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Chemical bonding, optical constants, and electrical resistivity of sputter-deposited gallium oxide thin films

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What this work says

Outgoing claims: the papers this work cites, builds on, or argues with.

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Blue Emission of α-GaN Colloidal Quantum Dots via Zn Doping

inferred← citeshttps://doi.org/10.1021/acs.chemrev.4c00850openalex-snapshot

Connecting the Dots: Sintering of Liquid Metal Particles for Soft and Stretchable Conductors

inferred← citeshttps://doi.org/10.1021/acs.jpcc.0c01281openalex-snapshot

Aqueous Solution-Processed Boron-Doped Gallium Oxide Dielectrics for High-Performance Thin-Film Transistors

inferred← citeshttps://doi.org/10.1021/acs.jpcc.2c07177openalex-snapshot

Influence of Nitrogen Annealing Treatment on Optical, Microstructural, and Chemical Properties of Ga2O3 Film Grown by Plasma-Enhanced Atomic Layer Deposition

inferred← citeshttps://doi.org/10.1021/acs.jpcc.6b05487openalex-snapshot

Tungsten Incorporation into Gallium Oxide: Crystal Structure, Surface and Interface Chemistry, Thermal Stability, and Interdiffusion

inferred← citeshttps://doi.org/10.1021/acs.langmuir.1c03281openalex-snapshot

Chemical Analysis of the Gallium Surface in a Physiologic Buffer

inferred← citeshttps://doi.org/10.1021/acsaelm.0c01094openalex-snapshot

Artificial Synaptic Performance with Learning Behavior for Memristor Fabricated with Stacked Solution-Processed Switching Layers

inferred← citeshttps://doi.org/10.1021/acsaelm.5c01553openalex-snapshot

Stress-Assisted Networking Enabled Highly Conductive Liquid Metal-Based PVP-Fructose Gel with Multi-intelligent Properties for Stretchable Electronics

inferred← citeshttps://doi.org/10.1021/acsaelm.6c01181openalex-snapshot

Influence of RF Sputtering Temperature on Defects, Transport, and UV-C Photodetection of a-Ga2O3

inferred← citeshttps://doi.org/10.1021/acsaelm.9b00781openalex-snapshot

Maskless Patterning of Gallium-Irradiated Superconducting Silicon Using Focused Ion Beam

inferred← citeshttps://doi.org/10.1021/acsami.0c10259openalex-snapshot

Ultrasensitive Flexible Solar-Blind Photodetectors Based on Graphene/Amorphous Ga2O3 van der Waals Heterojunctions

inferred← citeshttps://doi.org/10.1021/acsami.5b02451openalex-snapshot

Aqueous Solution-Deposited Gallium Oxide Dielectric for Low-Temperature, Low-Operating-Voltage Indium Oxide Thin-Film Transistors: A Facile Route to Green Oxide Electronics

inferred← citeshttps://doi.org/10.1021/acsami.5c04297openalex-snapshot

Electrical Performance and Deep-Level Trap Characterization of p-CuGaO2/β-Ga2O3 Heterojunctions for Power Electronics

inferred← citeshttps://doi.org/10.1021/acsami.9b10888openalex-snapshot

Polymer-Assisted Deposition of Gallium Oxide for Thin-Film Transistor Applications

inferred← citeshttps://doi.org/10.1021/acsami.9b12493openalex-snapshot

Surface Modification with Gallium Coating as Nonwetting Surfaces for Gallium-Based Liquid Metal Droplet Manipulation

inferred← citeshttps://doi.org/10.1021/acsanm.1c02197openalex-snapshot

Doped Plasmonic Zinc Oxide Nanoparticles with Near-Infrared Absorption for Antitumor Activity

inferred← citeshttps://doi.org/10.1021/acsanm.1c03950openalex-snapshot

Nanopatterning of Polymer/Gallium Oxide Thin Films by UV-Curing Nanoimprint Lithography for Liquid Crystal Alignment

inferred← citeshttps://doi.org/10.1021/acsanm.5c05083openalex-snapshot

GaN/Sn:Ga 2 O 3 Nanowire Network n–n Heterojunction for High-Photocurrent Self-Powered Solar-Blind Photodetection

