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Control over the Phase Formation in Metastable Transition Metal Nitride Thin Films by Tuning the Al+ Subplantation Depth

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What this work says

Outgoing claims: the papers this work cites, builds on, or argues with.

inferredcites →https://doi.org/10.1002/3527607595openalex-snapshot

Thin Film Analysis by X‐Ray Scattering

inferredcites →https://doi.org/10.1016/0010-4655(88)90148-8openalex-snapshot

Tridyn-binary collision simulation of atomic collisions and dynamic composition changes in solids

inferredcites →https://doi.org/10.1016/0040-6090(89)90713-xopenalex-snapshot

Microstructure modification of TiN by ion bombardment during reactive sputter deposition

inferredcites →https://doi.org/10.1016/0040-6090(93)90201-yopenalex-snapshot

A simple model for the formation of compressive stress in thin films by ion bombardment

inferredcites →https://doi.org/10.1016/0040-6090(93)90244-jopenalex-snapshot

Crystal growth and microstructure of polycrystalline Ti1−xAlxN alloy films deposited by ultra-high-vacuum dual-target magnetron sputtering

inferredcites →https://doi.org/10.1016/0257-8972(92)90169-bopenalex-snapshot

Multicomponent and multilayer physically vapour deposited coatings for cutting tools

inferredcites →https://doi.org/10.1016/0257-8972(95)02581-2openalex-snapshot

Residual stresses in PVD hard coatings

inferredcites →https://doi.org/10.1016/j.actamat.2007.10.050openalex-snapshot

Phase stabilities and thermal decomposition in the Zr1−Al N system studied by ab initio calculation and thermodynamic modeling

inferredcites →https://doi.org/10.1016/j.pmatsci.2006.02.002openalex-snapshot

Microstructural design of hard coatings

inferredcites →https://doi.org/10.1016/j.surfcoat.2004.04.056openalex-snapshot

Mechanical properties and machining performance of Ti1−Al N-coated cutting tools

inferredcites →https://doi.org/10.1016/j.surfcoat.2004.07.036openalex-snapshot

Characterization of Zr–Al–N films synthesized by a magnetron sputtering method

inferredcites →https://doi.org/10.1016/j.surfcoat.2011.09.019openalex-snapshot

Phase stability and alloy-related trends in Ti–Al–N, Zr–Al–N and Hf–Al–N systems from first principles

inferredcites →https://doi.org/10.1016/j.surfcoat.2012.04.024openalex-snapshot

Role of Tin+ and Aln+ ion irradiation (n=1, 2) during Ti1-xAlxN alloy film growth in a hybrid HIPIMS/magnetron mode

inferredcites →https://doi.org/10.1016/j.surfcoat.2013.05.023openalex-snapshot

Microstructure, chemical states, and mechanical properties of magnetron co-sputtered V1−xAlxN coatings

inferredcites →https://doi.org/10.1016/j.surfcoat.2014.01.049openalex-snapshot

Structural and mechanical evolution of reactively and non-reactively sputtered Zr–Al–N thin films during annealing

inferredcites →https://doi.org/10.1016/j.surfcoat.2015.09.001openalex-snapshot

Control of Ti1−xSixN nanostructure via tunable metal-ion momentum transfer during HIPIMS/DCMS co-deposition

inferredcites →https://doi.org/10.1016/j.vacuum.2009.03.012openalex-snapshot

Influence of the aluminum incorporation on the structure of sputtered ZrNx films deposited at low temperatures

inferredcites →https://doi.org/10.1016/j.vacuum.2015.02.027openalex-snapshot

Strategy for tuning the average charge state of metal ions incident at the growing film during HIPIMS deposition

inferredcites →https://doi.org/10.1016/j.vacuum.2015.11.004openalex-snapshot

Peak amplitude of target current determines deposition rate loss during high power pulsed magnetron sputtering

inferredcites →https://doi.org/10.1016/s0040-6090(01)01043-4openalex-snapshot

Mechanical integrity in PVD coatings due to the presence of residual stresses

inferredcites →https://doi.org/10.1016/s0257-8972(09)90057-3openalex-snapshot

Multicomponent and multilayer physically vapour deposited coatings for cutting tools

inferredcites →https://doi.org/10.1016/s0257-8972(97)00159-xopenalex-snapshot

Magnetron-sputtered superhard materials

inferredcites →https://doi.org/10.1016/s0257-8972(99)00292-3openalex-snapshot

A novel pulsed magnetron sputter technique utilizing very high target power densities

inferredcites →https://doi.org/10.1016/s0257-8972(99)00491-0openalex-snapshot

Effects of Al content on hardness, lattice parameter and microstructure of Ti1−xAlxN films

