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Study of Plasma-Surface Interactions Using Different Types of Plasma Discharge Excitations

https://doi.org/10.2139/ssrn.4755939
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Outgoing claims: the papers this work cites, builds on, or argues with.

inferredcites →https://doi.org/10.1002/0471724254openalex-extracted
Principles of Plasma Discharges and Materials Processing
inferredcites →https://doi.org/10.1002/ppap.202000243openalex-extracted
Continuum modelling of an asymmetric CCRF argon plasma reactor: Influence of higher excited states and sensitivity to model parameters
inferredcites →https://doi.org/10.1007/978-981-19-6223-3_20openalex-extracted
Analysis of 2D Simulation of Hydrogenated Silicon Nitride Plasma Discharge in CCP Reactor for Thin Film Solar Cell Deposition
inferredcites →https://doi.org/10.1007/s41614-022-00092-2openalex-extracted
Two-dimensional particle-in-cell simulation parallelized with graphics processing units for the investigation of plasma kinetics in a dual-frequency capacitively coupled plasma
inferredcites →https://doi.org/10.1016/j.matdes.2017.02.053openalex-extracted
Hot pack rolling nearly lamellar Ti-44Al-8Nb-(W, B, Y) alloy with different rolling reductions: Lamellar colonies evolution and tensile properties
inferredcites →https://doi.org/10.1016/j.matpr.2019.04.052openalex-extracted
Numerical Modeling of Plasma Silicon Discharge for Photovoltaic Application
inferredcites →https://doi.org/10.1016/j.matpr.2022.07.036openalex-extracted
Two-dimensional simulation of non-equilibrium silicon nitride plasma discharge for thin film solar cell deposition
inferredcites →https://doi.org/10.1016/j.mee.2014.11.014openalex-extracted
Coupled simulation to determine the impact of across wafer variations in oxide PECVD on electrical and reliability parameters of through-silicon vias
inferredcites →https://doi.org/10.1016/j.surfcoat.2020.126521openalex-extracted
Magnesium alloys for biomedical application: Advanced corrosion control through surface coating
inferredcites →https://doi.org/10.1021/acs.accounts.0c00757openalex-extracted
Plasma-Enhanced Chemical Vapor Deposition of Two-Dimensional Materials for Applications
inferredcites →https://doi.org/10.1038/srep19822openalex-extracted
Direct fabrication of 3D graphene on nanoporous anodic alumina by plasma-enhanced chemical vapor deposition
inferredcites →https://doi.org/10.1063/1.4754692openalex-extracted
Separate control of the ion flux and ion energy in capacitively coupled radio-frequency discharges using voltage waveform tailoring
inferredcites →https://doi.org/10.1063/5.0055444openalex-extracted
Self-bias voltage formation and charged particle dynamics in multi-frequency capacitively coupled plasmas
inferredcites →https://doi.org/10.1088/0022-3727/37/5/008openalex-extracted
Independent control of ion current and ion impact energy onto electrodes in dual frequency plasma devices
inferredcites →https://doi.org/10.1088/0022-3727/42/2/025205openalex-extracted
PIC simulations of the separate control of ion flux and energy in CCRF discharges via the electrical asymmetry effect
inferredcites →https://doi.org/10.1088/0022-3727/42/9/092005openalex-extracted
The electrical asymmetry effect in capacitively coupled radio frequency discharges – measurements of dc self bias, ion energy and ion flux
inferredcites →https://doi.org/10.1088/1742-6596/162/1/012010openalex-extracted
The Electrical Asymmetry Effect - A novel and simple method for separate control of ion energy and flux in capacitively coupled RF discharges
inferredcites →https://doi.org/10.1098/rsos.171757openalex-extracted
Study on the optimization of the deposition rate of planetary GaN-MOCVD films based on CFD simulation and the corresponding surface model
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