inferred← citeshttps://doi.org/10.1021/acsomega.1c05859openalex-snapshot

Temperature Dependence of Ultrathin Mixed-Phase Ga2O3Films Grown on the α-Al2O3Substrate via Mist-CVD

inferred← citeshttps://doi.org/10.1021/acsomega.2c05168openalex-snapshot

Crystallization, Phase Stability, Microstructure, and Chemical Bonding in Ga 2 O 3 Nanofibers Made by Electrospinning

inferred← citeshttps://doi.org/10.1021/acsomega.9b01604openalex-snapshot

Crystal Chemistry, Band-Gap Red Shift, and Electrocatalytic Activity of Iron-Doped Gallium Oxide Ceramics

inferred← citeshttps://doi.org/10.1021/acsphotonics.7b00359openalex-snapshot

Ultrahigh-Responsivity, Rapid-Recovery, Solar-Blind Photodetector Based on Highly Nonstoichiometric Amorphous Gallium Oxide

inferred← citeshttps://doi.org/10.1021/acssensors.0c00233openalex-snapshot

Liquid Metal-Based Route for Synthesizing and Tuning Gas-Sensing Elements

inferred← citeshttps://doi.org/10.1021/acssensors.6c02036openalex-snapshot

Customizable 3D Microelectrode Arrays Enabled by Two-Photon Polymerization and Liquid Metal Integration for Neural Interface Applications

inferred← citeshttps://doi.org/10.1038/srep32319openalex-snapshot

Sonochemical Assisted Solvothermal Synthesis of Gallium Oxynitride Nanosheets and their Solar-Driven Photoelectrochemical Water-Splitting Applications

inferred← citeshttps://doi.org/10.1039/c4tc02985bopenalex-snapshot

Aqueous-based synthesis of gallium tungsten oxide thin film dielectrics

inferred← citeshttps://doi.org/10.1039/c5ra24577jopenalex-snapshot

Catalyst-free synthesis of a three-dimensional nanoworm-like gallium oxide–graphene nanosheet hybrid structure with enhanced optical properties

inferred← citeshttps://doi.org/10.1039/c7dt03427jopenalex-snapshot

Low temperature growth of gallium oxide thin films via plasma enhanced atomic layer deposition

inferred← citeshttps://doi.org/10.1039/c8ce00658jopenalex-snapshot

A well-grown β-Ga 2 O 3 microrod array formed from GaOOH on a Si (100) substrate and growth mechanism study

inferred← citeshttps://doi.org/10.1039/c9nr03903aopenalex-snapshot

Oxide rupture-induced conductivity in liquid metal nanoparticles by laser and thermal sintering

inferred← citeshttps://doi.org/10.1039/c9tc01417aopenalex-snapshot

Solar-blind ultraviolet photodetection of an α-Ga 2 O 3 nanorod array based on photoelectrochemical self-powered detectors with a simple, newly-designed structure

inferred← citeshttps://doi.org/10.1039/d1ra02531gopenalex-snapshot

High performance GZO/p-Si heterojunction diodes fabricated by reactive co-sputtering of Zn and GaAs through the control of GZO layer thickness

inferred← citeshttps://doi.org/10.1039/d2ce00055eopenalex-snapshot

Synthesis, mechanism and characterization of urchin-like Ga 2 O 3 microspheres

inferred← citeshttps://doi.org/10.1039/d2tc01128jopenalex-snapshot

Recent progress on the effects of impurities and defects on the properties of Ga 2 O 3

inferred← citeshttps://doi.org/10.1039/d6ra00107fopenalex-snapshot

Physicochemical modulation of liquid crystal anchoring energy via nanopatterned BiTiO/polymer hybrid interfaces

inferred← citeshttps://doi.org/10.1051/epjap/2015150418openalex-snapshot

Quantitative study for surface properties of AlGaN epi-layers by ARXPS

inferred← citeshttps://doi.org/10.1063/1.4894643openalex-snapshot

High electron mobility thin-film transistors based on Ga2O3 grown by atmospheric ultrasonic spray pyrolysis at low temperatures

