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Microscopic morphology evolution during ion beam smoothing of Zerodur^® surfaces

https://doi.org/10.1364/oe.22.000377
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What this work says

Outgoing claims: the papers this work cites, builds on, or argues with.

inferredcites →https://doi.org/10.1016/0141-6359(94)00002-hopenalex-snapshot
Contouring algorithm for ion figuring
inferredcites →https://doi.org/10.1016/j.nima.2009.11.013openalex-snapshot
Ultra-precision surface finishing by ion beam and plasma jet techniques—status and outlook
inferredcites →https://doi.org/10.1016/j.nimb.2008.11.044openalex-snapshot
Evolution of ion-induced ripple patterns on SiO2 surfaces
inferredcites →https://doi.org/10.1016/j.nimb.2009.01.051openalex-snapshot
Ion beam figuring for lithography optics
inferredcites →https://doi.org/10.1016/j.tsf.2003.12.107openalex-snapshot
Large area smoothing of optical surfaces by low-energy ion beams
inferredcites →https://doi.org/10.1016/s0168-583x(02)01436-2openalex-snapshot
Morphology of ion-sputtered surfaces
inferredcites →https://doi.org/10.1063/1.357748openalex-snapshot
Roughening instability and ion-induced viscous relaxation of SiO2 surfaces
inferredcites →https://doi.org/10.1088/0953-8984/21/22/224010openalex-snapshot
Linear stability and instability patterns in ion-sputtered silicon
inferredcites →https://doi.org/10.1088/0953-8984/21/49/495305openalex-snapshot
The morphology of amorphous SiO2surfaces during low energy ion sputtering
inferredcites →https://doi.org/10.1088/1367-2630/10/8/083012openalex-snapshot
Impact of repetitive and random surface morphologies on the ripple formation on ion bombarded SiGe-surfaces
inferredcites →https://doi.org/10.1103/physrevlett.87.246104openalex-snapshot
Spontaneous Nanoscale Corrugation of Ion-Eroded SiO2 : The Role of Ion-Irradiation-Enhanced Viscous Flow
inferredcites →https://doi.org/10.1103/physrevlett.98.256101openalex-snapshot
Compositionally Modulated Ripples Induced by Sputtering of Alloy Surfaces
inferredcites →https://doi.org/10.1116/1.575561openalex-snapshot
Theory of ripple topography induced by ion bombardment
inferredcites →https://doi.org/10.1117/1.oe.52.1.010503openalex-snapshot
Combined figuring technology for high-precision optical surfaces using a deterministic ion beam material adding and removal method
inferredcites →https://doi.org/10.1117/12.2012698openalex-snapshot
Projection optics for extreme ultraviolet lithography (EUVL) micro-field exposure tools (METs) with a numerical aperture of 0.5
inferredcites →https://doi.org/10.1364/ao.23.002734openalex-snapshot
Simple technique for obtaining approximate thermal expansion coefficients of low expansion materials: applications to Zerodur
inferredcites →https://doi.org/10.1364/ao.40.000062openalex-snapshot
Recovery of multilayer-coated Zerodur and ULE optics for extreme-ultraviolet lithography by recoating, reactive-ion etching, and wet-chemical processes
inferredcites →https://doi.org/10.1364/ao.46.003156openalex-snapshot
Atomic force microscopy characterization of Zerodur mirror substrates for the extreme ultraviolet telescopes aboard NASA's Solar Dynamics Observatory
inferredcites →https://doi.org/10.1364/ao.49.006630openalex-snapshot
Ion beam figuring of high-slope surfaces based on figure error compensation algorithm
inferredcites →https://doi.org/10.1364/ao.52.001302openalex-snapshot
Deterministic ion beam material adding technology for high-precision optical surfaces
inferredcites →https://doi.org/10.1364/ao.52.003719openalex-snapshot
Morphology evolution of fused silica surface during ion beam figuring of high-slope optical components
inferredcites →https://doi.org/10.17877/de290r-4626openalex-snapshot
Spontaneous Nanoscale Corrugation of Ion-Eroded SiO2

What points at this work

Incoming claims: where this work appears in other papers’ reference lists and arguments.

