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A PIEZOELECTRICALLY ACTUATED MEMS SPEAKER WITH POLYIMIDE MEMBRANE AND THIN FILM Pb(Zr,Ti)O3(PZT) ACTUATOR

https://doi.org/10.1080/10584580903039372
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What this work says

Outgoing claims: the papers this work cites, builds on, or argues with.

inferredcites →https://doi.org/10.1016/j.mejo.2006.07.023openalex-snapshot
Fabrication and performance of MEMS-based piezoelectric power generator for vibration energy harvesting
inferredcites →https://doi.org/10.1016/j.sna.2006.05.030openalex-snapshot
Silicon nitride cantilever array integrated with silicon heaters and piezoelectric detectors for probe-based data storage
inferredcites →https://doi.org/10.1016/s0924-4247(02)00310-2openalex-snapshot
Micromachined piezoelectric membrane acoustic device
inferredcites →https://doi.org/10.1080/10584580108012808openalex-snapshot
Micromirror actuated by PZT film for optical application
inferredcites →https://doi.org/10.1080/10584580701756524openalex-snapshot
MICROMACHINED PIEZOELECTRIC MICROSPEAKERS FABRICATED WITH HIGH QUALITY ALN THIN FILM
inferredcites →https://doi.org/10.1088/0960-1317/14/4/001openalex-snapshot
Micropump based on PZT unimorph and one-way parylene valves
inferredcites →https://doi.org/10.1088/0960-1317/18/12/125022openalex-snapshot
Piezoelectrically pushed rotational micromirrors using detached PZT actuators for wide-angle optical switch applications
inferredcites →https://doi.org/10.1088/0960-1317/8/3/009openalex-snapshot
Piezoelectric cantilever acoustic transducer
inferredcites →https://doi.org/10.1109/icsens.2005.1597643openalex-snapshot
Bi-Directional Electrostatic Microspeaker with Two Large-Deflection Flexible Membranes Actuated by Single/Dual Electrodes
inferredcites →https://doi.org/10.1109/led.2008.2000948openalex-snapshot
A Compact, Low-Power, and Electromagnetically Actuated Microspeaker for Hearing Aids
inferredcites →https://doi.org/10.1109/led.2021.3095778openalex-snapshot
IEEE Electron Device Letters
inferredcites →https://doi.org/10.1109/sensor.2003.1215297openalex-snapshot
Digital sound reconstruction using arrays of CMOS-MEMS microspeakers
inferredcites →https://doi.org/10.1143/jjap.41.7158openalex-snapshot
Fabrication of a Cantilever Structure for Piezoelectric Microphone
inferredcites →https://doi.org/10.3938/jkps.51.1374openalex-snapshot
Investigation of PZT Damage during Wafer-Level Bonding of Thermo-Piezoelectric Cantilevers with CMOS Wafers for Probe-Based Data Storage

What points at this work

Incoming claims: where this work appears in other papers’ reference lists and arguments.

