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Physical properties of epitaxial ZrN/MgO(001) layers grown by reactive magnetron sputtering

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What this work says

Outgoing claims: the papers this work cites, builds on, or argues with.

inferredcites →https://doi.org/10.1002/crat.201100001openalex-snapshot
Characterization of ion beam sputtered ZrN coatings prepared at different substrate temperatures
inferredcites →https://doi.org/10.1002/ctpp.2150280207openalex-snapshot
Electrostatic Probe Measurements in the Glow Discharge Plasma of a D. C. Magnetron Sputtering System
inferredcites →https://doi.org/10.1007/bf02647575openalex-snapshot
The N-Zr (Nitrogen-Zirconium) System
inferredcites →https://doi.org/10.1007/s12034-012-0357-8openalex-snapshot
Effect of nitrogen flow ratio on structure and properties of zirconium nitride films on Si(100) prepared by ion beam sputtering
inferredcites →https://doi.org/10.1016/0038-1098(86)90810-0openalex-snapshot
Resistivity and hall effect of reactively zirconium nitride films
inferredcites →https://doi.org/10.1016/0039-6028(94)90685-8openalex-snapshot
Diffusion of individual adatoms
inferredcites →https://doi.org/10.1016/0040-6090(91)90220-ropenalex-snapshot
X-ray elastic constants, stress profiling and composition of physically vapor deposited ZrN films
inferredcites →https://doi.org/10.1016/0040-6090(95)08194-1openalex-snapshot
Analysis of the oxidation kinetics and barrier layer properties of ZrN and Pt/Ru thin films for DRAM applications
inferredcites →https://doi.org/10.1016/0040-6090(96)08663-4openalex-snapshot
Oxidation of TiN, ZrN, TiZrN, CrN, TiCrN and TiN/CrN multilayer hard coatings reactively sputtered at low temperature
inferredcites →https://doi.org/10.1016/0378-4371(90)90409-lopenalex-snapshot
Dynamic scaling and phase transitions in interface growth
inferredcites →https://doi.org/10.1016/j.apsusc.2013.04.107openalex-snapshot
Influence of nitrogen flow rate on microstructural and nanomechanical properties of Zr–N thin films prepared by pulsed DC magnetron sputtering
inferredcites →https://doi.org/10.1016/j.nimb.2006.03.148openalex-snapshot
Multiple scattering of MeV ions: Comparison between the analytical theory and Monte-Carlo and molecular dynamics simulations
inferredcites →https://doi.org/10.1016/j.nimb.2010.02.091openalex-snapshot
SRIM – The stopping and range of ions in matter (2010)
inferredcites →https://doi.org/10.1016/j.surfcoat.2005.04.060openalex-snapshot
N-rich Zr–N films deposited by unbalanced magnetron sputtering enhanced with a highly reactive MW-ECR plasma
inferredcites →https://doi.org/10.1016/j.surfcoat.2011.11.034openalex-snapshot
A study of suppression effect of oxygen contamination by bias voltage in reactively sputtered ZrN films
inferredcites →https://doi.org/10.1016/j.surfcoat.2012.05.039openalex-snapshot
Nanomechanical and electrochemical properties of ZrN coated NiTi shape memory alloy
inferredcites →https://doi.org/10.1016/j.surfrep.2005.08.004openalex-snapshot
Morphological evolution during epitaxial thin film growth: Formation of 2D islands and 3D mounds
inferredcites →https://doi.org/10.1016/s0022-3115(00)00722-4openalex-snapshot
Some aspects of the use of ZrN as an inert matrix for actinide fuels
inferredcites →https://doi.org/10.1016/s0040-6090(02)00530-8openalex-snapshot
Variation of color in titanium and zirconium nitride decorative thin films
inferredcites →https://doi.org/10.1016/s0040-6090(05)80056-2openalex-snapshot
A contribution to the study of poisson's ratios and elasticconstants of TiN, ZrN and HfN
inferredcites →https://doi.org/10.1016/s0257-8972(05)80015-5openalex-snapshot
Mechanical and tribological characterization of low-temperature deposited PVD TiN coatings
inferredcites →https://doi.org/10.1016/s0257-8972(97)00249-1openalex-snapshot
Microstructure and oxidation-resistance of Ti1 − x − y −zAlxCryYzN layers grown by combined steered-arc/unbalanced-magnetron-sputter deposition
