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Mechanism of anisotropic etching on diamond (111) surfaces by a hydrogen plasma treatment

https://doi.org/10.1016/j.apsusc.2017.06.005

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What this work says

Outgoing claims: the papers this work cites, builds on, or argues with.

inferredcites →https://doi.org/10.1016/0167-5729(96)80002-1openalex-snapshot

The hydrogen surface chemistry of carbon as a plasma facing material

inferredcites →https://doi.org/10.1098/rsif.2006.0196openalex-snapshot

Diamond and biology

inferredcites →https://doi.org/10.1103/physrevb.52.11351openalex-snapshot

Scanning-tunneling-microscope observation of the homoepitaxial diamond (001) 2×1 reconstruction observed under atmospheric pressure

inferredcites →https://doi.org/10.1103/physrevb.78.045112openalex-snapshot

Persistent positive and transient absolute negative photoconductivity observed in diamond photodetectors

inferredcites →https://doi.org/10.1103/physrevlett.78.3713openalex-snapshot

Direct Observation of Hydrogen Etching Anisotropy on Diamond Single Crystal Surfaces

inferredcites →https://doi.org/10.1126/science.1060258openalex-snapshot

Ultraviolet Emission from a Diamond pn Junction

inferredcites →https://doi.org/10.1126/science.247.4943.688openalex-snapshot

Current Issues and Problems in the Chemical Vapor Deposition of Diamond

inferredcites →https://doi.org/10.1143/jjap.45.l1042openalex-snapshot

High-Efficiency Excitonic Emission with Deep-Ultraviolet Light from (001)-Oriented Diamond p–i–n Junction

inferredcites →https://doi.org/10.1143/jjap.51.090113openalex-snapshot

High-Voltage Vacuum Switch with a Diamond p–i–n Diode Using Negative Electron Affinity

inferredcites →https://doi.org/10.7567/apex.6.011302openalex-snapshot

1 Ω On-Resistance Diamond Vertical-Schottky Barrier Diode Operated at 250 °C

inferredcites →https://doi.org/10.7567/jjap.53.04eh04openalex-snapshot

Anisotropic lateral growth of homoepitaxial diamond (111) films by plasma-enhanced chemical vapor deposition

What points at this work

Incoming claims: where this work appears in other papers’ reference lists and arguments.

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inferred← citeshttps://doi.org/10.1002/9781119477099.ch14openalex-snapshot

Diamonds in the Sky

inferred← citeshttps://doi.org/10.1007/978-3-030-12469-4_1openalex-snapshot

Homoepitaxial Diamond Growth by Plasma-Enhanced Chemical Vapor Deposition

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Composite Rubber–Fluoropolymer Tube with Enhanced Interfacial Adhesion via Dielectric Barrier Discharge Induced Polymerization Surface Treatment

inferred← citeshttps://doi.org/10.1007/s11665-023-08149-0openalex-snapshot

Surface Morphology and Properties of Diamond Etched by MnO2 Powder

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Key technologies for device fabrications and materials characterizations

inferred← citeshttps://doi.org/10.1016/bs.semsem.2020.03.003openalex-snapshot

Step-edge growth and doping of diamond

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Formation of diamond trenches with flat {111} sidewalls via thermochemical etching by Ni films in water vapor

inferred← citeshttps://doi.org/10.1016/j.apsusc.2024.159589openalex-snapshot

Micro- to nano-scale topographical etching of diamond substrate via anisotropically atomic removal

inferred← citeshttps://doi.org/10.1016/j.apsusc.2024.160568openalex-snapshot

Formation of low-dimensional nanopit structures on atomically flat surfaces of diamond (111) by nickel nanoparticles

inferred← citeshttps://doi.org/10.1016/j.carbon.2026.121307openalex-snapshot

Selective homoepitaxial growth of buried diamond films with NV centers

inferred← citeshttps://doi.org/10.1016/j.carbon.2026.122099openalex-snapshot

Selective etching of atomically flat diamond (111) surfaces using H2+N2 plasma etching

inferred← citeshttps://doi.org/10.1016/j.diamond.2018.09.025openalex-snapshot

Dislocations in chemical vapor deposition (111) single crystal diamond observed by synchrotron X-ray topography and their relation with etch pits

