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Comparison of Tensile and Bulge Tests for Thin-Film Silicon Nitride

https://doi.org/10.1007/bf02427976
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What this work says

Outgoing claims: the papers this work cites, builds on, or argues with.

inferredcites →https://doi.org/10.1002/mawe.19800111006openalex-snapshot
Mechanical Properties of Silicon Nitride
inferredcites →https://doi.org/10.1007/bf02411051openalex-snapshot
A new microtensile tester for the study of MEMS materials with the aid of atomic force microscopy
inferredcites →https://doi.org/10.1007/bf02652915openalex-snapshot
Measuring stiffnesses and residual stresses of silicon nitride thin films
inferredcites →https://doi.org/10.1016/0040-6090(92)90112-oopenalex-snapshot
Fracture strength and biaxial modulus measurement of plasma silicon nitride films
inferredcites →https://doi.org/10.1016/0250-6874(89)87111-2openalex-snapshot
Mechanical property measurements of thin films using load-deflection of composite rectangular membranes
inferredcites →https://doi.org/10.1016/s0040-6090(96)09029-3openalex-snapshot
Non-destructive characterization and evaluation of thin films by laser-induced ultrasonic surface waves
inferredcites →https://doi.org/10.1016/s0921-5107(00)00794-7openalex-snapshot
Specimen size effect on mechanical properties of polysilicon microcantilever beams measured by deflection using a nanoindenter
inferredcites →https://doi.org/10.1016/s0924-4247(99)00364-7openalex-snapshot
Tensile testing of SiO2 and Si3N4 films carried out on a silicon chip
inferredcites →https://doi.org/10.1016/s1359-6454(00)00088-4openalex-snapshot
Microbridge testing of silicon nitride thin films deposited on silicon wafers
inferredcites →https://doi.org/10.1016/s1359-6454(99)00294-3openalex-snapshot
Materials issues in microelectromechanical systems (MEMS)
inferredcites →https://doi.org/10.1016/s1359-6462(01)01067-3openalex-snapshot
Tensile properties of free-standing aluminum thin films
inferredcites →https://doi.org/10.1109/84.623107openalex-snapshot
A new technique for measuring the mechanical properties of thin films
inferredcites →https://doi.org/10.1109/84.709651openalex-snapshot
Mechanical properties of thin films from the load deflection of long clamped plates
inferredcites →https://doi.org/10.1109/isdrs.2001.984532openalex-snapshot
Mechanical properties of MEMS materials
inferredcites →https://doi.org/10.1109/memsys.1990.110267openalex-snapshot
Measurement of Young's modulus on microfabricated structures using a surface profiler
inferredcites →https://doi.org/10.1109/memsys.1997.581881openalex-snapshot
Measurements of Young's modulus, Poisson's ratio, and tensile strength of polysilicon
inferredcites →https://doi.org/10.1109/memsys.1997.581921openalex-snapshot
Specimen size effect on tensile strength of surface micromachined polycrystalline silicon thin films
inferredcites →https://doi.org/10.1109/ultsym.2001.991857openalex-snapshot
Characterization of micromachined silicon nitride membrane using resonant ultrasound spectroscopy
inferredcites →https://doi.org/10.1116/1.577257openalex-snapshot
The mechanical properties and microstructure of plasma enhanced chemical vapor deposited silicon nitride thin films
inferredcites →https://doi.org/10.1117/12.395707openalex-snapshot
Fracture tests of etched components using a focused ion beam machine
inferredcites →https://doi.org/10.1143/jjap.36.l794openalex-snapshot
Silicon Nitride Thin Films Young's Modulus Determination by an Optical Non Destructive Method
inferredcites →https://doi.org/10.1520/stp10977sopenalex-snapshot
Cross Comparison of Direct Strength Testing Techniques on Polysilicon Films
inferredcites →https://doi.org/10.1520/stp10992sopenalex-snapshot
Tensile Tests of Various Thin Films
inferredcites →https://doi.org/10.1557/jmr.1992.3242openalex-snapshot
A new bulge test technique for the determination of Young's modulus and Poisson's ratio of thin films
inferredcites →https://doi.org/10.1557/jmr.1993.0112openalex-snapshot
A new method for tensile testing of thin films
inferredcites →https://doi.org/10.1557/jmr.1993.1542openalex-snapshot
A new method for measuring the strength and ductility of thin films
inferredcites →https://doi.org/10.1557/jmr.1999.0094openalex-snapshot
Relating mechanical testing and microstructural features of polysilicon thin films
inferredcites →https://doi.org/10.1557/jmr.2001.0305openalex-snapshot
Size effect on the mechanical properties of microfabricated polysilicon thin films
inferredcites →https://doi.org/10.1557/proc-518-57openalex-snapshot
Round-Robin Tests of Modulus and Strength of Polysilicou
inferredcites →https://doi.org/10.1557/proc-594-195openalex-snapshot
Wafer Scale Testing of MEMS Structural Films
inferredcites →https://doi.org/10.5772/7010openalex-snapshot
Mechanical Properties of MEMS Materials

