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An Improved Semiconductor Thin Film Thickness Measurement Method Based on Full-Spectrum Fitting Technology

https://doi.org/10.2139/ssrn.5230315
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Calculation of the optical constants of a thin layer upon a transparent substrate from the reflection spectrum using a genetic algorithm
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Comparison of different dispersion models for single layer optical thin film index determination
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Optical properties of gallium oxide thin films
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Determination of optical and microstructural parameters of ceria films
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Thickness measurement of multilayer film stack in perovskite solar cell using spectroscopic ellipsometry
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Methods for the determination of the optical constants of thin films from single transmission measurements: a critical review
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Micro-reflectance and transmittance spectroscopy: a versatile and powerful tool to characterize 2D materials
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The Long-Wavelength Edge of Photographic Sensitivity and of the Electronic Absorption of Solids
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Limits and Performances of Algorithms Based on Simulated Annealing in Solving Sparse Hard Inference Problems
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A Stochastic Quasi-Newton Method for Large-Scale Optimization
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Stochastic Quasi-Newton Methods for Nonconvex Stochastic Optimization
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Simultaneous Silicon Wafer Temperature and Oxide Film Thickness Measurement in Rapid‐Thermal Processing Using Ellipsometry
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Simulated annealing for SVM parameters optimization in student’s performance prediction
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Determination of optical constants of thin film from reflectance spectra
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Interpretation of reflection and transmission spectra for thin films: transmission
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Thickness-profile measurement of transparent thin-film layers by white-light scanning interferometry
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Simple method for determination of the thickness of a nonabsorbing thin film using spectral reflectance measurement
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Spectroscopic ellipsometry of inhomogeneous thin films exhibiting thickness non-uniformity and transition layers
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A Miniaturized and Fast System for Thin Film Thickness Measurement
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Non-Destructive Characterization of Selected Types of Films and Other Layers via White Light Reflectance Spectroscopy (WLRS)
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Stochastic Quasi-Newton Methods for Nonconvex Stochastic Optimization
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