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Spectroscopic Study of AlN Film Formation by the Sequential Reaction of Ammonia and Trimethylaluminum on Alumina
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What this work says
Outgoing claims: the papers this work cites, builds on, or argues with.
inferredcites →https://doi.org/10.1002/ange.19700820120openalex-snapshot
Handbook of Chemistry and Physics. Herausgeg. von R. C. Weast. 49. Auflage, The Chemical Rubber Co., Cleveland, Ohio, 1968. 2096 Seiten, geb. DM 89.80
inferredcites →https://doi.org/10.1007/978-94-011-6520-4openalex-snapshot
The Infrared Spectra of Complex Molecules
inferredcites →https://doi.org/10.1016/0039-6028(94)00512-5openalex-snapshot
The surface chemistry of aluminum nitride MOCVD on alumina using trimethylaluminum and ammonia as precursors
inferredcites →https://doi.org/10.1016/0042-207x(94)90087-6openalex-snapshot
Practical surface analysis
inferredcites →https://doi.org/10.1016/0368-2048(93)85006-7openalex-snapshot
High resolution XPS of organic polymers: the scienta ESCA300 database
inferredcites →https://doi.org/10.1016/0370-2693(68)90016-6openalex-snapshot
Evidence for a broad scalar Kπ resonance near 1.1 GeV
inferredcites →https://doi.org/10.1016/0371-1951(57)80132-5openalex-snapshot
Infra-red absorption spectra of inorganic co-ordination complexes—XI
inferredcites →https://doi.org/10.1016/0371-1951(57)80149-0openalex-snapshot
The NH stretching frequencies of primary amines
inferredcites →https://doi.org/10.1016/0375-9601(68)90202-8openalex-snapshot
FMR studies of Ag-doped CdCr2Se4
inferredcites →https://doi.org/10.1016/s0016-0032(30)91499-8openalex-snapshot
Handbook of chemistry and physics
inferredcites →https://doi.org/10.1021/cm00027a025openalex-snapshot
Mechanistics of early stage growth of aluminum nitride (AlN) on alumina: TMAl [trimethylaluminum] and ammonia
inferredcites →https://doi.org/10.1021/cm00036a020openalex-snapshot
Mechanistics of early stage growth of aluminum nitride on alumina. 2. TMAl and ammonia
inferredcites →https://doi.org/10.1021/cm00046a024openalex-snapshot
Infrared Spectroscopy of Trimethylaluminum and Dimethylaluminum chloride adsorbed on Alumina
inferredcites →https://doi.org/10.1021/cm00055a014openalex-snapshot
Effects of Ammonia on the Pyrolytic Decomposition of Alkylaluminum Amides to Aluminum Nitride
inferredcites →https://doi.org/10.1021/j100364a030openalex-snapshot
Infrared and tunneling spectroscopy study of aluminum nitride films prepared by ion-beam deposition
inferredcites →https://doi.org/10.1021/j100412a083openalex-snapshot
Decomposition of water on clean and oxidized aluminum(100)
inferredcites →https://doi.org/10.1021/j100566a009openalex-snapshot
Infrared studies of reactions on oxide surfaces. 7. Mechanism of the adsorption of water and ammonia on dehydroxylated silica
inferredcites →https://doi.org/10.1021/j100885a034openalex-snapshot
Infrared Study of Adsorption of Ammonia on Dry γ-Alumina1
inferredcites →https://doi.org/10.1021/ja01628a019openalex-snapshot
Infrared Absorption Spectra of Inorganic Coördination Complexes.1a,b V. The N-H Stretching Vibration in Coördination Compounds
inferredcites →https://doi.org/10.1039/jr9550000483openalex-snapshot
Intensities of vibration bands. Part VII. The NH group
inferredcites →https://doi.org/10.1063/1.333335openalex-snapshot
Auger electron and x-ray photoelectron spectroscopy of sputter deposited aluminum nitride
inferredcites →https://doi.org/10.1063/1.338207openalex-snapshot
Electronic structure of an AlN film produced by ion implantation, studied by electron spectroscopy
inferredcites →https://doi.org/10.1063/1.95075openalex-snapshot
Chemical beam epitaxy of InP and GaAs
inferredcites →https://doi.org/10.1063/1.96490openalex-snapshot
Very low current threshold GaAs/Al0.5Ga0.5As double-heterostructure lasers grown by chemical beam epitaxy
inferredcites →https://doi.org/10.1080/03602457808080878openalex-snapshot
Catalytic Aluminas: Surface Models and Characterization of Surface Sites
inferredcites →https://doi.org/10.1116/1.577226openalex-snapshot
The reaction pathway for the growth of alumina on high surface area alumina and in ultrahigh vacuum by a reaction between trimethyl aluminum and water
inferredcites →https://doi.org/10.1116/1.582966openalex-snapshot
Surface photochemical phenomena in laser chemical vapor deposition
inferredcites →https://doi.org/10.1143/jjap.24.l163openalex-snapshot
Room Temperature cw Operation of Visible InGaAsP Double Heterostructure Laser at 671 nm Grown by Hydride VPE
inferredcites →https://doi.org/10.1246/bcsj.51.1602openalex-snapshot
Vibrational Spectra and Normal Coordinate Calculations for Trimethylaluminium–Ammonia
inferredcites →https://doi.org/10.1366/000370272774352173openalex-snapshot
An Internal Standard for Electron Spectroscopy for Chemical Analysis Studies of Supported Catalysts
What points at this work
Incoming claims: where this work appears in other papers’ reference lists and arguments.