inferred← citeshttps://doi.org/10.2139/ssrn.4459045openalex-extracted
inferred← citeshttps://doi.org/10.1007/s10832-015-9990-0openalex-snapshot
The effects of electrodes patterned onto the piezoelectric thin film on frequency response characteristics of PMN-PT MEMS acoustic actuators
inferred← citeshttps://doi.org/10.1016/j.mtsust.2023.100474openalex-snapshot
Wurtzite nanostructured piezoelectric devices
inferred← citeshttps://doi.org/10.1016/j.sna.2011.10.022openalex-snapshot
Enhancing displacement of lead–zirconate–titanate (PZT) thin-film membrane microactuators via a dual electrode design
inferred← citeshttps://doi.org/10.1016/j.sna.2013.06.027openalex-snapshot
Development of a lead-zirconate-titanate (PZT) thin-film microactuator probe for intracochlear applications
inferred← citeshttps://doi.org/10.1016/j.sna.2019.03.028openalex-snapshot
A one-step residue-free wet etching process of ceramic PZT for piezoelectric transducers
inferred← citeshttps://doi.org/10.1016/j.sna.2020.112018openalex-snapshot
A high-SPL piezoelectric MEMS loud speaker based on thin ceramic PZT
inferred← citeshttps://doi.org/10.1016/j.sna.2023.114413openalex-snapshot
High performance piezoelectric MEMS loudspeaker based on an innovative wafer bonding process
inferred← citeshttps://doi.org/10.1016/j.sna.2023.114539openalex-snapshot
PVDF based ferroelectric membrane origami loudspeaker
inferred← citeshttps://doi.org/10.1016/j.sna.2026.118164openalex-snapshot
Piezoelectric MEMS speakers: Structural evolution and systematic methodology from acoustic short circuit suppression to high-performance design
inferred← citeshttps://doi.org/10.1038/s41598-017-18571-9openalex-snapshot
Multifunctional Device based on phosphor-piezoelectric PZT: lighting, speaking, and mechanical energy harvesting
inferred← citeshttps://doi.org/10.1051/aacus/2023019openalex-snapshot
A validated modeling strategy for piezoelectric MEMS loudspeakers including viscous effects
inferred← citeshttps://doi.org/10.1063/10.0013406openalex-snapshot
Piezoelectric bimorph MEMS speakers
inferred← citeshttps://doi.org/10.1063/5.0056802openalex-snapshot
Piezoelectric unimorph microcantilevers for measuring direct and converse piezoelectric coefficients
inferred← citeshttps://doi.org/10.1088/1361-6439/ac4382openalex-snapshot
Low cost, contamination-free, and damage-free fabrication of PZT MEMS on SOI substrate
inferred← citeshttps://doi.org/10.1088/1361-6439/acfe86openalex-snapshot
MEMS audio speakers *
inferred← citeshttps://doi.org/10.1109/icsens.2018.8589565openalex-snapshot
Enabling Fabrication of PZT Based PiezoMEMS Devices
inferred← citeshttps://doi.org/10.1109/mems51782.2021.9375295openalex-snapshot
A Dual-Electrode MEMS Speaker Based on Ceramic PZT with Improved Sound Pressure Level by Phase Tuning
inferred← citeshttps://doi.org/10.1109/nems.2015.7147429openalex-snapshot
Towards a digital sound reconstruction MEMS device: Characterization of a single PZT based piezoelectric actuator
inferred← citeshttps://doi.org/10.1109/ojim.2025.3580120openalex-snapshot
Assessment of Vibration Frequencies of Piezo-Actuated Panel by Model-Assisted Self-Mixing Interferometry
inferred← citeshttps://doi.org/10.1109/transducers.2019.8808528openalex-snapshot
A Piezoelectric MEMS Loud Speaker Based on Ceramic PZT
inferred← citeshttps://doi.org/10.1109/transducers61432.2025.11109234openalex-snapshot
A Fully MEMS-Compatible Process for Ultra-Thin Piezoelectric Actuators with Good Uniformity and High Coupling Efficiency
inferred← citeshttps://doi.org/10.1121/1.4824815openalex-snapshot
Magnetostrictive microelectromechanical loudspeaker
inferred← citeshttps://doi.org/10.21203/rs.3.rs-3908146/v1openalex-snapshot
Capillary effect based selective sealing strategy for boosting the piezoelectric MEMS speaker performance
inferred← citeshttps://doi.org/10.3390/app11146323openalex-snapshot
Theoretical Modeling of Piezoelectric Cantilever MEMS Loudspeakers
inferred← citeshttps://doi.org/10.3390/mi12101257openalex-snapshot
Review of Recent Development of MEMS Speakers
inferred← citeshttps://doi.org/10.3390/mi16030353openalex-snapshot
The Woofer-Type Piezo-Actuated Microspeaker Based on Aerosol Deposition and Metal MEMS Process
inferred← citeshttps://doi.org/10.35848/1347-4065/ac223eopenalex-snapshot
Epitaxial growth technique for single-crystalline PbTiO 3 thin film on Si substrate using an HfO 2 buffer layer
inferred← citeshttps://doi.org/10.70675/e7614e5fz3709z4804z8d6fzdb6283e409afopenalex-snapshot
Development of a MEMS Loudspeaker with Optimized Performance
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