inferredcites →https://doi.org/10.1038/s41598-017-16567-zopenalex-snapshot

Crystallite size-dependent metastable phase formation of TiAlN coatings

inferredcites →https://doi.org/10.1038/s41598-017-17846-5openalex-snapshot

Selectable phase formation in VAlN thin films by controlling Al+ subplantation depth

inferredcites →https://doi.org/10.1063/1.1608464openalex-snapshot

Self-organized nanostructures in the Ti–Al–N system

inferredcites →https://doi.org/10.1063/1.2998588openalex-snapshot

Thermal decomposition products in arc evaporated TiAlN/TiN multilayers

inferredcites →https://doi.org/10.1063/1.343570openalex-snapshot

Formation of polyhedral N2 bubbles during reactive sputter deposition of epitaxial TiN(100) films

inferredcites →https://doi.org/10.1063/1.4818170openalex-snapshot

Nanolabyrinthine ZrAlN thin films by self-organization of interwoven single-crystal cubic and hexagonal phases

inferredcites →https://doi.org/10.1063/1.4940974openalex-snapshot

Venting temperature determines surface chemistry of magnetron sputtered TiN films

inferredcites →https://doi.org/10.1063/1.4963709openalex-snapshot

A combined segmented anode gas ionization chamber and time-of-flight detector for heavy ion elastic recoil detection analysis

inferredcites →https://doi.org/10.1063/1.4977813openalex-snapshot

Unprecedented Al supersaturation in single-phase rock salt structure VAlN films by Al+ subplantation

inferredcites →https://doi.org/10.1063/1.4985172openalex-snapshot

Correlative plasma-surface model for metastable Cr-Al-N: Frenkel pair formation and influence of the stress state on the elastic properties

inferredcites →https://doi.org/10.1063/1.4991640openalex-snapshot

Extended metastable Al solubility in cubic VAlN by metal-ion bombardment during pulsed magnetron sputtering: film stress vs subplantation

inferredcites →https://doi.org/10.1080/21663831.2016.1233914openalex-snapshot

Unprecedented thermal stability of inherently metastable titanium aluminum nitride by point defect engineering

inferredcites →https://doi.org/10.1088/0022-3727/43/3/035302openalex-snapshot

Experimental and computational study on the phase stability of Al-containing cubic transition metal nitrides

inferredcites →https://doi.org/10.1103/physrevb.75.045123openalex-snapshot

Mixing and decomposition thermodynamics of c−Ti1−xAlxN from first-principles calculations

inferredcites →https://doi.org/10.1116/1.1503784openalex-snapshot

Thermal stability of arc evaporated high aluminum-content Ti1−xAlxN thin films

inferredcites →https://doi.org/10.1116/1.1601610openalex-snapshot

Microstructural evolution during film growth

inferredcites →https://doi.org/10.1116/1.1924579openalex-snapshot

Microstructure and nanohardness properties of Zr–Al–N and Zr–Cr–N thin films

inferredcites →https://doi.org/10.1116/1.4884575openalex-snapshot

Novel strategy for low-temperature, high-rate growth of dense, hard, and stress-free refractory ceramic thin films

inferredcites →https://doi.org/10.1116/1.4989674openalex-snapshot

Gas rarefaction effects during high power pulsed magnetron sputtering of groups IVb and VIb transition metals in Ar

inferredcites →https://doi.org/10.1116/1.573713openalex-snapshot

Titanium aluminum nitride films: A new alternative to TiN coatings

inferredcites →https://doi.org/10.1116/1.574948openalex-snapshot

Industrial deposition of binary, ternary, and quaternary nitrides of titanium, zirconium, and aluminum

inferredcites →https://doi.org/10.1116/1.578279openalex-snapshot

Design and characterization of a compact two-target ultrahigh vacuum magnetron sputter deposition system: Application to the growth of epitaxial Ti1−xAlxN alloys and TiN/Ti1−xAlxN superlattices

What points at this work

Incoming claims: where this work appears in other papers’ reference lists and arguments.

inferred← citeshttps://doi.org/10.2139/ssrn.4100262openalex-extracted

High-Entropy Transition Metal Nitride Thin Films Alloyed with Al: Microstructure, Phase Composition and Mechanical Properties

inferred← citeshttps://doi.org/10.1007/s13346-021-00980-zopenalex-snapshot

Titanium dioxide nanotubes as drug carriers for infection control and osteogenesis of bone implants

