal activity measurements
inferredcites →https://doi.org/10.1016/j.diamond.2007.12.071openalex-snapshot
ICP etching of polycrystalline diamonds: Fabrication of diamond nano-tips for AFM cantilevers
inferredcites →https://doi.org/10.1016/j.diamond.2009.01.023openalex-snapshot
Seeding of polymer substrates for nanocrystalline diamond film growth
inferredcites →https://doi.org/10.1016/j.vacuum.2005.11.011openalex-snapshot
Ion-beam processing of single crystal diamond using SOG mask
inferredcites →https://doi.org/10.1016/s0925-9635(01)00617-3openalex-snapshot
Smooth and high-rate reactive ion etching of diamond
inferredcites →https://doi.org/10.1016/s0925-9635(01)00703-8openalex-snapshot
Reactive ion etching of CVD-diamond for piezoresistive pressure sensors
inferredcites →https://doi.org/10.1063/1.2841822openalex-snapshot
Fabrication of diamond nanopillars and their arrays
inferredcites →https://doi.org/10.1088/0957-4484/10/4/304openalex-snapshot
Plasma etching of CVD diamond films using an ECR-type oxygen source
inferredcites →https://doi.org/10.1143/jjap.46.6267openalex-snapshot
Ultrafine Patterning of Nanocrystalline Diamond Films Grown by Microwave Plasma-Assisted Chemical Vapor Deposition
What points at this work
Incoming claims: where this work appears in other papers’ reference lists and arguments.
inferred← citeshttps://doi.org/10.1007/978-1-84996-408-1_6openalex-snapshot
High Energy Beam Polishing
inferred← citeshttps://doi.org/10.1016/j.apsusc.2024.159589openalex-snapshot
Micro- to nano-scale topographical etching of diamond substrate via anisotropically atomic removal
inferred← citeshttps://doi.org/10.1016/j.carbon.2024.119366openalex-snapshot
Benchmarking Diamond Surface Preparation and Fluorination Via Inductively Coupled Plasma-Reactive Ion Etching
inferred← citeshttps://doi.org/10.1016/j.commatsci.2025.114084openalex-snapshot
Chemical removal and physical damage in the dry etching process of diamond: A case study of Ar and F etching through reactive molecular dynamics simulations
inferred← citeshttps://doi.org/10.1016/j.diamond.2016.05.002openalex-snapshot
High-rate ultrasonic polishing of polycrystalline diamond films
inferred← citeshttps://doi.org/10.1016/j.diamond.2017.09.014openalex-snapshot
Implementation of smooth nanocrystalline diamond microstructures by combining reactive ion etching and ion beam etching
inferred← citeshttps://doi.org/10.1016/j.diamond.2019.05.010openalex-snapshot
Polishing, preparation and patterning of diamond for device applications
inferred← citeshttps://doi.org/10.1016/j.diamond.2019.107600openalex-snapshot
Subsurface cleavage of diamond after high-speed three-dimensional dynamic friction polishing
inferred← citeshttps://doi.org/10.1016/j.diamond.2023.110329openalex-snapshot
Effective removal of metal-carbide contamination from diamond circuit boards by reactive ion etching
inferred← citeshttps://doi.org/10.1016/j.energy.2024.130914openalex-snapshot
Nitrogen-incorporated boron-doped diamond films for enhanced electrochemical supercapacitor performance
inferred← citeshttps://doi.org/10.1016/j.matlet.2019.06.079openalex-snapshot
Surface morphology evolution of a polycrystalline diamond by inductively coupled plasma reactive ion etching (ICP-RIE)
inferred← citeshttps://doi.org/10.1016/j.mssp.2022.106841openalex-snapshot
Vertical 3D diamond field effect transistors with nanoscale gate-all-around
inferred← citeshttps://doi.org/10.1016/j.mssp.2024.108824openalex-snapshot
Roughness control in the processing of 2-inch polycrystalline diamond films on 4H-SiC wafers
inferred← citeshttps://doi.org/10.1016/j.tsf.2015.07.022openalex-snapshot
Investigation of residual stress in structured diamond films grown on silicon
inferred← citeshttps://doi.org/10.1016/j.tsf.2022.139499openalex-snapshot
Effect of treatment time and radio frequency power on roughness and wettability of oxygen plasma-etched Cadmium Telluride thin films
inferred← citeshttps://doi.org/10.1016/j.vacuum.2016.03.012openalex-snapshot
Investigations on etching resistance of undoped and boron doped polycrystalline diamond films by oxygen plasma etching
inferred← citeshttps://doi.org/10.1016/j.vacuum.2019.108953openalex-snapshot
Structured and graphitized boron doped diamond electrodes: Impact on electrochemical detection of Cd2+ and Pb2+ ions
inferred← citeshttps://doi.org/10.1021/acsaelm.3c00713openalex-snapshot
Nanoscale Investigation on the Improvement of Electrical Properties of Boron-Doped Diamond Nanostructures for High-Performance Plasma Displays
inferred← citeshttps://doi.org/10.1063/1.5094751openalex-snapshot
Optimizing reactive ion etching to remove sub-surface polishing damage on diamond
inferred← citeshttps://doi.org/10.1063/5.0313899openalex-snapshot
Low-energy ion beam sputtering of polycrystalline diamond
inferred← citeshttps://doi.org/10.1080/26941112.2023.2246495openalex-snapshot
The polishing methods for large area CVD diamond wafer
inferred← citeshttps://doi.org/10.1088/1361-6439/ab44feopenalex-snapshot
Micro-manufacturing technology of a three-dimensional curved surface diamond structure for gyroscope applications
inferred← citeshttps://doi.org/10.1088/2515-7647/aba171openalex-snapshot
Integrated photonic devices in single crystal diamond
inferred← citeshttps://doi.org/10.1109/omn.2018.8454634openalex-snapshot
Characterization of Crystallographically Etched Single Crystal Diamond Diffraction Gratings
inferred← citeshttps://doi.org/10.1116/1.5131343openalex-snapshot
Plasma etching of wide bandgap and ultrawide bandgap semiconductors
inferred← citeshttps://doi.org/10.1117/12.2290557openalex-snapshot
Trapezoidal diffraction grating beam splitters in single crystal diamond
inferred← citeshttps://doi.org/10.1557/jmr.2019.369openalex-snapshot
Fast smoothing on diamond surface by inductively coupled plasma reactive ion etching
inferred← citeshttps://doi.org/10.3390/ma18112615openalex-snapshot
Optimization of Diamond Polishing Process for Sub-Nanometer Roughness Using Ar/O2/SF6 Plasma
inferred← citeshttps://doi.org/10.3390/proceedings2130984openalex-snapshot
Fabrication of Structured Boron-Doped Diamond Films for Electrochemical Applications
inferred← citeshttps://doi.org/10.3390/surfaces5010008openalex-snapshot
Wafer-Scale Polishing of Polycrystalline MPACVD-Diamond
inferred← citeshttps://doi.org/10.70675/cb4d04f9z14bfz476ez91a3zcf09b860b0a9openalex-snapshot
Diamond photonic crystals for new bio-sensors
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