inferred← citeshttps://doi.org/10.2139/ssrn.4615508openalex-extracted
A Novel Method for Multi-Objective Prediction and Optimization of Photorheological Polishing Based on Tpot and Agemoea Integration
inferred← citeshttps://doi.org/10.1007/978-3-030-97277-6_7openalex-snapshot
Ion Beam Figuring and Smoothing
inferred← citeshttps://doi.org/10.1007/978-3-662-69235-6_3openalex-snapshot
Nano-/Subnanometer-Präzisionsfertigung
inferred← citeshttps://doi.org/10.1007/978-981-19-8975-9_3openalex-snapshot
Nano/Sub-nanometer Precision Manufacturing
inferred← citeshttps://doi.org/10.1007/s11465-017-0430-5openalex-snapshot
Ion beam figuring of continuous phase plates based on the frequency filtering process
inferred← citeshttps://doi.org/10.1016/j.apsusc.2018.05.105openalex-snapshot
Oxygen plasma etching of fused silica substrates for high power laser optics
inferred← citeshttps://doi.org/10.1016/j.apsusc.2020.146384openalex-snapshot
Method of formation of super-smooth optical surfaces using GCIB and ANAB processing
inferred← citeshttps://doi.org/10.1016/j.apsusc.2025.162997openalex-snapshot
Angle-resolved ellipsometric analysis of polishing-induced subsurface damages in calcium fluoride crystals for ultra-precision manufacturing
inferred← citeshttps://doi.org/10.1016/j.ijleo.2017.11.055openalex-snapshot
Ultra-precision optical surface fabricated by hydrodynamic effect polishing combined with magnetorheological finishing
inferred← citeshttps://doi.org/10.1016/j.ijmecsci.2022.107898openalex-snapshot
Analysis of multiscale material removal mechanism in nanoparticle jet polishing
inferred← citeshttps://doi.org/10.1016/j.infrared.2024.105340openalex-snapshot
An ion beam processing technology for complex component glass
inferred← citeshttps://doi.org/10.1016/j.jmapro.2019.11.011openalex-snapshot
Investigation of the optimal parameters for the surface finish of K9 optical glass using a soft abrasive rotary flow polishing process
inferred← citeshttps://doi.org/10.1016/j.jmapro.2024.08.056openalex-snapshot
Subsurface damage in sapphire ultra-precision grinding
inferred← citeshttps://doi.org/10.1016/j.optcom.2021.127614openalex-snapshot
Study on rapid convergence strategy of nano-precision optical surface by ion beam figuring
inferred← citeshttps://doi.org/10.1016/j.precisioneng.2015.04.004openalex-snapshot
Parameters optimization on surface roughness improvement of Zerodur optical glass using an innovative rotary abrasive fluid multi-jet polishing process
inferred← citeshttps://doi.org/10.1016/j.precisioneng.2024.12.004openalex-snapshot
Micro-scale modeling and analysis on material removal mechanisms for flexible ball-end tool polishing incorporating the curvature effect
inferred← citeshttps://doi.org/10.1016/j.surfcoat.2017.01.023openalex-snapshot
Effect of ion beam etching on the surface roughness of bare and silicon covered beryllium films
inferred← citeshttps://doi.org/10.1016/j.surfin.2025.106769openalex-snapshot
Roughness evolution of fused silica, ZerodurⓇ and N-BK7Ⓡin reactive ion beam figuring processes
inferred← citeshttps://doi.org/10.1016/j.triboint.2025.111466openalex-snapshot
Multiscale modeling of tool influence function in bonnet polishing using pad surface topography histogram
inferred← citeshttps://doi.org/10.1039/d0nr07539fopenalex-snapshot
Recent advances in focused ion beam nanofabrication for nanostructures and devices: fundamentals and applications
inferred← citeshttps://doi.org/10.1080/10910344.2015.1018532openalex-snapshot
Ultra-Precision Polishing of N-Bk7 Using an Innovative Self-Propelled Abrasive Fluid Multi-Jet Polishing Tool
inferred← citeshttps://doi.org/10.1088/1361-6463/50/8/085101openalex-snapshot
Reactive ion beam figuring of optical aluminium surfaces
inferred← citeshttps://doi.org/10.1088/1757-899x/292/1/012100openalex-snapshot
Experimental exploration of the hydrodynamic effect polishing machinability for different types of material
inferred← citeshttps://doi.org/10.1088/2051-672x/ab1f49openalex-snapshot
Decomposition of AFM images of ultrasmooth optical surface polished with gas cluster ion beam
inferred← citeshttps://doi.org/10.1107/s1600577524006088openalex-snapshot