inferredcites →https://doi.org/10.1016/s0257-8972(97)00444-1openalex-snapshot
In situ scanning tunneling microscopy studies of the evolution of surface morphology and microstructure in epitaxial TiN(001) grown by ultra-high-vacuum reactive magnetron sputtering
inferredcites →https://doi.org/10.1063/1.1329348openalex-snapshot
Epitaxial Sc1−xTixN(001): Optical and electronic transport properties
inferredcites →https://doi.org/10.1063/1.1391214openalex-snapshot
Epitaxial NaCl structure δ-TaNx(001): Electronic transport properties, elastic modulus, and hardness versus N/Ta ratio
inferredcites →https://doi.org/10.1063/1.1446239openalex-snapshot
Growth of single-crystal CrN on MgO(001): Effects of low-energy ion-irradiation on surface morphological evolution and physical properties
inferredcites →https://doi.org/10.1063/1.1567797openalex-snapshot
Pathways of atomistic processes on TiN(001) and (111) surfaces during film growth: an ab initio study
inferredcites →https://doi.org/10.1063/1.1568521openalex-snapshot
Vacancy hardening in single-crystal TiNx(001) layers
inferredcites →https://doi.org/10.1063/1.1629155openalex-snapshot
Growth, surface morphology, and electrical resistivity of fully strained substoichiometric epitaxial TiNx (0.67⩽x<1.0) layers on MgO(001)
inferredcites →https://doi.org/10.1063/1.1733961openalex-snapshot
Charge Transfer in Oxygen, Nitrogen, and Nitric Oxide
inferredcites →https://doi.org/10.1063/1.1759783openalex-snapshot
Growth and physical properties of epitaxial HfN layers on MgO(001)
inferredcites →https://doi.org/10.1063/1.1870097openalex-snapshot
Epitaxial and polycrystalline HfNx (0.8⩽x⩽1.5) layers on MgO(001): Film growth and physical properties
inferredcites →https://doi.org/10.1063/1.3065092openalex-snapshot
Thermal conductivity of (Zr,W)N/ScN metal/semiconductor multilayers and superlattices
inferredcites →https://doi.org/10.1063/1.345664openalex-snapshot
Oxidation of metastable single-phase polycrystalline Ti0.5Al0.5N films: Kinetics and mechanisms
inferredcites →https://doi.org/10.1063/1.353882openalex-snapshot
Heteroepitaxial wurtzite and zinc-blende structure GaN grown by reactive-ion molecular-beam epitaxy: Growth kinetics, microstructure, and properties
inferredcites →https://doi.org/10.1063/1.363799openalex-snapshot
Nanoindentation studies of single-crystal (001)-, (011)-, and (111)-oriented TiN layers on MgO
inferredcites →https://doi.org/10.1063/1.3650264openalex-snapshot
Color of TiN and ZrN from first-principles calculations
inferredcites →https://doi.org/10.1063/1.368913openalex-snapshot
Growth of poly- and single-crystal ScN on MgO(001): Role of low-energy N2+ irradiation in determining texture, microstructure evolution, and mechanical properties
inferredcites →https://doi.org/10.1063/1.99891openalex-snapshot
Epitaxial growth of ZrN on Si(100)
inferredcites →https://doi.org/10.1088/0022-3727/26/4a/039openalex-snapshot
Determination of strain in epitaxial semiconductor layers by high-resolution X-ray diffraction
inferredcites →https://doi.org/10.1088/0305-4608/12/6/001openalex-snapshot
Growth of single-crystal metal superlattices in chosen orientations
inferredcites →https://doi.org/10.1103/physrev.95.359openalex-snapshot
Surface Studies of Solids by Total Reflection of X-Rays
inferredcites →https://doi.org/10.1103/physrevb.32.8312openalex-snapshot
Zirconium nitride—a new material for Josephson junctions
inferredcites →https://doi.org/10.1103/physrevb.38.2297openalex-snapshot
X-ray and neutron scattering from rough surfaces
inferredcites →https://doi.org/10.1103/physrevb.45.11557openalex-snapshot
Cohesive properties of 4d-transition-metal carbides and nitrides in the NaCl-type structure
inferredcites →https://doi.org/10.1103/physrevb.48.11673openalex-snapshot
Cohesive properties and electronic structure of 5 d -transition-metal carbides and nitrides in the NaCl structure
