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SU-8 Photolithography as a Toolbox for Carbon MEMS
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What this work says
Outgoing claims: the papers this work cites, builds on, or argues with.
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Fabrication of glassy carbon microstructures by pyrolysis of microfabricated polymeric precursors
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SU‐8 as a structural material for labs‐on‐chips and microelectromechanical systems
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On‐line separation of bacterial cells by carbon‐electrode dielectrophoresis
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A novel approach to dielectrophoresis using carbon electrodes
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Microfabrication technologies in dielectrophoresis applications—A review
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Dielectrophoresis of lambda‐DNA using 3D carbon electrodes
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Doped glassy carbon materials (DGC): Their synthesis from polymeric precursors and investigation of their properties
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Mechanisms of thermal degradation of phenolic condensation polymers. II. Thermal stability and degradation schemes of epoxy resins
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Thermal degradation of nadic methyl anhydride‐cured epoxy novolac
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Conversion of phenol formaldehyde resin to glass-like carbon
inferredcites →https://doi.org/10.1007/bf00547583openalex-snapshot
Effect of heat treatment temperature (HTT) on density, weight and volume of glass-like carbon (GC)
inferredcites →https://doi.org/10.1007/bf02822619openalex-snapshot
Bulk amorphous metal—An emerging engineering material
inferredcites →https://doi.org/10.1007/s00542-002-0176-8openalex-snapshot
Reduction of diffraction effect of UV exposure on SU-8 negative thick photoresist by air gap elimination
inferredcites →https://doi.org/10.1016/0008-6223(69)90518-1openalex-snapshot
The formation of glasslike carbon by pyrolysis of polyfurfuryl alcohol and phenolic resin
inferredcites →https://doi.org/10.1016/0008-6223(70)90075-8openalex-snapshot
The effect of crosslinking on the formation of glasslike carbons from thermosetting resins
inferredcites →https://doi.org/10.1016/0008-6223(91)90027-gopenalex-snapshot
Microtexture and magnetoresistance of glass-like carbons
inferredcites →https://doi.org/10.1016/0040-6090(83)90451-0openalex-snapshot
Thin pinhole-free carbon films
inferredcites →https://doi.org/10.1016/0165-2370(87)85060-xopenalex-snapshot
Studies on thermal degradation of epoxy resins by high-resolution pyrolysis-gas chromatography
inferredcites →https://doi.org/10.1016/0304-3894(96)01779-7openalex-snapshot
Pyrolysis kinetics of epoxy resin in a nitrogen atmosphere
inferredcites →https://doi.org/10.1016/j.bios.2004.09.034openalex-snapshot
From MEMS to NEMS with carbon
inferredcites →https://doi.org/10.1016/j.bios.2012.12.049openalex-snapshot
Increasing PCR sensitivity by removal of polymerase inhibitors in environmental samples by using dielectrophoresis
inferredcites →https://doi.org/10.1016/j.carbon.2006.04.039openalex-snapshot
Fabrication of suspended carbon microstructures by e-beam writer and pyrolysis
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Fabrication and properties of a carbon/polypyrrole three-dimensional microbattery
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Fabrication and characterization of three-dimensional carbon electrodes for lithium-ion batteries
inferredcites →https://doi.org/10.1016/j.jpowsour.2010.09.050openalex-snapshot
Electrochemically activated carbon micro-electrode arrays for electrochemical micro-capacitors
inferredcites →https://doi.org/10.1016/j.mee.2012.07.092openalex-snapshot
Fabrication of high-aspect ratio SU-8 micropillar arrays
inferredcites →https://doi.org/10.1016/j.snb.2005.02.006openalex-snapshot
A numerical and experimental study on gap compensation and wavelength selection in UV-lithography of ultra-high aspect ratio SU-8 microstructures
inferredcites →https://doi.org/10.1016/j.snb.2010.10.021openalex-snapshot
One-step maskless grayscale lithography for the fabrication of 3-dimensional structures in SU-8
inferredcites →https://doi.org/10.1016/s0003-2670(00)00025-8openalex-snapshot
Glassy carbon as electrode material in electro- analytical chemistry
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A new structural model of glass-like carbon
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Graphitization behavior of Kapton-derived carbon film related to structure, microtexture and transport properties
inferredcites →https://doi.org/10.1016/s0924-4247(98)00249-0openalex-snapshot
3D microfabrication by combining microstereolithography and thick resist UV lithography
inferredcites →https://doi.org/10.1016/s1369-7021(04)00124-5openalex-snapshot
The case for bulk metallic glass
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A Glassy-Carbon Electrode for Voltammetry.
