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Squeeze film air damping in MEMS
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Outgoing claims: the papers this work cites, builds on, or argues with.
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Scientific foundations of vacuum technique
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The theory of oscillating-vane vacuum gauges
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Accelerometer systems with self-testable features
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The application of fine-grained, tensile polysilicon to mechanicaly resonant transducers
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Characteristics of polysilicon resonant microbeams
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A comparison of squeeze-film theory with measurements on a microstructure
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Equivalent-circuit model of the squeezed gas film in a silicon accelerometer
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Analysis and Design Principles of MEMS Devices
inferredcites →https://doi.org/10.1016/j.sna.2003.10.080openalex-snapshot
Accurate system-level damping model for highly perforated micromechanical devices
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Viscous damping of perforated planar micromechanical structures
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Microfluidic system modeling using VHDL-AMS and circuit simulation
inferredcites →https://doi.org/10.1016/s0924-4247(01)00840-8openalex-snapshot
Physically based modeling of squeeze film damping by mixed-level system simulation
inferredcites →https://doi.org/10.1016/s0924-4247(02)00273-xopenalex-snapshot
Modeling air-damping effect in a bulk micromachined 2D tilt mirror
inferredcites →https://doi.org/10.1016/s0924-4247(03)00263-2openalex-snapshot
Squeeze-film air damping of thick hole-plate
inferredcites →https://doi.org/10.1016/s0924-4247(97)01731-7openalex-snapshot
Silicon mirrors and micromirror arrays for spatial laser beam modulation
inferredcites →https://doi.org/10.1016/s0924-4247(98)00109-5openalex-snapshot
Compact analytical modeling of squeeze film damping with arbitrary venting conditions using a Green's function approach
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The theoretical analysis on damping characteristics of resonant microbeam in vacuum
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Micro Mechanical Transducers - Pressure Sensors, Accelerometers and Gyroscopes
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Mass flow and tangential momentum accommodation in silicon micromachined channels
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A FINITE-VOLUME METHOD FOR FLUID FLOW SIMULATIONS WITH MOVING BOUNDARIES
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Energy transfer model for squeeze-film air damping in low vacuum
inferredcites →https://doi.org/10.1088/0960-1317/13/6/301openalex-snapshot
Modified Reynolds equation and analytical analysis of squeeze-film air damping of perforated structures
inferredcites →https://doi.org/10.1088/0960-1317/14/12/018openalex-snapshot
On the squeeze-film damping of micro-resonators in the free-molecule regime
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Extending the validity of squeezed-film damper models with elongations of surface dimensions
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Damping of a micro-resonator torsion mirror in rarefied gas ambient
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Squeeze-film air damping of a torsion mirror at a finite tilting angle
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Squeeze film damping effect on the dynamic response of a MEMS torsion mirror
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Mechanical-thermal noise in micromachined acoustic and vibration sensors
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Proceedings of IEEE Sensors 2004
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Design and simulation of miniature vibrating electric field sensors
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The 14th International Conference on Solid-State Sensors and Actuators
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Fluid effects in vibrating micromachined structures
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19th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2006)
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Simulation of gas damping in microstructures with nontrivial geometries
inferredcites →https://doi.org/10.1109/memsys.1999.746841openalex-snapshot
Effect of holes and edges on the squeeze film damping of perforated micromechanical structures
inferredcites →https://doi.org/10.1109/memsys.2001.906554openalex-snapshot
Modeling gas damping and spring phenomena in MEMS with frequency dependent macro-models
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Calculation Ofthe Quality Factor Of Torsional Resonators In The Low-pressure Region
inferredcites →https://doi.org/10.1109/sensor.1997.635358openalex-snapshot
Electro-fluidic microsystem modeling based on Kirchhoffian network theory
inferredcites →https://doi.org/10.1109/solsen.1990.109817openalex-snapshot
Squeeze-film damping in solid-state accelerometers
inferredcites →https://doi.org/10.1115/1.2921004openalex-snapshot
Modified Reynolds Equation for Ultra-Thin Film Gas Lubrication Using 1.5-Order Slip-Flow Model and Considering Surface Accommodation Coefficient
inferredcites →https://doi.org/10.1115/1.3261594openalex-snapshot
Analysis of Ultra-Thin Gas Film Lubrication Based on Linearized Boltzmann Equation: First Report—Derivation of a Generalized Lubrication Equation Including Thermal Creep Flow
inferredcites →https://doi.org/10.1115/1.3438789openalex-snapshot
Squeeze Film Dampers: Amplitude Effects at Low Squeeze Numbers
inferredcites →https://doi.org/10.1115/1.3645878openalex-snapshot
A Study of Fluid Squeeze-Film Damping