inferredcites →https://doi.org/10.1103/physrevb.53.7876openalex-snapshot
Surface roughening during low-temperature Si epitaxial growth on singular vs vicinal Si(001) substrates
inferredcites →https://doi.org/10.1103/physrevb.61.16137openalex-snapshot
Effects of high-flux low-energy ion bombardment on the low-temperature growth morphology of TiN(001) epitaxial layers
inferredcites →https://doi.org/10.1103/physrevb.62.13915openalex-snapshot
Transport properties of ZrN superconducting films
inferredcites →https://doi.org/10.1103/physrevb.86.235147openalex-snapshot
Optical dielectric function of gold
inferredcites →https://doi.org/10.1103/physrevc.84.015801openalex-snapshot
Neutron capture on Zr94 : Resonance parameters and Maxwellian-averaged cross sections
inferredcites →https://doi.org/10.1103/physrevlett.72.112openalex-snapshot
Observation of a growth instability during low temperature molecular beam epitaxy
inferredcites →https://doi.org/10.1103/physrevlett.72.116openalex-snapshot
Stable and unstable growth in molecular beam epitaxy
inferredcites →https://doi.org/10.1103/physrevlett.74.1127openalex-snapshot
Surface Morphology during Multilayer Epitaxial Growth of Ge(001)
inferredcites →https://doi.org/10.1107/s0021889868005418openalex-snapshot
Low-temperature thermal expansion of LiH, MgO and CaO
inferredcites →https://doi.org/10.1116/1.1513639openalex-snapshot
Epitaxial growth of metastable δ-TaN layers on MgO(001) using low-energy, high-flux ion irradiation during ultrahigh vacuum reactive magnetron sputtering
inferredcites →https://doi.org/10.1116/1.2976571openalex-snapshot
Comparative study of ZrN and Zr–Ge–N thin films as diffusion barriers for Cu metallization on Si
inferredcites →https://doi.org/10.1116/1.3520640openalex-snapshot
Structure and properties of ZrN coatings deposited by high power impulse magnetron sputtering technology
inferredcites →https://doi.org/10.1116/1.569429openalex-snapshot
Calculation of deposition rates in diode sputtering systems
inferredcites →https://doi.org/10.1116/1.573700openalex-snapshot
Material selection for hard coatings
inferredcites →https://doi.org/10.1116/1.574062openalex-snapshot
A review of the present state of art in hard coatings grown from the vapor phase
inferredcites →https://doi.org/10.1116/1.577812openalex-snapshot
Use of an externally applied axial magnetic field to control ion/neutral flux ratios incident at the substrate during magnetron sputter deposition
inferredcites →https://doi.org/10.1116/1.578955openalex-snapshot
Mass and energy resolved detection of ions and neutral sputtered species incident at the substrate during reactive magnetron sputtering of Ti in mixed Ar+N2 mixtures
inferredcites →https://doi.org/10.1126/science.273.5277.889openalex-snapshot
New Routes in the Preparation of Mechanically Hard Films
inferredcites →https://doi.org/10.1201/b12575openalex-snapshot
High Resolution X-Ray Diffractometry And Topography
inferredcites →https://doi.org/10.1364/ome.1.001090openalex-snapshot
Oxides and nitrides as alternative plasmonic materials in the optical range [Invited]
inferredcites →https://doi.org/10.1364/qels.2012.qw3h.4openalex-snapshot
Metal Nitrides for Plasmonic Applications
inferredcites →https://doi.org/10.1557/jmr.1992.0613openalex-snapshot
On the generality of the relationship among contact stiffness, contact area, and elastic modulus during indentation
inferredcites →https://doi.org/10.1557/jmr.1992.1564openalex-snapshot
An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments
inferredcites →https://doi.org/10.31399/asm.hb.v03.a0006247openalex-snapshot
Binary Alloy Phase Diagrams
inferredcites →https://doi.org/10.4028/www.scientific.net/amm.52-54.1762openalex-snapshot
Effect of Target Power on Structure and Mechanical Properties of Nanocrystalline ZrN Coatings

What points at this work

Incoming claims: where this work appears in other papers’ reference lists and arguments.