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Bis-o-diynylarene (BODA) Derived Polynaphthalenes as Precursors to Glassy Carbon Microstructures
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Review Structure and properties of glass-like carbon
inferredcites →https://doi.org/10.1038/193261b0openalex-snapshot
Some Physical Properties of Glassy Carbon
inferredcites →https://doi.org/10.1038/nmat1155openalex-snapshot
Direct laser writing of three-dimensional photonic-crystal templates for telecommunications
inferredcites →https://doi.org/10.1039/b403304copenalex-snapshot
Effect of exposure dose on the replication fidelity and profile of very high aspect ratio microchannels in SU-8
inferredcites →https://doi.org/10.1039/b925456kopenalex-snapshot
The integration of 3D carbon-electrode dielectrophoresis on a CD-like centrifugal microfluidic platform
inferredcites →https://doi.org/10.1039/c4lc00109eopenalex-snapshot
Dielectrophoresis-based purification of antibiotic-treated bacterial subpopulations
inferredcites →https://doi.org/10.1063/1.1656439openalex-snapshot
Small-Angle X-Ray Scattering from Glassy Carbon
inferredcites →https://doi.org/10.1063/1.1765734openalex-snapshot
Photonic crystals through holographic lithography: Simple cubic, diamond-like, and gyroid-like structures
inferredcites →https://doi.org/10.1088/0960-1317/16/1/016openalex-snapshot
A novel fabrication method of flexible and monolithic 3D microfluidic structures using lamination of SU-8 films
inferredcites →https://doi.org/10.1088/0960-1317/17/2/003openalex-snapshot
Moving mask UV lithography for three-dimensional structuring
inferredcites →https://doi.org/10.1088/0960-1317/17/6/r01openalex-snapshot
SU-8: a photoresist for high-aspect-ratio and 3D submicron lithography
inferredcites →https://doi.org/10.1098/rspa.1972.0060openalex-snapshot
Formation and structure of polymeric carbons
inferredcites →https://doi.org/10.1103/physrevb.9.5268openalex-snapshot
X-ray photoemission studies of diamond, graphite, and glassy carbon valence bands
inferredcites →https://doi.org/10.1107/s0365110x65001342openalex-snapshot
A model for the structure of `glassy carbon'
inferredcites →https://doi.org/10.1109/jmems.0007.892889openalex-snapshot
Thermoplastic Forming of Bulk Metallic Glass— A Technology for MEMS and Microstructure Fabrication
inferredcites →https://doi.org/10.1109/jmems.2004.839312openalex-snapshot
A novel method for the fabrication of high-aspect ratio C-MEMS structures
inferredcites →https://doi.org/10.1109/jmems.2006.879669openalex-snapshot
Multidirectional UV Lithography for Complex 3-D MEMS Structures
inferredcites →https://doi.org/10.1109/sensor.2009.5285533openalex-snapshot
A novel method for amorphous metal micromolding using Carbon MEMS
inferredcites →https://doi.org/10.1116/1.2172927openalex-snapshot
Fabricating multilevel SU-8 structures in a single photolithographic step using colored masking patterns
inferredcites →https://doi.org/10.1116/1.590671openalex-snapshot
Amorphous carbon films for use as both variable-transmission apertures and attenuated phase shift masks for deep ultraviolet lithography
inferredcites →https://doi.org/10.1143/jjap.37.6486openalex-snapshot
Structure Change of Glass-like Carbon with Heat Treatment, Studied by Small Angle X-Ray Scattering: I. Glass-like Carbon Prepared from Phenolic Resin
inferredcites →https://doi.org/10.1149/1.1393188openalex-snapshot
Photoresist-Derived Carbon for Microelectromechanical Systems and Electrochemical Applications
inferredcites →https://doi.org/10.1149/1.1436085openalex-snapshot
Pyrolysis of Negative Photoresists to Fabricate Carbon Structures for Microelectromechanical Systems and Electrochemical Applications
inferredcites →https://doi.org/10.1149/1.2116707openalex-snapshot
Electrical Properties and Shrinkage of Carbonized Photoresist Films and the Implications for Carbon Microelectromechanical Systems Devices in Conductive Media
inferredcites →https://doi.org/10.1149/1.3531952openalex-snapshot
Carbon Interdigitated Array Nanoelectrodes for Electrochemical Applications
inferredcites →https://doi.org/10.1177/0021998304039267openalex-snapshot
Processability, Thermal, Mechanical, and Morphological Properties of Novolac Type-Epoxy Resin-Based Carbon-Carbon Composite
inferredcites →https://doi.org/10.1246/bcsj.56.2499openalex-snapshot
Glass-like Carbon Made from Epoxy Resin Cured with 2,4,6-Trinitrophenol
inferredcites →https://doi.org/10.1351/pac199567030473openalex-snapshot
Recommended terminology for the description of carbon as a solid (IUPAC Recommendations 1995)
inferredcites →https://doi.org/10.1364/oe.11.003555openalex-snapshot
Fabrication and characterization of three-dimensional silicon tapers
inferredcites →https://doi.org/10.3390/mi3030574openalex-snapshot
Very High Throughput Electrical Cell Lysis and Extraction of Intracellular Compounds Using 3D Carbon Electrodes in Lab-on-a-Chip Devices
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Incoming claims: where this work appears in other papers’ reference lists and arguments.
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In Situ Lubrication of SU-8/Talc Composite with Base Oil (SN150) and Perfluoropolyether as Fillers
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Development of long-range conductivity mechanisms in glass-like carbon
inferred← citeshttps://doi.org/10.1016/j.carbon.2025.120728openalex-snapshot
Real time observation of glass-like carbon formation from SU-8 using X-ray and ultraviolet photoelectron spectroscopy
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A historical review of glassy carbon: Synthesis, structure, properties and applications
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Shrinkage of SU-8 microstructures during carbonization
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Effect of pyrolysis process parameters on electrical, physical, chemical and electro-chemical properties of SU-8-derived carbon structures fabricated using the C-MEMS process
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MICROSCOPIC AND LABORATORY SCALE CHARACTERIZATION METHODS TO EVALUATE BIOMASS DECONSTRUCTION
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