inferred← citeshttps://doi.org/10.1063/1.4960779openalex-snapshot

Structure, electrical characteristics, and high-temperature stability of aerosol jet printed silver nanoparticle films

inferred← citeshttps://doi.org/10.1063/1.4974458openalex-snapshot

Comprehensive study on initial thermal oxidation of GaN(0001) surface and subsequent oxide growth in dry oxygen ambient

inferred← citeshttps://doi.org/10.1063/1.4985855openalex-snapshot

Growth and characterization of β-Ga2O3 thin films by molecular beam epitaxy for deep-UV photodetectors

inferred← citeshttps://doi.org/10.1063/1.5009008openalex-snapshot

Microstructure, mechanical and electrical properties of nanocrystalline W-Mo thin films

inferred← citeshttps://doi.org/10.1063/1.5054091openalex-snapshot

Transition from electron accumulation to depletion at β-Ga2O3 surfaces: The role of hydrogen and the charge neutrality level

inferred← citeshttps://doi.org/10.1063/1.5142999openalex-snapshot

Recent progress on the electronic structure, defect, and doping properties of Ga2O3

inferred← citeshttps://doi.org/10.1063/5.0074697openalex-snapshot

Ultra-wide bandgap β-Ga2O3 films: Optical, phonon, and temperature response properties

inferred← citeshttps://doi.org/10.1063/5.0308041openalex-snapshot

Performance enhancement and defect evolution in β-Ga2O3 Schottky barrier diodes induced by 170 keV proton irradiation

inferred← citeshttps://doi.org/10.1080/02678292.2015.1105312openalex-snapshot

Homogeneous alignment of liquid crystals on low-temperature solution-derived gallium oxide films via IB irradiation method

inferred← citeshttps://doi.org/10.1088/1361-6463/ac1af2openalex-snapshot

Recent advances in the growth of gallium oxide thin films employing various growth techniques—a review

inferred← citeshttps://doi.org/10.1088/1361-6528/abc4a2openalex-snapshot

Research of nanopore structure of Ga 2 O 3 film in MOCVD for improving the performance of UV photoresponse

inferred← citeshttps://doi.org/10.1088/1361-6641/aadf78openalex-snapshot

β -Ga 2 O 3 for wide-bandgap electronics and optoelectronics

inferred← citeshttps://doi.org/10.1088/1361-6641/abe3c5openalex-snapshot

Optical and structural properties of AlN thin films deposited on different faces of sapphire substrates

inferred← citeshttps://doi.org/10.1088/1361-6641/ad2b0bopenalex-snapshot

Understanding the effects of annealing induced structural transformations on the UVC absorbance and other optical properties of RF sputter deposited Ga2O3 thin films

inferred← citeshttps://doi.org/10.1088/1742-6596/1965/1/012066openalex-snapshot

The effect of annealing temperature on Ga2O3 film properties

inferred← citeshttps://doi.org/10.1088/2632-959x/abf3d3openalex-snapshot

Structural and mechanical properties of nanocrystalline Ga 2 O 3 films made by pulsed laser deposition onto transparent quartz substrates

inferred← citeshttps://doi.org/10.1103/physrevb.102.245306openalex-snapshot

Surface relaxation and rumpling of Sn-doped β−Ga2O3(010)

inferred← citeshttps://doi.org/10.1109/cce56709.2022.9975964openalex-snapshot

Amorphous-Ga2O3/GaAs(100) anisotype heterojunctions with amorphous-Ga2O3 n-type films grown by magnetron sputtering

inferred← citeshttps://doi.org/10.1109/edtm61175.2025.11040681openalex-snapshot

Silicon Doping in Amorphous Gallium Oxide Films by Plasma-Enhanced Atomic Layer Deposition for Dielectric and Optoelectronic Applications

inferred← citeshttps://doi.org/10.1109/jeds.2025.3615614openalex-snapshot

Si Doping in Amorphous GaO x Films via Plasma-Enhanced ALD for Dielectric and Optoelectronic Applications

