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In situ and nanoscale spectroscopic analysis of soft X-ray-induced transformations in indium nitrate films for lithographic applications

https://doi.org/10.2139/ssrn.5914728
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inferredcites →https://doi.org/10.1016/j.apsusc.2008.10.039openalex-snapshot
Synthesis and characterization of spherical and narrow size distribution indium oxide nanoparticles
inferredcites →https://doi.org/10.1016/j.apsusc.2014.04.042openalex-snapshot
The effect of post-annealing on Indium Tin Oxide thin films by magnetron sputtering method
inferredcites →https://doi.org/10.1016/j.apsusc.2024.159869openalex-snapshot
Nanopatterning of thin amorphous vanadium oxide films by oxidation scanning probe lithography
inferredcites →https://doi.org/10.1016/j.cap.2018.12.005openalex-snapshot
Chemical and structural analysis of low-temperature excimer-laser annealing in indium-tin oxide sol-gel films
inferredcites →https://doi.org/10.1016/j.cap.2024.11.002openalex-snapshot
Near-field infrared spectroscopy: Advanced research method in thin film analysis
inferredcites →https://doi.org/10.1016/j.jcis.2022.04.118openalex-snapshot
Embedding indium nitride at the interface of indium-oxide/indium-zinc-sulfide heterostructure with enhanced interfacial charge transfer for high photocatalytic hydrogen evolution
inferredcites →https://doi.org/10.1016/j.mattod.2023.05.027openalex-snapshot
Trends in photoresist materials for extreme ultraviolet lithography: A review
inferredcites →https://doi.org/10.1021/acs.chemmater.7b03618openalex-snapshot
Role of Combustion Chemistry in Low-Temperature Deposition of Metal Oxide Thin Films from Solution
inferredcites →https://doi.org/10.1021/acsomega.2c06054openalex-snapshot
Facile Synthesis of Sustainable Activated Biochars with Different Pore Structures as Efficient Additive-Carbon-Free Anodes for Lithium- and Sodium-Ion Batteries
inferredcites →https://doi.org/10.1038/35023233openalex-snapshot
Pushing the limits of lithography
inferredcites →https://doi.org/10.1038/srep26146openalex-snapshot
One-pot hydrothermal synthesis of Nitrogen-doped graphene as high-performance anode materials for lithium ion batteries
inferredcites →https://doi.org/10.1039/c5ta02257fopenalex-snapshot
Nitrogen self-doped graphitic carbon nitride as efficient visible light photocatalyst for hydrogen evolution
inferredcites →https://doi.org/10.1039/c9cp01963dopenalex-snapshot
Adsorption site, orientation and alignment of NO adsorbed on Au(100) using 3D-velocity map imaging, X-ray photoelectron spectroscopy and density functional theory
inferredcites →https://doi.org/10.1039/c9ra08977bopenalex-snapshot
Review of recent advances in inorganic photoresists
inferredcites →https://doi.org/10.1039/c9ta07727hopenalex-snapshot
Unique chemistries of metal-nitrate precursors to form metal-oxide thin films from solution: materials for electronic and energy applications
inferredcites →https://doi.org/10.1109/jproc.1998.658762openalex-snapshot
Cramming More Components Onto Integrated Circuits
inferredcites →https://doi.org/10.1116/6.0001013openalex-snapshot
Factors influencing surface carbon contamination in ambient-pressure x-ray photoelectron spectroscopy experiments
inferredcites →https://doi.org/10.1134/s1027451022060349openalex-snapshot
Current State and Prospects for the Development of X-Ray Lithography
inferredcites →https://doi.org/10.2494/photopolymer.18.737openalex-snapshot
Improved Lithographic Performance for EUV Resists Based on Polymers having a Photoacid Generator (PAG) in the Backbone
inferredcites →https://doi.org/10.2494/photopolymer.24.179openalex-snapshot
Optimization of Polymer-bound PAG (PBP) for 20nm EUV Lithography
inferredcites →https://doi.org/10.2494/photopolymer.26.625openalex-snapshot
Secondary Electrons in EUV Lithography
inferredcites →https://doi.org/10.2494/photopolymer.30.93openalex-snapshot
Recent Progress in EUV Metal Oxide Photoresists
inferredcites →https://doi.org/10.2494/photopolymer.34.99openalex-snapshot
Evolution of Secondary Electrons Emission During EUV Exposure in Photoresists
inferredcites →https://doi.org/10.2494/photopolymer.37.263openalex-snapshot
Novel EUV Underlayer Design for Metal Oxide Resist Patterning
inferredcites →https://doi.org/10.35848/1882-0786/ad6db6openalex-snapshot
High throughput observation of latent images on resist using laser-based photoemission electron microscopy
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