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Towards reliable X-ray photoelectron spectroscopy: Sputter-damage effects in transition metal borides, carbides, nitrides, and oxides

inferred← citeshttps://doi.org/10.1016/j.ceramint.2019.11.155openalex-snapshot

Comparative study on crack resistance of TiAlN monolithic and Ti/TiAlN multilayer coatings

inferred← citeshttps://doi.org/10.1016/j.matdes.2022.110798openalex-snapshot

High-entropy transition metal nitride thin films alloyed with Al: Microstructure, phase composition and mechanical properties

inferred← citeshttps://doi.org/10.1016/j.surfcoat.2019.06.081openalex-snapshot

X-ray photoelectron spectroscopy studies of Ti1-Al N (0 ≤ x ≤ 0.83) high-temperature oxidation: The crucial role of Al concentration

inferred← citeshttps://doi.org/10.1016/j.surfcoat.2019.125007openalex-snapshot

Reactive HiPIMS deposition of Ti-Al-N: Influence of the deposition parameters on the cubic to hexagonal phase transition

inferred← citeshttps://doi.org/10.1016/j.surfcoat.2020.125364openalex-snapshot

Cubic-structure Al-rich TiAlSiN thin films grown by hybrid high-power impulse magnetron co-sputtering with synchronized Al+ irradiation

inferred← citeshttps://doi.org/10.1016/j.surfcoat.2020.125641openalex-snapshot

Spinodal decomposition of reactively sputtered (V0.64Al0.36)0.49N0.51 thin films

inferred← citeshttps://doi.org/10.1016/j.surfcoat.2020.126087openalex-snapshot

High Si content TiSiN films with superior oxidation resistance

inferred← citeshttps://doi.org/10.1016/j.surfcoat.2021.127638openalex-snapshot

Time-averaged and time-resolved ion fluxes related to reactive HiPIMS deposition of Ti-Al-N films

inferred← citeshttps://doi.org/10.1016/j.surfcoat.2021.127661openalex-snapshot

Influence of Si content on phase stability and mechanical properties of TiAlSiN films grown by AlSi-HiPIMS/Ti-DCMS co-sputtering

inferred← citeshttps://doi.org/10.1016/j.surfcoat.2022.128986openalex-snapshot

Effects of substrate rotation during AlSi-HiPIMS/Ti-DCMS co-sputtering growth of TiAlSiN coatings on phase content, microstructure, and mechanical properties

inferred← citeshttps://doi.org/10.1016/j.surfcoat.2025.132605openalex-snapshot

Influence of Al incorporation on the thermal stability, mechanical properties and oxidation behavior of (Ti,V,Zr,Nb,Hf,Ta)1-xAlxN thin films (x = 0, 0.1)

inferred← citeshttps://doi.org/10.1016/j.surfcoat.2025.132946openalex-snapshot

Equilibrium and non-equilibrium heating in plasma-based deposition of thin films and coatings

inferred← citeshttps://doi.org/10.1016/j.tsf.2023.139977openalex-snapshot

Ion- and temperature-induced 3-dimensional nanoscale patterning in Ti1-xAlxN deposited by High Power Impulse Magnetron Sputtering

inferred← citeshttps://doi.org/10.1063/1.5141342openalex-snapshot

Metal-ion subplantation: A game changer for controlling nanostructure and phase formation during film growth by physical vapor deposition

inferred← citeshttps://doi.org/10.1063/5.0086359openalex-snapshot

A step-by-step guide to perform x-ray photoelectron spectroscopy

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Electron accumulation and distribution at interfaces of hexagonal ScxAl1−xN/GaN- and ScxAl1−xN/InN-heterostructures

inferred← citeshttps://doi.org/10.1088/1361-6595/ab504bopenalex-snapshot

Ion energy control via the electrical asymmetry effect to tune coating properties in reactive radio frequency sputtering

inferred← citeshttps://doi.org/10.1116/1.5121226openalex-snapshot

Paradigm shift in thin-film growth by magnetron sputtering: From gas-ion to metal-ion irradiation of the growing film

inferred← citeshttps://doi.org/10.1116/6.0003258openalex-snapshot

Cross-ionization of the sputtered flux during hybrid high power impulse/direct-current magnetron co-sputtering

inferred← citeshttps://doi.org/10.2139/ssrn.5269909openalex-snapshot

Influence of Al Incorporation on the Thermal Stability, Mechanical Properties and Oxidation Behavior of (Ti,V,Zr,Nb,Hf,Ta)1-Xalxn Thin Films (X = 0, 0.1)

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Prediction of Skin Sensitization Potential of Silver and Zinc Oxide Nanoparticles Through the Human Cell Line Activation Test

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The Effect of Cathodic Arc Guiding Magnetic Field on the Growth of (Ti0.36Al0.64)N Coatings

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