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On MEMS Reliability and Failure Mechanisms
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What this work says
Outgoing claims: the papers this work cites, builds on, or argues with.
inferredcites →https://doi.org/10.1007/978-3-540-29857-1openalex-snapshot
Springer Handbook of Nanotechnology
inferredcites →https://doi.org/10.1007/978-3-642-02525-9openalex-snapshot
Springer Handbook of Nanotechnology
inferredcites →https://doi.org/10.1007/s11249-010-9696-zopenalex-snapshot
Evolution of Wear Characteristics and Frictional Behavior in MEMS Devices
inferredcites →https://doi.org/10.1016/j.microrel.2009.06.014openalex-snapshot
MEMS reliability: Where are we now?
inferredcites →https://doi.org/10.1016/j.sna.2005.08.002openalex-snapshot
Tolerance analysis for comb-drive actuator using DRIE fabrication
inferredcites →https://doi.org/10.1016/j.wear.2010.11.043openalex-snapshot
Effects of water and oxygen on the tribochemical wear of monocrystalline Si(100) against SiO2 sphere by simulating the contact conditions in MEMS
inferredcites →https://doi.org/10.1016/s0026-2714(01)00058-0openalex-snapshot
Ultra-thick gate oxides: charge generation and its impact on reliability
inferredcites →https://doi.org/10.1016/s0026-2714(03)00119-7openalex-snapshot
MEMS reliability from a failure mechanisms perspective
inferredcites →https://doi.org/10.1016/s1359-6454(02)00158-1openalex-snapshot
A reaction-layer mechanism for the delayed failure of micron-scale polycrystalline silicon structural films subjected to high-cycle fatigue loading
inferredcites →https://doi.org/10.1023/a:1026317303377openalex-snapshot
Probabilistic Weibull behavior and mechanical properties of MEMS brittle materials
inferredcites →https://doi.org/10.1023/b:frac.0000040958.04896.43openalex-snapshot
Characteristic dimensions and the micro-mechanisms of fracture and fatigue in `nano' and `bio' materials
inferredcites →https://doi.org/10.1109/5.704280openalex-snapshot
Application of MEMS technology in automotive sensors and actuators
inferredcites →https://doi.org/10.1109/irws.2003.1283293openalex-snapshot
Stress testing and characterization of high-k dielectric thin films
inferredcites →https://doi.org/10.1109/jmems.2008.2004849openalex-snapshot
Dynamic Operational Stress Measurement of MEMS Using Time-Resolved Raman Spectroscopy
inferredcites →https://doi.org/10.1109/jmems.2009.2020467openalex-snapshot
A General Methodology to Predict the Reliability of Single-Crystal Silicon MEMS Devices
inferredcites →https://doi.org/10.1109/relphy.1999.761611openalex-snapshot
The effect of humidity on the reliability of a surface micromachined microengine
inferredcites →https://doi.org/10.1109/sensor.1997.613720openalex-snapshot
Materials reliability in MEMS devices
inferredcites →https://doi.org/10.1109/test.2003.1271070openalex-snapshot
Future challenges for mems failure analysis
inferredcites →https://doi.org/10.1109/tnano.2002.806826openalex-snapshot
Failure analysis requirements for nanoelectronics
inferredcites →https://doi.org/10.1111/j.1475-1305.2008.00610.xopenalex-snapshot
The Failure Mechanisms of Micro‐Scale Cantilevers Under Shock and Vibration Stimuli
inferredcites →https://doi.org/10.1115/1.2723813openalex-snapshot
Magnetic Force and Thermal Expansion as Failure Mechanisms of Electrothermal MEMS Actuators Under Electrostatic Discharge Testing
inferredcites →https://doi.org/10.1117/12.359367openalex-snapshot
Analysis of manufacturing-scale MEMS reliability testing
inferredcites →https://doi.org/10.1117/12.651008openalex-snapshot
Reliability of MEMS for space applications
inferredcites →https://doi.org/10.1149/1.2426767openalex-snapshot
The Structure and Properties of Materials
What points at this work
Incoming claims: where this work appears in other papers’ reference lists and arguments.