inferred← citeshttps://doi.org/10.2139/ssrn.4109980openalex-extracted
A Facile Synthesis of Crystalline Bazro3 Thin Films Over Zrn by a Hydrothermal-Galvanic Couple Method for Photocurrent Evaluations
inferred← citeshttps://doi.org/10.1002/andp.202300470openalex-snapshot
Stoichiometry Effects on the Chemical Ordering and Superconducting Properties in TiZrTaNbNx Refractory High Entropy Nitrides
inferred← citeshttps://doi.org/10.1007/978-981-13-6133-3_3openalex-snapshot
Structure and Properties of Combined Multilayer Coatings Based on Alternative Triple Nitride and Binary Metallic Layers
inferred← citeshttps://doi.org/10.1007/s00339-022-05893-3openalex-snapshot
Nanoscale electronic inhomogeneity in ZrNx thin films growth by reactive sputtering at room temperature
inferred← citeshttps://doi.org/10.1007/s11837-023-06259-7openalex-snapshot
Spark Plasma Sintering of Mechanically Alloyed High Entropy Nitrides to Investigate the Mechanical, Tribological, and Oxidation Properties
inferred← citeshttps://doi.org/10.1007/s12034-024-03276-3openalex-snapshot
Study of room-temperature deposited ZrNx thin films
inferred← citeshttps://doi.org/10.1016/j.actamat.2018.04.033openalex-snapshot
Valence electron concentration as an indicator for mechanical properties in rocksalt structure nitrides, carbides and carbonitrides
inferred← citeshttps://doi.org/10.1016/j.actamat.2018.07.074openalex-snapshot
Energetics of point defects in rocksalt structure transition metal nitrides: Thermodynamic reasons for deviations from stoichiometry
inferred← citeshttps://doi.org/10.1016/j.actamat.2018.10.031openalex-snapshot
Interaction between Al and atomic layer deposited (ALD) ZrN under high-energy heavy ion irradiation
inferred← citeshttps://doi.org/10.1016/j.actamat.2019.11.041openalex-snapshot
Large influence of vacancies on the elastic constants of cubic epitaxial tantalum nitride layers grown by reactive magnetron sputtering
inferred← citeshttps://doi.org/10.1016/j.actamat.2023.119078openalex-snapshot
Valence electron concentration- and N vacancy-induced elasticity in cubic early transition metal nitrides
inferred← citeshttps://doi.org/10.1016/j.actamat.2025.121680openalex-snapshot
Growth mechanisms and mechanical response of 3D superstructured cubic and hexagonal Hf1-xAlxN thin films
inferred← citeshttps://doi.org/10.1016/j.apsusc.2017.09.262openalex-snapshot
The growth of the metallic ZrN x thin films on P-GaN substrate by pulsed laser deposition
inferred← citeshttps://doi.org/10.1016/j.ceramint.2018.10.140openalex-snapshot
Wear behaviour and electrical conductivity of β-Sialon-ZrN composites fabricated by reaction bonding and gas pressure sintering process
inferred← citeshttps://doi.org/10.1016/j.ceramint.2021.05.198openalex-snapshot
Microstructures and properties of (TiCrZrVAl)N high entropy ceramics films by multi-arc ion plating
inferred← citeshttps://doi.org/10.1016/j.chphma.2023.02.003openalex-snapshot
Theoretical investigation on mechanical, thermal, and ultrasonic properties of epitaxial nanostructured ZrN layers growth on MgO (001) substrate
inferred← citeshttps://doi.org/10.1016/j.ijhydene.2024.03.282openalex-snapshot
Are (100) facets of transition metal carbonitrides suitable as electrocatalysts for nitrogen reduction to ammonia at ambient conditions?