inferred← citeshttps://doi.org/10.2139/ssrn.4198261openalex-extracted
Structural, Compositional, and Thermal Stability Studies on In0.96ga0.04n Epilayers Grown by High Pressure Chemical Vapor Deposition
inferred← citeshttps://doi.org/10.1002/9780470145333.ch155openalex-snapshot
Separate Source Syntheses in the Gas Phase
inferred← citeshttps://doi.org/10.1016/j.comptc.2014.02.015openalex-snapshot
Mechanisms for reactions of trimethylaluminum with molecular oxygen and water
inferred← citeshttps://doi.org/10.1016/j.micromeso.2024.113301openalex-snapshot
Evaluation of potential adsorbents for simultaneous adsorption of phosphate and ammonium at low concentrations
inferred← citeshttps://doi.org/10.1016/j.surfcoat.2012.05.101openalex-snapshot
Gas injection as a tool for plasma process control during coating deposition
inferred← citeshttps://doi.org/10.1016/s0040-6090(99)00003-6openalex-snapshot
Study of the chemistry of NH3 on aluminum nitride and oxynitride under steady-state conditions using external-reflection infrared spectroscopy
inferred← citeshttps://doi.org/10.1016/s0169-4332(00)00440-2openalex-snapshot
Growth of aluminium nitride on porous silica by atomic layer chemical vapour deposition
inferred← citeshttps://doi.org/10.1021/acs.jpcc.3c03063openalex-snapshot
Area-Selective Low-Pressure Thermal Atomic Layer Deposition of Aluminum Nitride
inferred← citeshttps://doi.org/10.1021/cm000083iopenalex-snapshot
Infrared and NMR Spectroscopic Studies of n-Alkanethiols Chemically Grafted on Dimethylzinc-Modified Silica Surfaces
inferred← citeshttps://doi.org/10.1021/cm011176iopenalex-snapshot
Growth of Aluminum Nitride on Porous Alumina and Silica through Separate Saturated Gas−Solid Reactions of Trimethylaluminum and Ammonia
inferred← citeshttps://doi.org/10.1021/cm970735bopenalex-snapshot
Infrared Study of the Surface Species Formed by Sequential Chemical Vapor Deposition of Dimethyl Zinc and Ethanethiol on Hydroxylated Alumina Surfaces
inferred← citeshttps://doi.org/10.1021/jp000454iopenalex-snapshot
IR and NMR Study of the Chemisorption of Ammonia on Trimethylaluminum-Modified Silica
inferred← citeshttps://doi.org/10.1116/1.581384openalex-snapshot
Observation of adsorption and reaction of NH3 on crystalline Al2O3 under steady-state conditions using external-reflection infrared spectroscopy
inferred← citeshttps://doi.org/10.1116/6.0001633openalex-snapshot
Plasma enhanced atomic layer deposition of textured aluminum nitride on platinized substrates for MEMS
inferred← citeshttps://doi.org/10.1134/s1063739718020026openalex-snapshot
Atomic Layer Deposition of Aluminum Nitride Using Tris(diethylamido)aluminum and Hydrazine or Ammonia
inferred← citeshttps://doi.org/10.1149/1.2168387openalex-snapshot
Properties of Aluminum Nitride Thin Films Deposited by an Alternate Injection of Trimethylaluminum and Ammonia under Ultraviolet Radiation
inferred← citeshttps://doi.org/10.1557/proc-512-445openalex-snapshot
In Situ Characterization of Ain Films Grown on Silicon by MOCVD
inferred← citeshttps://doi.org/10.1557/proc-535-213openalex-snapshot
Growth And Characterization Of Amorphous Ain Thin Films By Reactive Magnetron Sputtering At Low Temperature
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