The diamond–silicon carbide composite Skeleton ® as a promising material for substrates of intense X-ray beam optics
inferred← citeshttps://doi.org/10.1117/1.oe.53.6.065108openalex-snapshot
Nanopatterning of optical surfaces during low-energy ion beam sputtering
inferred← citeshttps://doi.org/10.1117/1.oe.53.9.095102openalex-snapshot
Highly efficient deterministic polishing using a semirigid bonnet
inferred← citeshttps://doi.org/10.1117/1.oe.58.9.092612openalex-snapshot
Finishing of metal optics by ion beam technologies
inferred← citeshttps://doi.org/10.1117/12.2269312openalex-snapshot
Effect of ion beam etching on the surface roughness of bare and silicon covered beryllium
inferred← citeshttps://doi.org/10.1117/12.2314456openalex-snapshot
Oxygen plasma etching of YAG crystals
inferred← citeshttps://doi.org/10.1117/12.2316952openalex-snapshot
Thermal analysis for ion beam processing of the unimorph deformable mirror
inferred← citeshttps://doi.org/10.1117/12.2624743openalex-snapshot
The relationship between dynamic performance of ion beam figuring equipment and optical surface accuracy
inferred← citeshttps://doi.org/10.1134/s1027451020030246openalex-snapshot
Projection Objective For an EUV-Lithographic Workbench
inferred← citeshttps://doi.org/10.1134/s1027451020050316openalex-snapshot
Creation of Composite Optical Elements by the Ion-Beam Surface-Activation Method for Laser Applications
inferred← citeshttps://doi.org/10.1142/s0217979220500605openalex-snapshot
Anisotropic ion beam etching of fused silica to mitigate subsurface damage
inferred← citeshttps://doi.org/10.1364/ao.413090openalex-snapshot
Three-dimensional evaluation of subsurface damage in optical glasses with ground and polished surfaces using FF-OCT
inferred← citeshttps://doi.org/10.1364/ao.472504openalex-snapshot
Axisymmetric surface shape correction of optical elements by a wide-aperture ion beam
inferred← citeshttps://doi.org/10.1364/ao.55.001249openalex-snapshot
Ion-beam polishing of fused silica substrates for imaging soft x-ray and extreme ultraviolet optics
inferred← citeshttps://doi.org/10.1364/ao.57.002861openalex-snapshot
Micro-analysis model for material removal mechanisms of bonnet polishing
inferred← citeshttps://doi.org/10.1364/ao.57.007172openalex-snapshot
Improved analysis model for material removal mechanisms of bonnet polishing incorporating the pad wear effect
inferred← citeshttps://doi.org/10.1364/ao.58.003652openalex-snapshot
Ultrasmooth beryllium substrates for solar astronomy in extreme ultraviolet wavelengths
inferred← citeshttps://doi.org/10.1364/oe.24.004247openalex-snapshot
Detailed subsurface damage measurement and efficient damage-free fabrication of fused silica optics assisted by ion beam sputtering
inferred← citeshttps://doi.org/10.1364/oe.25.010765openalex-snapshot
Fabrication of continuous phase plates with small structures based on recursive frequency filtered ion beam figuring
inferred← citeshttps://doi.org/10.1364/oe.460327openalex-snapshot
Curvature effect-based modeling and experimentation of the material removal in polishing optical surfaces using a flexible ball-end tool
inferred← citeshttps://doi.org/10.3103/s0027134919010107openalex-snapshot
The Effect of Surface Nanostructures Duty Ratio on Their Evolution under Oblique Cluster Ion Beam
inferred← citeshttps://doi.org/10.3233/xst-190495openalex-snapshot
X-ray scattering by the fused silica surface etched by low-energy Ar ions
inferred← citeshttps://doi.org/10.3367/ufne.2019.05.038601openalex-snapshot
Diffraction limited X-ray optics: technology, metrology, applications
inferred← citeshttps://doi.org/10.3390/app12073296openalex-snapshot
Investigation of an Influence Function Model as a Self-Rotating Wheel Polishing Tool and Its Application in High-Precision Optical Fabrication
inferred← citeshttps://doi.org/10.3390/app15063044openalex-snapshot
Optimization of the Tool Influence Function for Small Tool Polishing Based on the Control of Polishing Pressure Distribution
inferred← citeshttps://doi.org/10.3390/ma12071077openalex-snapshot
Research on the Surface Evolution of Single Crystal Silicon Mirror Contaminated by Metallic Elements during Elastic Jet Polishing Techniques
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