What points at this work

Incoming claims: where this work appears in other papers’ reference lists and arguments.

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A Systematic Review of Reliability Issues in RF-MEMS Switches
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Экспериментальное определение механических свойств анодного элемента рентгеновского литографа
inferred← citeshttps://doi.org/10.2963/jjtp.34.109openalex-snapshot
Development of a Millimeter-Stroke Electrothermal Kirigami MEMS Actuator with Low Driving Power-Static and Dynamic Thermomechanical Characteristic of Film Bimorph-
inferred← citeshttps://doi.org/10.3103/s002565442205017xopenalex-snapshot
Study of the Mechanical Properties of Thin-Film Membranes Made of Oxide and Silicon Nitride
inferred← citeshttps://doi.org/10.3365/kjmm.2019.57.2.124openalex-snapshot
Investigation of the Mechanical/Thermal Properties of Nano-Scale Silicon Nitride Membranes
inferred← citeshttps://doi.org/10.3390/app131910673openalex-snapshot
Integrated Hybrid Tweezer for Particle Trapping with Combined Optical and Acoustic Forces
inferred← citeshttps://doi.org/10.3390/bios12121138openalex-snapshot
Microfluidic Liquid Cell with Silicon Nitride Super-Thin Membrane for Electron Microscopy of Samples in Liquid
inferred← citeshttps://doi.org/10.3390/mi11040362openalex-snapshot
Design and Fabrication of a Kirigami-Inspired Electrothermal MEMS Scanner with Large Displacement
inferred← citeshttps://doi.org/10.3390/mi8020031openalex-snapshot
MEMS Device for Quantitative In Situ Mechanical Testing in Electron Microscope
inferred← citeshttps://doi.org/10.3390/s21030783openalex-snapshot
Optimization of a Low-Power Chemoresistive Gas Sensor: Predictive Thermal Modelling and Mechanical Failure Analysis
inferred← citeshttps://doi.org/10.3390/s25030900openalex-snapshot
Analysis of Structural Design Variations in MEMS Capacitive Microphones
inferred← citeshttps://doi.org/10.3929/ethz-a-7355089openalex-snapshot
Active photonic crystal devices based on InP/InGaAsP/InP Slab waveguides: Theoretical considerations and fabrication
inferred← citeshttps://doi.org/10.3990/1.9789036554251openalex-snapshot
Fracture behavior and characterization of free-standing metal silicide thin films
inferred← citeshttps://doi.org/10.4995/thesis/10251/167055openalex-snapshot
Development of Photonic Devices Based on the Strained Silicon Technology
inferred← citeshttps://doi.org/10.70675/752cf2e7zaa6cz45b9zbcd3zf1e8d69bd0acopenalex-snapshot
Etude des interactions dans le système Cu/SnAg dans le cadre d'assemblages par TLPB des composants électroniques de puissance
inferred← citeshttps://doi.org/10.70675/f3429871z163az4213z9292zccb0b18068ebopenalex-snapshot
Characterization of the thermo-viscoplastic behavior of a reinforced thermoplastic subjected to in-plane biaxial loading : application to heat assisted incremental forming
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