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Compensation of the sputter damage during a-Si deposition for poly-Si/SiOx passivating contacts by ex-situ p-doping

https://doi.org/10.1063/1.5123845
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What this work says

Outgoing claims: the papers this work cites, builds on, or argues with.

inferredcites →https://doi.org/10.1002/pssa.201431923openalex-snapshot
Degradation of hydrogenated amorphous silicon passivation films caused by sputtering deposition
inferredcites →https://doi.org/10.1002/pssr.201700334openalex-snapshot
Metallisation of Boron‐Doped Polysilicon Layers by Screen Printed Silver Pastes
inferredcites →https://doi.org/10.1007/bf00616992openalex-snapshot
A model for phosphorus segregation at the silicon-silicon dioxide interface
inferredcites →https://doi.org/10.1016/j.egypro.2017.09.250openalex-snapshot
Material properties of LPCVD processed n-type polysilicon passivating contacts and its application in PERPoly industrial bifacial solar cells
inferredcites →https://doi.org/10.1016/j.egypro.2017.09.336openalex-snapshot
Optical and electrical characterization of poly-Si/SiOx contacts and their implications on solar cell design
inferredcites →https://doi.org/10.1016/j.solmat.2018.04.029openalex-snapshot
SiO2 surface passivation layers – a key technology for silicon solar cells
inferredcites →https://doi.org/10.1016/j.solmat.2018.06.020openalex-snapshot
Laser contact openings for local poly-Si-metal contacts enabling 26.1%-efficient POLO-IBC solar cells
inferredcites →https://doi.org/10.1016/j.vacuum.2009.12.014openalex-snapshot
Magnetron sputtering – Milestones of 30 years
inferredcites →https://doi.org/10.1021/acsaem.8b00367openalex-snapshot
Direct Observation of the Impurity Gettering Layers in Polysilicon-Based Passivating Contacts for Silicon Solar Cells
inferredcites →https://doi.org/10.1051/jphyscol:1982125openalex-snapshot
GRAIN BOUNDARY SEGREGATION IN SILICON HEAVILY DOPED WITH PHOSPHORUS AND ARSENIC
inferredcites →https://doi.org/10.1063/1.338861openalex-snapshot
An investigation of the thermal stability of the interfacial oxide in polycrystalline silicon emitter bipolar transistors by comparing device results with high-resolution electron microscopy observations
inferredcites →https://doi.org/10.1063/1.5037610openalex-snapshot
23% efficient p-type crystalline silicon solar cells with hole-selective passivating contacts based on physical vapor deposition of doped silicon films
inferredcites →https://doi.org/10.1103/physrevb.53.7836openalex-snapshot
Dopant and carrier concentration in Si in equilibrium with monoclinic SiP precipitates

What points at this work

Incoming claims: where this work appears in other papers’ reference lists and arguments.

inferred← citeshttps://doi.org/10.2139/ssrn.4685629openalex-extracted
In-Situ Phosphorus Doped Poly-Si Films by Pecvd for Blistering-Free High-Efficiency Industrial Topcon Solar Cells
inferred← citeshttps://doi.org/10.1002/pip.3618openalex-snapshot
Mass production of crystalline silicon solar cells with polysilicon‐based passivating contacts: An industrial perspective
inferred← citeshttps://doi.org/10.1002/solr.202200409openalex-snapshot
Sputtered Phosphorus‐Doped poly‐Si on Oxide Contacts for Screen‐Printed Si Solar Cells
inferred← citeshttps://doi.org/10.1016/j.solmat.2021.111100openalex-snapshot
TOPCon – Technology options for cost efficient industrial manufacturing
inferred← citeshttps://doi.org/10.1016/j.solmat.2022.111586openalex-snapshot
Blistering-free polycrystalline silicon carbide films for double-sided passivating contact solar cells
inferred← citeshttps://doi.org/10.1016/j.solmat.2022.111890openalex-snapshot
Poly-Si thickness and temperature dependent oxide disruption induced by penetration of the interfacial oxide in (p) poly-Si/SiOx passivating contacts
inferred← citeshttps://doi.org/10.1016/j.solmat.2023.112290openalex-snapshot
Poly-Si Passivating Contacts Prepared Via Phosphorus Spin-on-Doping: A Comparison between Different Silicon Deposition Methods
inferred← citeshttps://doi.org/10.1016/j.solmat.2024.112771openalex-snapshot
Bi-layer in-situ phosphorus doped poly-Si films by PECVD for blistering-free high-efficiency industrial TOPCon solar cells
inferred← citeshttps://doi.org/10.1039/d2ta04730fopenalex-snapshot
Recent advancements in poly-Si/SiO x passivating contacts for high-efficiency silicon solar cells: technology review and perspectives
inferred← citeshttps://doi.org/10.1109/jphotov.2021.3119595openalex-snapshot
Passivation Enhancement of Poly-Si Carrier-Selective Contacts by Applying ALD Al2O3 Capping Layers
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