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Influence of deposition geometry on MAX phase formation in Ti–Al–C multilayer thin films

https://doi.org/10.2139/ssrn.7176607
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Outgoing claims: the papers this work cites, builds on, or argues with.

inferredcites →https://doi.org/10.1002/adem.201200180openalex-snapshot
Thin Film Synthesis of Ti3SiC2 by Rapid Thermal Processing of Magnetron‐Sputtered TiCSi Multilayer Systems
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Sputtering and Characterization of MAX‐Phase Forming Cr–Al–C and Ti–Al–C Coatings and Their Application on γ‐Based Titanium Aluminides
inferredcites →https://doi.org/10.1002/adem.202200188openalex-snapshot
Tribological and Mechanical Performance of Ti2AlC and Ti3AlC2 Thin Films
inferredcites →https://doi.org/10.1002/pssa.201200896openalex-snapshot
Silicon/silicide grown out of nanoporous gold nanoparticles
inferredcites →https://doi.org/10.1002/pssa.201431039openalex-snapshot
Diffusion in thin bilayer films during rapid thermal annealing
inferredcites →https://doi.org/10.1007/s11661-006-0243-3openalex-snapshot
Processing and characterization of Ti2AlC, Ti2AlN, and Ti2AlC0.5N0.5
inferredcites →https://doi.org/10.1016/0025-5408(87)90128-0openalex-snapshot
Chemically vapor deposited Ti3SiC2
inferredcites →https://doi.org/10.1016/j.apsusc.2020.145748openalex-snapshot
Spatial elemental investigations in nanostructured alloyed Ag/Au SERS substrates by magnetron sputtering oblique-angle co-deposition towards increased performance and shelf life
inferredcites →https://doi.org/10.1016/j.apsusc.2020.147864openalex-snapshot
Development of the phase composition and the properties of Ti2AlC and Ti3AlC2 MAX-phase thin films – A multilayer approach towards high phase purity
inferredcites →https://doi.org/10.1016/j.apsusc.2020.148465openalex-snapshot
Interface study of thermally driven chemical kinetics involved in Ti/Si3N4 based metal-substrate assembly by X-ray photoelectron spectroscopy
inferredcites →https://doi.org/10.1016/j.jeurceramsoc.2021.02.002openalex-snapshot
On the formation mechanisms and properties of MAX phases: A review
inferredcites →https://doi.org/10.1016/j.matdes.2018.02.046openalex-snapshot
Formation mechanisms of Ti2AlC MAX phase on SiC-4H using magnetron sputtering and post-annealing
inferredcites →https://doi.org/10.1016/j.matlet.2016.05.086openalex-snapshot
Deposition and characterization of Ti2AlC MAX phase and Ti3AlC thin films by magnetron sputtering
inferredcites →https://doi.org/10.1016/j.nimb.2019.02.012openalex-snapshot
Raman investigation of ion irradiated TiC and ZrC
inferredcites →https://doi.org/10.1016/j.pmatsci.2015.06.003openalex-snapshot
Perspectives on oblique angle deposition of thin films: From fundamentals to devices
inferredcites →https://doi.org/10.1016/j.surfcoat.2003.06.025openalex-snapshot
Application of a high temperature self-lubricating composite coating on steam turbine components
inferredcites →https://doi.org/10.1016/j.surfcoat.2004.08.174openalex-snapshot
Growth and characterization of MAX-phase thin films
inferredcites →https://doi.org/10.1016/j.surfcoat.2016.11.090openalex-snapshot
Synthesis and characterization of Ti 2 AlC coatings by magnetron sputtering from three elemental targets and ex-situ annealing
inferredcites →https://doi.org/10.1016/j.surfcoat.2017.11.067openalex-snapshot
Multi-scale tribological and nanomechanical behavior of cold sprayed Ti2AlC MAX phase coating
inferredcites →https://doi.org/10.1016/j.trechm.2019.02.016openalex-snapshot
On the Chemical Diversity of the MAX Phases
inferredcites →https://doi.org/10.1016/j.tsf.2009.07.184openalex-snapshot
The M+1AX phases: Materials science and thin-film processing
inferredcites →https://doi.org/10.1016/j.tsf.2015.01.058openalex-snapshot
Microstructure of mixed oxide thin films prepared by magnetron sputtering at oblique angles
inferredcites →https://doi.org/10.1016/j.tsf.2016.11.005openalex-snapshot
Chemical bonding and electronic-structure in MAX phases as viewed by X-ray spectroscopy and density functional theory
