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Continuum modelling of an asymmetric CCRF argon plasma reactor: Influence of higher excited states and sensitivity to model parameters

https://doi.org/10.1002/ppap.202000243

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What this work says

Outgoing claims: the papers this work cites, builds on, or argues with.

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Principles of Plasma Discharges and Materials Processing

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Spectroscopic Measurement of Electron Temperature and Density in an Argon Plasma Jet Based on Collisional-Radiative Model

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Spectroscopy of Low Temperature Plasma

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Low Temperature Plasma‐Based Sterilization: Overview and State‐of‐the‐Art

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Microflows and Nanoflows: Fundamentals and Simulation

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A multifaceted biomimetic interface to improve the longevity of orthopedic implants

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Radical-functionalized plasma polymers: Stable biomimetic interfaces for bone implant applications

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Nanotexturing and Wettability Ageing of Polypropylene Surfaces Modified by Oxygen Capacitively Coupled Radio Frequency Plasma

inferredcites →https://doi.org/10.1016/j.sab.2008.11.004openalex-snapshot

Hybrid Monte Carlo — Fluid model for studying the effects of nitrogen addition to argon glow discharges

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A simple analysis on the abnormal behavior of the argon metastable density in an inductively coupled Ar plasma

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Physics of Radio-Frequency Plasmas

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Carboxyl-Functionalized Nanoparticles Produced by Pulsed Plasma Polymerization of Acrylic Acid

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Substrate-Regulated Growth of Plasma-Polymerized Films on Carbide-Forming Metals

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Multifunctional Protein-Immobilized Plasma Polymer Films for Orthopedic Applications

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Direct covalent attachment of silver nanoparticles on radical-rich plasma polymer films for antibacterial applications

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Plasma parameters of RF capacitively coupled discharge: comparative study between a plane cathode and a large hole dimensions multi-hollow cathode

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Retarding-field analyzer for measurements of ion energy distributions and secondary electron emission coefficients in low-pressure radio frequency discharges

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Breakdown behavior in radio-frequency argon discharges

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Fluid modeling of electron heating in low-pressure, high-frequency capacitively coupled plasma discharges

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On the multistep ionizations in an argon inductively coupled plasma

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Phase-shift effect in capacitively coupled plasmas with two radio frequency or very high frequency sources

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Continuum modeling of radio-frequency glow discharges. I. Theory and results for electropositive and electronegative gases

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Fluid simulations of glow discharges: Effect of metastable atoms in argon

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A two-dimensional fluid model for an argon rf discharge

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Enhanced reliability of drift-diffusion approximation for electrons in fluid models for nonthermal plasmas

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Numerical study of effect of secondary electron emission on discharge characteristics in low pressure capacitive RF argon discharge

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Measurements of population densities of metastable and resonant levels of argon using laser induced fluorescence

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Two-dimensional hybrid Monte Carlo–fluid modelling of dc glow discharges: Comparison with fluid models, reliability, and accuracy

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Effective secondary electron emission coefficient in DC abnormal glow discharge plasmas

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Influence of dust particles on DC glow discharge plasma

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Simulation of a large size inductively coupled plasma generator and comparison with experimental data

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Plasma flow around and charge distribution of a dust cluster in a rf discharge

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Secondary electron effect on sustaining capacitively coupled discharges: A hybrid modeling investigation of the ionization rate

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Total cross sections for metastable excitation in the rare gases

inferredcites →https://doi.org/10.1088/0022-3727/20/7/002openalex-snapshot

The use of Langmuir probes and optical emission spectroscopy to measure electron energy distribution functions in RF-generated argon plasmas

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A time-dependent analysis of the nitrogen afterglow in and - Ar microwave discharges

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Comparisons of sets of electron–neutral scattering cross sections and swarm parameters in noble gases: I. Argon

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On the effect of the electron energy distribution on the plasma parameters of an argon discharge: a global (volume-averaged) model study

inferredcites →https://doi.org/10.1088/0963-0252/14/4/011openalex-snapshot

Solving the Boltzmann equation to obtain electron transport coefficients and rate coefficients for fluid models

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A global (volume averaged) model of a chlorine discharge

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Spatially resolved Langmuir probe diagnostics in a capacitively coupled radio frequency argon and oxygen plasma

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Cold-cathode discharges and breakdown in argon: surface and gas phase production of secondary electrons

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Modeling of argon–acetylene dusty plasma

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Experimental and PIC MCC study of electron cooling—re-heating and plasma density decay in low pressure rf ccp argon afterglow

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Numerical analysis of the non-equilibrium plasma flow in the gaseous electronics conference reference reactor

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Simulation of Ion Energy Distributions in ICP Reactor with Bias Voltages Using COMSOL

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Electron-impact excitation of metastable argon and krypton

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Electron-impact ionization cross sections for excited states of the rare gases (Ne, Ar, Kr, Xe), cadmium, and mercury

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Apparent secondary-electron emission coefficient and the voltage-current characteristics of argon glow discharges

inferredcites →https://doi.org/10.1103/physrevlett.65.996openalex-snapshot

Abnormally low electron energy and heating-mode transition in a low-pressure argon rf discharge at 13.56 MHz

inferredcites →https://doi.org/10.1109/tps.2009.2021419openalex-snapshot

Fluid Modeling and Analysis of the Constriction of the DC Positive Column in Argon

inferredcites →https://doi.org/10.1109/tps.2018.2818164openalex-snapshot

Study on Effect of Neutral Gas Pressure on Plasma Characteristics in Capacitive RF Argon Glow Discharges at Low Pressure by Fluid Modeling

inferredcites →https://doi.org/10.4028/www.scientific.net/amm.556-562.1691openalex-snapshot

Two-Dimensional Numerical Study on Characterization of Low-Pressure Capacitively Coupled Argon Discharges

inferredcites →https://doi.org/10.6028/jres.100.036openalex-snapshot

Two-Dimensional Self-Consistent Radio-Frequency Plasma Simulations Relevant to the Gaseous Electronics Conference Rf Reference Cell

What points at this work

Incoming claims: where this work appears in other papers’ reference lists and arguments.

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Study of Plasma-Surface Interactions Using Different Types of Plasma Discharge Excitations

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Photometric Diagnostic of the Sheath Dynamics and Electron Density Trends in Single and Dual Frequency CCRF Argon Plasmas

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Cold plasma treatment of porous scaffolds: Design principles

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Investigation of Capacitively Coupled Radio-Frequency Argon Plasma: Integration of in Situ Optical Diagnostics with Data-Driven and Theoretical Modeling

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Enhancing plasma discharge dynamics through analysis of secondary electron emission: A numerical modeling approach for improved thin film deposition

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Surface-Active Plasma-Polymerized Nanoparticles for Multifunctional Diagnostic, Targeting, and Therapeutic Probes

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Electrical characteristics of the GEC reference cell at low pressure: a two-dimensional PIC/MCC modeling study

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Experimentally informed modelling of argon dielectric barrier discharge

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1D Modelling and Diagnostics of Low-Pressure Capacitively Coupled Radio-Frequency Argon Plasma

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