inferred← citeshttps://doi.org/10.1016/j.diamond.2020.107713openalex-snapshot

Formation of U-shaped diamond trenches with vertical {111} sidewalls by anisotropic etching of diamond (110) surfaces

inferred← citeshttps://doi.org/10.1016/j.diamond.2021.108377openalex-snapshot

Correlation between electronic micro-roughness and surface topography in two-dimensional surface conducting hydrogen-terminated diamond

inferred← citeshttps://doi.org/10.1016/j.diamond.2022.108876openalex-snapshot

Morphological features and phase composition of W-containing coatings formed on diamond via its interaction with WO3

inferred← citeshttps://doi.org/10.1016/j.diamond.2024.110840openalex-snapshot

Highly efficient and atomic-scale smoothing of single crystal diamond through plasma-based atom-selective etching

inferred← citeshttps://doi.org/10.1016/j.diamond.2024.111443openalex-snapshot

Effect of etching time on the surface morphology of diamond etched by Sc2O3 powder and the exploration of anisotropic etching mechanism

inferred← citeshttps://doi.org/10.1016/j.diamond.2025.113045openalex-snapshot

Effects of nitrogen addition on hydrogen plasma etching of diamond

inferred← citeshttps://doi.org/10.1016/j.diamond.2026.113551openalex-snapshot

Hydrogen-terminated diamond 2DHG: Formation mechanisms, interface engineering, and device applications—A review

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Nonthermal plasma surface modification of fluoropolymer plastic films: A review (invited paper)

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Formation mechanism of friction-induced directional tree-like microcracks in single-crystal diamond

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Towards nanometer-scale surface roughness in plasma polishing of polycrystalline diamond via modulating graphitization and oxidative etching

inferred← citeshttps://doi.org/10.1016/j.jmatprotec.2024.118578openalex-snapshot

A highly efficient semi-finishing approach for polycrystalline diamond film via plasma-based anisotropic etching

inferred← citeshttps://doi.org/10.1021/acsami.4c13454openalex-snapshot

Selective Plasma Treatment Endowing Low-Friction and Wear-Resistant Surface of Polycrystalline Diamond against Copper

inferred← citeshttps://doi.org/10.1063/1.5027198openalex-snapshot

Influence of surface crystal-orientation on transfer doping of V2O5/H-terminated diamond

inferred← citeshttps://doi.org/10.1063/1.5100328openalex-snapshot

Inversion channel mobility and interface state density of diamond MOSFET using N-type body with various phosphorus concentrations

inferred← citeshttps://doi.org/10.1063/5.0090715openalex-snapshot

Orientation dependent etching of polycrystalline diamond by hydrogen plasma

inferred← citeshttps://doi.org/10.1063/5.0333202openalex-snapshot

Interface charge inhomogeneity at Al2O3/OH-diamond (111) characterized by time-resolved scanning nonlinear dielectric microscopy

inferred← citeshttps://doi.org/10.1088/2053-1591/aaec5eopenalex-snapshot

Characterization of textured Cr2O3 layer formed on AISI440A stainless steel via anisotropic electropolishing for electrosurgical instruments

inferred← citeshttps://doi.org/10.1116/1.5131343openalex-snapshot

Plasma etching of wide bandgap and ultrawide bandgap semiconductors

inferred← citeshttps://doi.org/10.11618/adhesion.57.280openalex-snapshot

Adhesive Polytetrafluoroethylene Films Fabricated Via AtmosphericNonthermal Plasma Graft Polymerization

inferred← citeshttps://doi.org/10.3390/chemistry5030123openalex-snapshot

Porous Natural Diamond with Embedded Metal (Pt0.50–Co0.50)

inferred← citeshttps://doi.org/10.3390/cryst11111341openalex-snapshot

Surface Porosity of Natural Diamond Crystals after the Catalytic Hydrogenation

inferred← citeshttps://doi.org/10.4028/p-n0z51topenalex-snapshot

Microscopic Evaluation of Al2O3/p-Type Diamond (111) Interfaces Using Scanning Nonlinear Dielectric Microscopy

inferred← citeshttps://doi.org/10.7567/1347-4065/ab1b5copenalex-snapshot

Conductive-probe atomic force microscopy and Kelvin-probe force microscopy characterization of OH-terminated diamond (111) surfaces with step-terrace structures

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