inferred← citeshttps://doi.org/10.1109/smicnd.2019.8923753openalex-snapshot

Experimental and Theoretical Validation of Ga2O3 Thin Films Deposited by Physical Vapor Deposition

inferred← citeshttps://doi.org/10.1109/ted.2017.2660494openalex-snapshot

AlGaInP-Based LEDs With Al-doped ZnO Transparent Conductive Layer Grown by MOCVD

inferred← citeshttps://doi.org/10.1116/1.4942045openalex-snapshot

Structural and optical properties of β-Ga2O3 thin films grown by plasma-assisted molecular beam epitaxy

inferred← citeshttps://doi.org/10.1116/1.5023688openalex-snapshot

Deposition and characterization of nickel gallium thin films

inferred← citeshttps://doi.org/10.1116/1.5134800openalex-snapshot

Low-temperature growth of gallium oxide thin films by plasma-enhanced atomic layer deposition

inferred← citeshttps://doi.org/10.1116/6.0000938openalex-snapshot

Microstructure and optical properties of sputter-deposited Ga2O3 films

inferred← citeshttps://doi.org/10.1116/6.0001825openalex-snapshot

Properties of gallium oxide thin films grown by ion beam sputter deposition at room temperature

inferred← citeshttps://doi.org/10.1116/6.0001871openalex-snapshot

Plasma enhanced atomic layer deposition and atomic layer etching of gallium oxide using trimethylgallium

inferred← citeshttps://doi.org/10.1117/12.2262757openalex-snapshot

A study into the impact of sapphire substrate orientation on the properties of nominally-undoped β-Ga2O3 thin films grown by pulsed laser deposition

inferred← citeshttps://doi.org/10.1126/sciadv.abe3767openalex-snapshot

A general approach to composites containing nonmetallic fillers and liquid gallium

inferred← citeshttps://doi.org/10.1149/2.0121907jssopenalex-snapshot

Electronic Structure of Tungsten-Doped β-Ga2O3 Compounds

inferred← citeshttps://doi.org/10.1149/2.0141907jssopenalex-snapshot

Review—RF Sputtered Films of Ga2O3

inferred← citeshttps://doi.org/10.1149/2.0221912jssopenalex-snapshot

Effect of Dry Thermal Oxidation on Bulk GaN Substrates Grown by HVPE during CMP

inferred← citeshttps://doi.org/10.1149/2.0461907jssopenalex-snapshot

Spectroscopic Characterization of the Electronic Structure, Chemical Bonding, and Band Gap in Thermally Annealed Polycrystalline Ga2O3 Thin Films

inferred← citeshttps://doi.org/10.1155/js/4284783openalex-snapshot

Design and Optimization of p‐NiO/n‐β‐Ga 2 O 3 Heterojunction‐Based Deep Ultraviolet Photodetector for High Responsivity Performance

inferred← citeshttps://doi.org/10.1364/ao.485308openalex-snapshot

Mg ion implantation and post-annealing effect on the photoelectrical performance of a β-Ga 2 O 3 photodetector

inferred← citeshttps://doi.org/10.1364/ome.7.003643openalex-snapshot

High-sensitivity β-Ga_2O_3 solar-blind photodetector on high-temperature pretreated c-plane sapphire substrate

inferred← citeshttps://doi.org/10.1364/ome.8.002918openalex-snapshot

Optimizing the performance of a β-Ga2O3 solar-blind UV photodetector by compromising between photoabsorption and electric field distribution

inferred← citeshttps://doi.org/10.1557/s43579-022-00295-1openalex-snapshot

Annealing for controlled galinstan oxide thin-film morphological and electromechanical properties

inferred← citeshttps://doi.org/10.2139/ssrn.5160412openalex-snapshot

The Electron Migration Pathways in S-Scheme GaP-TiO2 Photocatalysts and Their Implications for Photocatalytic Hydrogen Production

inferred← citeshttps://doi.org/10.2139/ssrn.5266294openalex-snapshot

Phase Transformation of Gallium Oxide Thin Films with Deposition Temperature Grown on a C-Plane Sapphire Substrate Using an In-House Built Mist Cvd Setup

inferred← citeshttps://doi.org/10.2139/ssrn.5340302openalex-snapshot

Wire and Compact Structures of Gallium Oxide Thin Films Grown by Reactive Pulsed Dc Sputtering from a Liquid Target

inferred← citeshttps://doi.org/10.2139/ssrn.6138247openalex-snapshot

Revealing the crystalline and material properties of engineered α-Ga2O3 thin films based on phase-transition behavior analysis

inferred← citeshttps://doi.org/10.23919/am-fpd49417.2020.9224515openalex-snapshot

