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Thermal conductivity and diffusivity of free-standing silicon nitride thin films

https://doi.org/10.1063/1.1145989
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Outgoing claims: the papers this work cites, builds on, or argues with.

inferredcites →https://doi.org/10.1007/bf00348399openalex-snapshot
Thermal conductivity and interface thermal resistance of Si film on Si substrate determined by photothermal displacement interferometry
inferredcites →https://doi.org/10.1016/0040-6090(84)90218-9openalex-snapshot
Insulation degradation and anomalous etching phenomena in silicon nitride films prepared by plasma-enhanced deposition
inferredcites →https://doi.org/10.1016/0040-6090(92)90123-sopenalex-snapshot
Thermal conductivity of thin SiO2 films
inferredcites →https://doi.org/10.1016/0169-4332(89)90169-4openalex-snapshot
Optical properties and microstructure of silicon nitride film synthesized by ion beam enhanced deposition
inferredcites →https://doi.org/10.1063/1.105339openalex-snapshot
Microtransport induced by ultrasonic Lamb waves
inferredcites →https://doi.org/10.1063/1.1138117openalex-snapshot
Thermal diffusivity measurement of thin films by means of an ac calorimetric method
inferredcites →https://doi.org/10.1063/1.335915openalex-snapshot
Low-temperature direct nitridation of silicon in nitrogen plasma generated by microwave discharge
inferredcites →https://doi.org/10.1063/1.336513openalex-snapshot
The electronic properties of plasma-deposited films of hydrogenated amorphous SiNx (0<x<1.2)
inferredcites →https://doi.org/10.1063/1.339924openalex-snapshot
Thermal conductivity of heavily doped low-pressure chemical vapor deposited polycrystalline silicon films
inferredcites →https://doi.org/10.1063/1.342957openalex-snapshot
An interferometric calorimeter for thin-film thermal diffusivity measurements
inferredcites →https://doi.org/10.1063/1.97363openalex-snapshot
Silicon nitride films grown on silicon below 300 °C in low power nitrogen plasma
inferredcites →https://doi.org/10.1103/physrevb.23.5454openalex-snapshot
Electronic structures of β - and α -silicon nitride
inferredcites →https://doi.org/10.1109/16.2525openalex-snapshot
A multisensor employing an ultrasonic Lamb-wave oscillator
inferredcites →https://doi.org/10.1116/1.576265openalex-snapshot
Thermal conductivity of thin films: Measurements and understanding
inferredcites →https://doi.org/10.1364/ao.32.003550openalex-snapshot
Measurement of spectral, directional reflectivities of solids at high temperatures between 9 and 11 μm
inferredcites →https://doi.org/10.1364/ol.9.000093openalex-snapshot
Thermal diffusivity in thin films measured by noncontact single-ended pulsed-laser-induced thermal radiometry

What points at this work

Incoming claims: where this work appears in other papers’ reference lists and arguments.

