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In-House Non-Foundry Development of Silicon Nitride Integrated Photonic Devices Through Design, Simulation, Fabrication, and Characterization

https://doi.org/10.2139/ssrn.7589900
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Laser direct lithography of large-area three-dimensional integrated photonics: Technological challenges and advances
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Microsphere lithography for scalable polycrystalline diamond-based near-infrared photonic crystals fabrication
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Crafting at the nanoscale: A comprehensive review of mechanical Atomic force microscopy-based lithography methods and their evolution
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Ion slicing of Nd:YAG laser ceramics on sapphire platform and its waveguide amplifier design at 1064 nm
inferredcites →https://doi.org/10.1016/j.mee.2014.09.011openalex-snapshot
Optical and EUV projection lithography: A computational view
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Design of polarization-insensitive 2×2 multimode interference coupler based on double strip silicon nitride waveguides
inferredcites →https://doi.org/10.1016/j.optcom.2019.05.052openalex-snapshot
A broadband, low-crosstalk and low polarization dependent silicon nitride waveguide crossing based on the multimode-interference
inferredcites →https://doi.org/10.1016/j.pquantelec.2026.100614openalex-snapshot
Integrated quantum photonics on thin-film lithium niobate
inferredcites →https://doi.org/10.1016/j.rio.2025.100782openalex-snapshot
Low loss silicon nitride based multimode interference beam splitter in a near polarization insensitive regime
inferredcites →https://doi.org/10.1016/j.rio.2026.100961openalex-snapshot
Directional coupler and multimode interference devices based on SiN: An approach to investigating fabrication tolerances
inferredcites →https://doi.org/10.1016/j.snb.2014.11.098openalex-snapshot
Design of grating couplers and MMI couplers on the TriPleX platform enabling ultra-compact photonic-based biosensors
inferredcites →https://doi.org/10.1016/j.snb.2016.06.060openalex-snapshot
Silicon-on-nitride slot waveguide: A promising platform as mid-IR trace gas sensor
inferredcites →https://doi.org/10.1023/a:1021886511288openalex-snapshot
Etching of Silicon Nitride in CCl2F2, CHF3, SiF4, and SF6 Reactive Plasma: A Comparative Study
inferredcites →https://doi.org/10.1088/0268-1242/29/8/083001openalex-snapshot
An introduction to InP-based generic integration technology
inferredcites →https://doi.org/10.1109/50.372474openalex-snapshot
Optical multi-mode interference devices based on self-imaging: principles and applications
inferredcites →https://doi.org/10.1109/jphot.2013.2292698openalex-snapshot
Low-Loss Singlemode PECVD Silicon Nitride Photonic Wire Waveguides for 532–900 nm Wavelength Window Fabricated Within a CMOS Pilot Line
inferredcites →https://doi.org/10.1109/lpt.2018.2790045openalex-snapshot
Crack-Free Silicon-Nitride-on-Insulator Nonlinear Circuits for Continuum Generation in the ${C}$ -Band
inferredcites →https://doi.org/10.1364/ao.393501openalex-snapshot
Silicon nitride waveguide devices based on gradient-index lenses implemented by subwavelength silicon grating metamaterials
inferredcites →https://doi.org/10.1364/oe.21.014036openalex-snapshot
Silicon nitride CMOS-compatible platform for integrated photonics applications at visible wavelengths
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Design and characterization of integrated components for SiN photonic quantum circuits
inferredcites →https://doi.org/10.1364/oe.25.027310openalex-snapshot
Athermal silicon nitride angled MMI wavelength division (de)multiplexers for the near-infrared
inferredcites →https://doi.org/10.1364/oe.514505openalex-snapshot
SiN integrated photonic components in the visible to near-infrared spectral region
inferredcites →https://doi.org/10.1364/oe.536578openalex-snapshot
Thick waveguides of low-stress stoichiometric silicon nitride on sapphire (SiNOS)
inferredcites →https://doi.org/10.1364/ome.7.000111openalex-snapshot
Material platforms for integrated quantum photonics
inferredcites →https://doi.org/10.1364/osac.381003openalex-snapshot
Broadband low loss and ultra-low crosstalk waveguide crossings based on a multimode interferometer for 840 nm operation
inferredcites →https://doi.org/10.3390/ma15041398openalex-snapshot
Passive Photonic Integrated Circuits Elements Fabricated on a Silicon Nitride Platform
inferredcites →https://doi.org/10.3390/photonics10020152openalex-snapshot
Angle-Based Parametrization with Evolutionary Optimization for OESCL-Band Y-Junction Splitters
inferredcites →https://doi.org/10.3390/photonics8110496openalex-snapshot
Thermo-Optic Phase Tuners Analysis and Design for Process Modules on a Silicon Nitride Platform
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