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Measurement and Controlling Friction Force in a Sliding Microwire by Size and Boundary Condition Variation
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Design and Fabrication of Capacitive Mems Actuator Array on Spoof‐Surface‐Plasmon‐Polariton Waveguide for Active Microwave Modulation
inferred← citeshttps://doi.org/10.1002/rem.21779openalex-snapshot
Evaluation of water treatments on surfaces to inhibit bacterial spore resuspension
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Space Charge at Nanoscale: Probing Injection and Dynamic Phenomena Under Dark/Light Configurations by Using KPFM and C-AFM
inferred← citeshttps://doi.org/10.1007/978-981-19-2308-1_43openalex-snapshot
Reliability Analysis of Thermally Actuated MEMS Micromirror
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Design and Temperature Analysis of 2.4 GHz Thin Film BAW Resonator (FBAR)
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Reliability research on micro- and nano-electromechanical systems: a review
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Fabrication flaws and reliability in MEMS thin film polycrystalline flow sensor
inferred← citeshttps://doi.org/10.1007/s10854-019-02413-7openalex-snapshot
Inkjet printed adhesives for advanced M(O)EMS packaging
inferred← citeshttps://doi.org/10.1007/s13369-023-07977-5openalex-snapshot
Quantification of Electrostatic and Adhesive Forces Between Microwire and Microprobe Using Experimental and Numerical Approaches
inferred← citeshttps://doi.org/10.1016/b978-0-12-822944-6.00080-3openalex-snapshot
Fatigue of Micro-Electro-Mechanical Systems (Mems) Thin Films
inferred← citeshttps://doi.org/10.1016/b978-0-443-13242-1.00012-6openalex-snapshot
Life testing plan for electronic components based on design of experiments
inferred← citeshttps://doi.org/10.1016/j.advengsoft.2017.02.008openalex-snapshot
Structural reliability simulation for the latching mechanism in MEMS-based Safety and Arming device
inferred← citeshttps://doi.org/10.1016/j.diamond.2015.02.008openalex-snapshot
Studies on measuring surface adhesion between sidewalls in boron doped ultrananocrystalline diamond based microelectromechanical devices
inferred← citeshttps://doi.org/10.1016/j.diamond.2025.112186openalex-snapshot
Friction reduction and wear mechanisms of Si-DLC film in humid environment: A ReaxFF MD study
inferred← citeshttps://doi.org/10.1016/j.eml.2016.02.006openalex-snapshot
Atomistic perspective on in situ nanomechanics
inferred← citeshttps://doi.org/10.1016/j.eml.2021.101284openalex-snapshot
Advances in experimental mechanics at atomic scale
inferred← citeshttps://doi.org/10.1016/j.ijfatigue.2020.105633openalex-snapshot
A computational and experimental comparison on the nucleation of fatigue cracks in statistical volume elements
inferred← citeshttps://doi.org/10.1016/j.microrel.2013.09.013openalex-snapshot
Condition assessment and fault prognostics of microelectromechanical systems
inferred← citeshttps://doi.org/10.1016/j.microrel.2015.02.012openalex-snapshot
Multiphysics modeling approach for micro electro–thermo–mechanical actuator: Failure mechanisms coupled analysis
inferred← citeshttps://doi.org/10.1016/j.microrel.2016.09.004openalex-snapshot
Dielectric charging induced drift in micro device reliability-a review
inferred← citeshttps://doi.org/10.1016/j.microrel.2022.114668openalex-snapshot
A built-in self-test and self-adjustment method of MEMS pressure sensor
inferred← citeshttps://doi.org/10.1016/j.msea.2018.07.054openalex-snapshot
Mechanical property of metallic nanowires: the shorter is stronger and ductile
inferred← citeshttps://doi.org/10.1016/j.scriptamat.2017.09.035openalex-snapshot
Silicon activation volumes for fracture as affected by hydrogen
inferred← citeshttps://doi.org/10.1016/j.sna.2022.113817openalex-snapshot
A package for piezoresistive pressure sensors with embedded built-in self-test function based on bimetallic actuator
inferred← citeshttps://doi.org/10.1016/j.surfcoat.2023.129481openalex-snapshot
Micro-scale tribological study of a Ni-Cr-Fe-Ti-Al-V high entropy alloy thin film by magnetron co-sputtering of Inconel-718 and Ti-6Al-4V
inferred← citeshttps://doi.org/10.1016/j.triboint.2018.07.049openalex-snapshot
Damage of functionalized self-assembly monomolecular layers applied to silicon microgear MEMS
inferred← citeshttps://doi.org/10.1016/j.tsf.2022.139325openalex-snapshot
Indentation based fracture toughness estimation of barium titanate thin film using experiments and simulations
inferred← citeshttps://doi.org/10.1016/j.wear.2019.01.117openalex-snapshot