inferred← citeshttps://doi.org/10.1016/j.ijleo.2021.166769openalex-snapshot
ZrN fractal-graphene-based metamaterial absorber in the visible and near-IR regimes
inferred← citeshttps://doi.org/10.1016/j.ijrmhm.2026.108153openalex-snapshot
Effect of nitrogen content on the microstructure, mechanical properties and tribological performance of (CrMoSiTiV)Nx coatings
inferred← citeshttps://doi.org/10.1016/j.jallcom.2017.02.072openalex-snapshot
Cation and anion vacancies in cubic molybdenum nitride
inferred← citeshttps://doi.org/10.1016/j.jallcom.2020.154808openalex-snapshot
Nanoscale architecture of (CrN/ZrN)/(Cr/Zr) nanocomposite coatings: Microstructure, composition, mechanical properties and first-principles calculations
inferred← citeshttps://doi.org/10.1016/j.jcrysgro.2014.06.043openalex-snapshot
Epitaxial growth of (111)-oriented Zr Ti1−N thin films on c-plane Al2O3 substrates
inferred← citeshttps://doi.org/10.1016/j.jeurceramsoc.2025.117265openalex-snapshot
Microstructure analysis for zirconium oxynitrides formed in 8 mol% yttria-doped zirconia by a flash event under a direct current electric field in an ambient atmosphere
inferred← citeshttps://doi.org/10.1016/j.jmrt.2021.07.134openalex-snapshot
Cross-effect of surface finishing and deep cryogenic treatment on corrosion resistance of AISI M35 steel
inferred← citeshttps://doi.org/10.1016/j.jmrt.2025.05.263openalex-snapshot
Low-temperature spark plasma sintering and heat treatment of 70 wt % Si3N4 – 30 wt % (BaO-Al2O3-SiO2-ZrO2) glass-ceramic composites: Microstructure, mechanical, and dielectric properties
inferred← citeshttps://doi.org/10.1016/j.jnucmat.2025.156366openalex-snapshot
High-temperature air oxidation of SDM-fabricated SS316L/Zr-alloy ATF cladding: Evidence for local ZrN–ZrO2 composite diffusion barriers
inferred← citeshttps://doi.org/10.1016/j.matchar.2017.10.016openalex-snapshot
Multilayered vacuum-arc nanocomposite TiN/ZrN coatings before and after annealing: Structure, properties, first-principles calculations
inferred← citeshttps://doi.org/10.1016/j.matchemphys.2019.02.082openalex-snapshot
Ab initio investigation of mechanical and thermodynamic properties of vanadium-nitride
inferred← citeshttps://doi.org/10.1016/j.matdes.2025.115383openalex-snapshot
Three-fold superstructured superlattice HfN/HfAlN thin films for improved damage tolerance
inferred← citeshttps://doi.org/10.1016/j.mser.2017.11.001openalex-snapshot
Conductive nitrides: Growth principles, optical and electronic properties, and their perspectives in photonics and plasmonics
inferred← citeshttps://doi.org/10.1016/j.mtcomm.2022.104761openalex-snapshot
Synthesis of crystalline BaZrO3 thin films over preferred-oriented ZrN by a hydrothermal-galvanic couple method for photoelectrochemical evaluations
inferred← citeshttps://doi.org/10.1016/j.optmat.2022.112990openalex-snapshot
Polarization-insensitive ultra-wideband metamaterial absorber comprising different forms of ZrN structures at the metasurface
inferred← citeshttps://doi.org/10.1016/j.surfcoat.2017.07.015openalex-snapshot
Elastic constants of epitaxial cubic MoN (001) layers
inferred← citeshttps://doi.org/10.1016/j.surfcoat.2020.126130openalex-snapshot
Study of columnar growth, texture development and wettability of reactively sputter-deposited TiN, ZrN and HfN thin films at glancing angle incidence
inferred← citeshttps://doi.org/10.1016/j.surfcoat.2022.129190openalex-snapshot
Comparison of open-atmosphere nitriding on various metal surfaces triggered by a focused pulsed laser irradiation
inferred← citeshttps://doi.org/10.1016/j.surfcoat.2023.130275openalex-snapshot
Open-atmosphere laser nitriding of austenitic steels to form wear-resistant surfaces
inferred← citeshttps://doi.org/10.1016/j.tsf.2015.08.002openalex-snapshot
Epitaxial growth and properties of cubic WN on MgO(001), MgO(111), and Al2O3(0001)
inferred← citeshttps://doi.org/10.1016/j.tsf.2019.137438openalex-snapshot
Zirconium nitride: A viable candidate for photonics and plasmonics?