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Advances in Thermal Conductivity
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Fabrication, Characterization, and Thermal Failure Analysis of a Micro Hot Plate Chemical Sensor Substrate
inferred← citeshttps://doi.org/10.1246/cl.160175openalex-snapshot
In-plane Thermal Conductivity Measurement of Conjugated Polymer Films by Membrane-based AC Calorimetry
inferred← citeshttps://doi.org/10.1364/ao.41.004596openalex-snapshot
Estimation of thermal coefficients of magneto-optical media
inferred← citeshttps://doi.org/10.1364/cleo.2009.cthb4openalex-snapshot
Optimization of Metallic Micro-Heaters for Reconfigurable Silicon Photonics
inferred← citeshttps://doi.org/10.1364/oe.18.018312openalex-snapshot
Optimization of metallic microheaters for high-speed reconfigurable silicon photonics
inferred← citeshttps://doi.org/10.1364/oe.27.010456openalex-snapshot
Optimization of thermo-optic phase-shifter design and mitigation of thermal crosstalk on the SOI platform
inferred← citeshttps://doi.org/10.1515/ntrev-2014-0024openalex-snapshot
Thermal transport across atomic-layer material interfaces
inferred← citeshttps://doi.org/10.1557/proc-444-39openalex-snapshot
Mechanical and Thermophysical Properties of Thin Film Materials for Mems: Techniques and Devices
inferred← citeshttps://doi.org/10.1631/jzus.a0820493openalex-snapshot
Measurement of the thermal transport properties of dielectric thin films using the micro-Raman method
inferred← citeshttps://doi.org/10.17073/1609-3577-2020-1-57-70openalex-snapshot
Materials issues in thermal modeling of thin film electrocaloric solid-state refrigerators
inferred← citeshttps://doi.org/10.20381/ruor-27054openalex-snapshot
Heat Transport in Silicon Nitride Drum Resonators and its Influence on Thermal Fluctuation-induced Frequency Noise
inferred← citeshttps://doi.org/10.2139/ssrn.7202139openalex-snapshot
Enhanced In-Plane Thermal Characterization in Suspended Thin Films using Localized Transducer FDTR: From Thermal Isolators to Heat Spreaders
inferred← citeshttps://doi.org/10.2172/889417openalex-snapshot
Multiscale thermal transport.
inferred← citeshttps://doi.org/10.2514/1.40976openalex-snapshot
Raman Scattering Characterization of Transparent Thin Film for Thermal Conductivity Measurement
inferred← citeshttps://doi.org/10.2514/1.t4491openalex-snapshot
Raman Spectroscopy-Based Investigation of Thermal Conductivity of Stressed Silicon Microcantilevers
inferred← citeshttps://doi.org/10.2514/2.6321openalex-snapshot
Review of the Thermal Conductivity of Thin Films
inferred← citeshttps://doi.org/10.2514/6.1997-2461openalex-snapshot
A review of the thermal conductivity of thin films
inferred← citeshttps://doi.org/10.2514/6.2009-317openalex-snapshot
Wall Shear Stress Measurements Based on Thermal Wave
inferred← citeshttps://doi.org/10.32604/cmes.2020.08164openalex-snapshot
Real-Time Thermomechanical Modeling of PV Cell Fabrication via a POD-Trained RBF Interpolation Network
inferred← citeshttps://doi.org/10.3390/cryst12101361openalex-snapshot
Properties of SiC and Si3N4 Thin Films Containing Self-Assembled Gold Nanoparticles
inferred← citeshttps://doi.org/10.3390/mi13101729openalex-snapshot
Micromachined Thermal Time-of-Flight Flow Sensors and Their Applications
inferred← citeshttps://doi.org/10.3390/mi7100174openalex-snapshot
In-Situ Testing of the Thermal Diffusivity of Polysilicon Thin Films
inferred← citeshttps://doi.org/10.3390/s17010062openalex-snapshot
Modeling, Fabrication and Testing of a Customizable Micromachined Hotplate for Sensor Applications
inferred← citeshttps://doi.org/10.3390/s19051205openalex-snapshot
Ligand-Linked Nanoparticles-Based Hydrogen Gas Sensor with Excellent Homogeneous Temperature Field and a Comparative Stability Evaluation of Different Ligand-Linked Catalysts
inferred← citeshttps://doi.org/10.3897/j.moem.4.2.33391openalex-snapshot
Materials issues in thermal modeling of thin film electrocaloric solid-state refrigerators
inferred← citeshttps://doi.org/10.3906/fiz-1601-14openalex-snapshot
Thermal diffusion in thin plates and coatings: influence of thickness and substrate material
inferred← citeshttps://doi.org/10.4233/uuid:c11002b2-f033-44ac-bba9-fb3d32283d51openalex-snapshot
In-situ Transmission Electron Microscopy Studies on Graphene
inferred← citeshttps://doi.org/10.48550/arxiv.1804.02694openalex-snapshot
Micro-thermocouple on nano-membrane: thermometer for nanoscale measurements
inferred← citeshttps://doi.org/10.53846/goediss-6973openalex-snapshot
Untersuchungen der Wärmekapazität von Nanopartikeln und Multilagen mit der nanokalorimetrischen Methode
inferred← citeshttps://doi.org/10.70675/125eacd4ze2e2z461cz9c9az7223ffbab9d0openalex-snapshot
Étude et réalisation de microgénérateurs thermoélectriques planaires en technologie silicium
inferred← citeshttps://doi.org/10.70675/43f88da6z9df3z4c44zb261z44bb7de69428openalex-snapshot
Thermal characterization of nanostructures using scanning thermal microscopy
inferred← citeshttps://doi.org/10.70675/a35cba31z8b49z43c2z8828z825cf19b9a90openalex-snapshot
Development of two techniques for thermal characterization of materials : Scanning Thermal Microscopy (SThM) and 2ω method
inferred← citeshttps://doi.org/10.70675/bd78bc8az6feaz4928z833czdea5ec9040c0openalex-snapshot
Structural and thermal characterization of AIN thin films and their integration in laser devices
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