Photo-assisted Processing of Amorphous Gallium Oxide (a-GaOx) Thin Film for Flexible and Transparent Device Application

inferred← citeshttps://doi.org/10.31399/asm.tb.mfadr7.t91110351openalex-snapshot

Role of Advanced Circuit Edit for First Silicon Debug

inferred← citeshttps://doi.org/10.3389/fmats.2021.672128openalex-snapshot

Enhancement of Responsivity in Solar-Blind UV Detector With Back-Gate MOS Structure Fabricated on β-Ga2O3 Films

inferred← citeshttps://doi.org/10.3390/catal9121044openalex-snapshot

Advanced Ga2O3/Lignin and ZrO2/Lignin Hybrid Microplatforms for Glucose Oxidase Immobilization: Evaluation of Biosensing Properties by Catalytic Glucose Oxidation

inferred← citeshttps://doi.org/10.3390/ceramics5040048openalex-snapshot

X-ray Diffraction, Micro-Raman and X-ray Photoemission Spectroscopic Investigations for Hydrothermally Obtained Hybrid Compounds of Delafossite CuGaO2 and Wurtzite ZnO

inferred← citeshttps://doi.org/10.3390/cryst13071018openalex-snapshot

Ga2O3/Ag/Ga2O3-Laminated Film Fabricated at Room Temperature: Toward Applications in Ultraviolet Transparent Highly Conductive Electrodes

inferred← citeshttps://doi.org/10.3390/ma11040525openalex-snapshot

Ultra Uniform Pb0.865La0.09(Zr0.65Ti0.35)O3 Thin Films with Tunable Optical Properties Fabricated via Pulsed Laser Deposition

inferred← citeshttps://doi.org/10.3390/ma12223670openalex-snapshot

Influence of Carrier Gases on the Quality of Epitaxial Corundum-Structured α-Ga2O3 Films Grown by Mist Chemical Vapor Deposition Method

inferred← citeshttps://doi.org/10.3390/ma17153665openalex-snapshot

The Influence of Electrolytes on the Performance of Self-Powered Photoelectrochemical Photodetector Based on α-Ga2O3 Nanorods

inferred← citeshttps://doi.org/10.3390/molecules29122778openalex-snapshot

Preparation of 4-Amino-3-hydrazino-1,2,4-triazol-5-thiol-Modified Graphene Oxide and Its Greatly Enhanced Selective Adsorption of Gallium in Aqueous Solution

inferred← citeshttps://doi.org/10.3390/nano12091510openalex-snapshot

Compact Ga2O3 Thin Films Deposited by Plasma Enhanced Atomic Layer Deposition at Low Temperature

inferred← citeshttps://doi.org/10.3390/s21051793openalex-snapshot

The Design and Manufacturing Process of an Electrolyte-Free Liquid Metal Frequency-Reconfigurable Antenna

inferred← citeshttps://doi.org/10.35378/gujs.1275066openalex-snapshot

Effect of substrate temperature on structural, morphological, and optical properties of Gallium Oxide thin films deposited by RF-Sputtering

inferred← citeshttps://doi.org/10.35848/1347-4065/ad364eopenalex-snapshot

Hydrogen-included plasma-assisted reactive sputtering for conductivity control of ultra-wide bandgap amorphous gallium oxide

inferred← citeshttps://doi.org/10.35848/1347-4065/ad8714openalex-snapshot

High-temperature operation of Al2O3/Ga2O3 bi-layer gate stack GaN MOS-HEMT up to 450 °C with suppressed gate leakage

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