Self-lubrication of Si/SiO2 interface achieved through running-in at low sliding speed
inferred← citeshttps://doi.org/10.1021/acsanm.0c03283openalex-snapshot
Deep Learning-Based High Throughput Inspection in 3D Nanofabrication and Defect Reversal in Nanopillar Arrays: Implications for Next Generation Transistors
inferred← citeshttps://doi.org/10.1038/s41378-026-01277-2openalex-snapshot
Anchor-induced localized stress evolution and deformation prediction in SOI MEMS structures
inferred← citeshttps://doi.org/10.1038/s41467-022-34333-2openalex-snapshot
Revealing the pulse-induced electroplasticity by decoupling electron wind force
inferred← citeshttps://doi.org/10.1049/mna2.12185openalex-snapshot
Squeeze‐film damping model of perforated plate considering border effect
inferred← citeshttps://doi.org/10.1051/matecconf/201930010001openalex-snapshot
Computational and experimental study of crack initiation in statistical volume elements
inferred← citeshttps://doi.org/10.1063/1.4971777openalex-snapshot
Electrowetting-on-dielectric actuation of a vertical translation and angular manipulation stage
inferred← citeshttps://doi.org/10.1088/1361-6528/aa53bfopenalex-snapshot
Computing with volatile memristors: an application of non-pinched hysteresis
inferred← citeshttps://doi.org/10.1088/1742-6596/2325/1/012013openalex-snapshot
Reliability Study of MEMS Resonator: A Review
inferred← citeshttps://doi.org/10.1108/mi-03-2015-0026openalex-snapshot
A review of the most important failure, reliability and nonlinearity aspects in the development of microelectromechanical systems (MEMS)
inferred← citeshttps://doi.org/10.1109/access.2020.3042928openalex-snapshot
Performance-Issues-Mitigation-Techniques for On-Chip-Antennas – Recent Developments in RF, MM-Wave, and Thz Bands With Future Directions
inferred← citeshttps://doi.org/10.1109/dtip.2015.7161038openalex-snapshot
Constant frequency drive method for MEMS for improved failure detection
inferred← citeshttps://doi.org/10.1109/icecs53924.2021.9665627openalex-snapshot
A Computationally Efficient Model of MEMS Stopper for Reliability Optimization
inferred← citeshttps://doi.org/10.1109/icias.2014.6869508openalex-snapshot
Influence of crack growths on the performances of cantilever based MEMS devices: Design and simulations
inferred← citeshttps://doi.org/10.1109/icmts48187.2020.9107902openalex-snapshot
Microheater isolation characterisation to aid the optimisation of a MEMS Leidenfrost engine
inferred← citeshttps://doi.org/10.1109/itherm.2018.8419575openalex-snapshot
Damage Evolution in MEMS Pressure Sensors during High Temperature Operating Life and Prolonged Storage at Sub-Zero Temperature
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Revolutionize Bulk Acoustic Wave Gyroscopes through the Exploitation of Topological Interface States
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Quantification of Uncertainty in Creep Failure of RF-MEMS Switches
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Transduction in M/NEMS—Actuation and Sensing: A Review
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Experimental Analysis of Filtering Algorithms for IMU-Based Applications Under Vibrations
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Tribological properties of thin films made by atomic layer deposition sliding against silicon
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A secure cloud framework for ICMetric based IoT health devices
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Reliability and Fatigue Analysis in Cantilever-Based MEMS Devices Operating in Harsh Environments
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Sliding Speed-Dependent Tribochemical Wear of Oxide-Free Silicon
inferred← citeshttps://doi.org/10.12737/2219-0767-2022-15-3-110-128openalex-snapshot
Overview of methods for measuring the mechanical strength of thin films
inferred← citeshttps://doi.org/10.15659/ijaat.17.04.523openalex-snapshot
ADHESIVE CONTACT BETWEEN SILICON-BASED MEMS TOOTH SURFACES MODELLED BY THE MULTISCALE MULTI-BLOCK MODEL
inferred← citeshttps://doi.org/10.24108/preprints-3112455openalex-snapshot
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Role of Interfacial Bonding in Tribochemical Wear
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Framework for Validation of Permanently Installed MEMS-Based Acquisition Devices Using Soft Sensor Models
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80-degree field-of-view transmissive metasurface-based spatial light modulator
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Reliability of Microelectromechanical Systems Devices
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