inferred← citeshttps://doi.org/10.1016/j.tsf.2019.137479openalex-snapshot
A review of the intrinsic ductility and toughness of hard transition-metal nitride alloy thin films
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Segregation effects of doped VN and ZrN on magnetic and microstructural characteristics of FePt-based films
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Review of transition-metal diboride thin films
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Effect of low-energy ion assistance on the properties of sputtered ZrB2 films
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Near-Zero Negative Real Permittivity in Far Ultraviolet: Extending Plasmonics and Photonics with B1-MoNx
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Infrared Plasmonics with Conductive Ternary Nitrides
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Metal-like ductility and high hardness in nitrogen-rich HfN thin films by point defect superstructuring
inferred← citeshttps://doi.org/10.1039/c6tc02289hopenalex-snapshot
Growth, nanostructure, and optical properties of epitaxial VN x /MgO(001) (0.80 ≤ x ≤ 1.00) layers deposited by reactive magnetron sputtering
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One-step synthesis of photoluminescent nanofluids by direct loading of reactively sputtered cubic ZrN nanoparticles into organic liquids
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Electron/phonon coupling in group-IV transition-metal and rare-earth nitrides
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Elastic constants, Poisson ratios, and the elastic anisotropy of VN(001), (011), and (111) epitaxial layers grown by reactive magnetron sputter deposition
inferred← citeshttps://doi.org/10.1063/1.5056245openalex-snapshot
Electrical and optical properties of scandium nitride nanolayers on MgO (100) substrate
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The effect of kinetics on intrinsic stress generation and evolution in sputter-deposited films at conditions of high atomic mobility
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300 mm CMOS-compatible superconducting HfN and ZrN thin films for quantum applications
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Plasmonic and phononic properties of epitaxial conductive transition metal nitrides
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High-uniformity atomic layer deposition of superconducting niobium nitride thin films for quantum photonic integration
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Dynamic and structural stability of cubic vanadium nitride
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Three-dimensional kinetic Monte Carlo simulations of cubic transition metal nitride thin film growth
inferred← citeshttps://doi.org/10.1103/physrevmaterials.1.065002openalex-snapshot
Phonon and electron contributions to the thermal conductivity of VNx epitaxial layers
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Adsorption-controlled growth and properties of epitaxial SnO films
inferred← citeshttps://doi.org/10.1103/physrevmaterials.7.094801openalex-snapshot
Charge-carrier-type controlled superconducting dome in ZrNxOy films
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Transition metal nitride contacts for CdTe photovoltaics
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Low temperature (Ts/Tm < 0.1) epitaxial growth of HfN/MgO(001) via reactive HiPIMS with metal-ion synchronized substrate bias
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Strategy for simultaneously increasing both hardness and toughness in ZrB2-rich Zr1−xTaxBy thin films
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Low temperature epitaxial growth of Cantor-nitride thin films by magnetic field assisted magnetron sputtering
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Nanoscale Analysis on Spark Plasma Sintered Fly-Ash Bricks and their Comparative Study with SiN-Zr Refractory Bricks
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Development of Multicomponent Nanostructured Nitride Coatings to Protect against Corrosion Products from Titanium Alloy
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Corrosion Resistant TiTaN and TiTaAlN Thin Films Grown by Hybrid HiPIMS/DCMS Using Synchronized Pulsed Substrate Bias with No External Substrate Heating
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Optimization of Electron-Beam Evaporation Process Parameters for ZrN Thin Films by Plasma Treatment and Taguchi Method
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Thin metal films on weakly-interacting substrates : Nanoscale growth dynamics, stress generation, and morphology manipulation
inferred← citeshttps://doi.org/10.70675/be41959azaf9cz45bezb1dbz818bcd5249d2openalex-snapshot
Application de techniques d’opto-acoustique et de calculs de premiers principes à la caractérisation des propriétés élastiques de films minces
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