inferredcites →https://doi.org/10.1016/s0257-8972(97)00018-2openalex-snapshot
Magnetron sputtering on large scale substrates: an overview on the state of the art
inferredcites →https://doi.org/10.1016/s1003-6326(18)64821-6openalex-snapshot
Oxidation behavior of porous Ti3SiC2 prepared by reactive synthesis
inferredcites →https://doi.org/10.1038/s41598-025-22605-yopenalex-snapshot
Synthesis and structural characterization of MAX phase thin films by radio frequency sputtering and annealing
inferredcites →https://doi.org/10.1039/b101520fopenalex-snapshot
Electronic and structural properties of the layered ternary carbide Ti3AlC2
inferredcites →https://doi.org/10.1039/d4mh01001aopenalex-snapshot
MAX phase coatings: synthesis, protective performance, and functional characteristics
inferredcites →https://doi.org/10.1063/1.1494865openalex-snapshot
Magnetron sputtered epitaxial single-phase Ti3SiC2 thin films
inferredcites →https://doi.org/10.1063/1.1780597openalex-snapshot
Deposition of Ti2AlC and Ti3AlC2 epitaxial films by magnetron sputtering
inferredcites →https://doi.org/10.1063/1.3465296openalex-snapshot
A model for column angle evolution during oblique angle deposition
inferredcites →https://doi.org/10.1080/14786440108520972openalex-snapshot
X. Quantitative measurement of preferred orientation in rolled uranium bars
inferredcites →https://doi.org/10.1080/21663831.2019.1594428openalex-snapshot
Low-temperature growth of epitaxial Ti2AlC MAX phase thin films by low-rate layer-by-layer PVD
inferredcites →https://doi.org/10.1088/1361-6528/ad113dopenalex-snapshot
Growth dynamics of nanocolumnar thin films deposited by magnetron sputtering at oblique angles
inferredcites →https://doi.org/10.1111/j.1151-2916.1996.tb08018.xopenalex-snapshot
Synthesis and Characterization of a Remarkable Ceramic: Ti 3 SiC 2
inferredcites →https://doi.org/10.1111/j.1151-2916.2000.tb01281.xopenalex-snapshot
Synthesis and Characterization of Ti 3 AlC 2
inferredcites →https://doi.org/10.1111/j.1551-2916.2007.01950.xopenalex-snapshot
Tribological Behavior of Ti 2 SC at Ambient and Elevated Temperatures
inferredcites →https://doi.org/10.1111/j.1551-2916.2011.04846.xopenalex-snapshot
Synthesis, Characterization, and Intrinsic Hardness of Layered Nanolaminate Ti 3 AlC 2 and Ti 3 Al 0.8 Sn 0.2 C 2 Solid Solution
inferredcites →https://doi.org/10.1111/j.1551-2916.2011.04934.xopenalex-snapshot
Microstructures, Electrical, Thermal, and Mechanical Properties of Bulk Ti 2 AlC Synthesized by Self‐Propagating High‐Temperature Combustion Synthesis with Pseudo Hot Isostatic Pressing
inferredcites →https://doi.org/10.1116/1.1312732openalex-snapshot
Influence of apparatus geometry and deposition conditions on the structure and topography of thick sputtered coatings
inferredcites →https://doi.org/10.1116/1.2764082openalex-snapshot
Glancing angle deposition: Fabrication, properties, and applications of micro- and nanostructured thin films
inferredcites →https://doi.org/10.1116/1.5131544openalex-snapshot
Textured growth of polycrystalline MAX phase carbide coatings via thermal annealing of M/C/Al multilayers
inferredcites →https://doi.org/10.1116/1.580562openalex-snapshot
Sculptured thin films and glancing angle deposition: Growth mechanics and applications
inferredcites →https://doi.org/10.1149/1.2097318openalex-snapshot
A Quantitative Method of Determining the Degree of Texture of Zinc Electrodeposits
inferredcites →https://doi.org/10.1179/1743280410y.0000000001openalex-snapshot
Progress in research and development on MAX phases: a family of layered ternary compounds
inferredcites →https://doi.org/10.1533/9780857096012.159openalex-snapshot
Electrical properties of MAX phases
inferredcites →https://doi.org/10.1557/jmr.1992.1564openalex-snapshot
An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments
inferredcites →https://doi.org/10.2320/matertrans.m2010342openalex-snapshot
A Simple Model to Describe the Rule of Glancing Angle Deposition
inferredcites →https://doi.org/10.3103/s1063457612020049openalex-snapshot
Mechanical properties of materials based on MAX phases of the Ti-Al-C system
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