inferredcites →https://doi.org/10.1115/1.4008375openalex-snapshot
The Influence of the Molecular Mean Free Path on the Performance of Hydrodynamic Gas Lubricated Bearings
inferredcites →https://doi.org/10.1117/12.284486openalex-snapshot
Micromechanical structures and microelectronics for acceleration sensing
inferredcites →https://doi.org/10.1117/12.395618openalex-snapshot
Review of viscous damping in micromachined structures
inferredcites →https://doi.org/10.1126/science.161.3848.1320openalex-snapshot
Miniaturization of Tuning Forks
inferredcites →https://doi.org/10.5555/266388.266423openalex-snapshot
PRIMA: passive reduced-order interconnect macromodeling algorithm
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Dynamical characteristics of an electrically actuated microbeam under the effects of squeeze-film and thermoelastic damping
inferred← citeshttps://doi.org/10.1016/j.ijleo.2014.07.144openalex-snapshot
Entropy generation analysis of squeeze film air damping in torsional micromirrors
inferred← citeshttps://doi.org/10.1016/j.ijleo.2016.10.018openalex-snapshot
Dynamic pull-in stability of torsional nano/micromirrors with size-dependency, squeeze film damping and van der Waals effect
inferred← citeshttps://doi.org/10.1016/j.ijmecsci.2021.106484openalex-snapshot
A Novel Lamé Mode RF-MEMS resonator with high quality factor
inferred← citeshttps://doi.org/10.1016/j.ijnonlinmec.2019.103386openalex-snapshot
Non-linear mechanics in resonant inertial micro sensors
inferred← citeshttps://doi.org/10.1016/j.ijnonlinmec.2020.103415openalex-snapshot
Nonlinear dynamics of electrostatically actuated micro-pumps with thermal effects and filled fluids
inferred← citeshttps://doi.org/10.1016/j.ijnonlinmec.2021.103719openalex-snapshot
Frequency–amplitude response of superharmonic resonance of second order of electrostatically actuated MEMS cantilever resonators
inferred← citeshttps://doi.org/10.1016/j.ijnonlinmec.2022.104310openalex-snapshot
Amplitude–frequency response of parametric resonance of electrostatically actuated MEMS clamped circular plate
inferred← citeshttps://doi.org/10.1016/j.ijrefrig.2010.04.004openalex-snapshot
Dynamic analysis of an electrostatic compressor
inferred← citeshttps://doi.org/10.1016/j.isatra.2011.11.002openalex-snapshot
A frequency independent approximation and a sliding mode control scheme for a system of a micro-cantilever beam
inferred← citeshttps://doi.org/10.1016/j.jde.2023.11.028openalex-snapshot
Wellposedness of a nonlinear parabolic-dispersive coupled system modelling MEMS
inferred← citeshttps://doi.org/10.1016/j.jsv.2010.05.008openalex-snapshot
Analytical modeling of squeeze film damping for rectangular elastic plates using Green's functions
inferred← citeshttps://doi.org/10.1016/j.jsv.2014.07.004openalex-snapshot
Modeling of an air-backed diaphragm in dynamic pressure sensors: Effects of the air cavity
inferred← citeshttps://doi.org/10.1016/j.jsv.2015.03.042openalex-snapshot
Uncertainty quantification analysis of the dynamics of an electrostatically actuated microelectromechanical switch model
inferred← citeshttps://doi.org/10.1016/j.jsv.2015.05.020openalex-snapshot
On the slow dynamics of near-field acoustically levitated objects under High excitation frequencies
inferred← citeshttps://doi.org/10.1016/j.jsv.2020.115720openalex-snapshot
Influence of squeeze film damping on quality factor in tapping mode atomic force microscope
inferred← citeshttps://doi.org/10.1016/j.jsv.2025.119484openalex-snapshot
Dynamic stability and self-excited mechanism of a plate supported by pressure of air supplied from holes
inferred← citeshttps://doi.org/10.1016/j.measurement.2013.05.013openalex-snapshot
A simple analytical design approach based on computer aided analysis of bulk micromachined piezoresistive MEMS accelerometer for concrete SHM applications
inferred← citeshttps://doi.org/10.1016/j.measurement.2024.116491openalex-snapshot
Online vibration noise decoupling in atomic force microscopy via a squeeze film damping vibration sensor
inferred← citeshttps://doi.org/10.1016/j.mechatronics.2012.10.010openalex-snapshot
Design of a robust controller and modeling aspects of a micro cantilever beam with fringing and squeezed gas film damping effects
inferred← citeshttps://doi.org/10.1016/j.mechatronics.2021.102685openalex-snapshot
An electrostatically suspended contactless platform
inferred← citeshttps://doi.org/10.1016/j.mechatronics.2024.103271openalex-snapshot
Three degree-of-freedom control of an electrostatically suspended disk
inferred← citeshttps://doi.org/10.1016/j.mee.2012.10.004openalex-snapshot
Effect of air damping on quality factor of bulk mode microresonators
inferred← citeshttps://doi.org/10.1016/j.mee.2012.12.014openalex-snapshot
A 2D MEMS grating based CMOS compatible poly-SiGe variable optical attenuator
inferred← citeshttps://doi.org/10.1016/j.mee.2018.12.004openalex-snapshot
Fabrication of MEMS-based capacitive silicon microphone structure with staircase contour cavity using multi-film thickness mask
inferred← citeshttps://doi.org/10.1016/j.mejo.2010.04.002openalex-snapshot
A dynamic collision model for improved over-range protection of cantilever-mass micromechanical accelerometers
inferred← citeshttps://doi.org/10.1016/j.mejo.2012.05.006openalex-snapshot
The influence of vertical deflection of the supports in modeling squeeze film damping in torsional micromirrors
inferred← citeshttps://doi.org/10.1016/j.mejo.2020.104770openalex-snapshot
Electrical equivalent modeling of MEMS differential capacitive accelerometer
inferred← citeshttps://doi.org/10.1016/j.micrna.2025.208539openalex-snapshot
Beyond planar: A vertical sense mass approach to overcome damping challenge in MEMS gyroscope
inferred← citeshttps://doi.org/10.1016/j.microrel.2011.04.014openalex-snapshot
Life prediction of LED-based recess downlight cooled by synthetic jet
inferred← citeshttps://doi.org/10.1016/j.microrel.2014.02.020openalex-snapshot
Geometry optimization of a Lorentz force, resonating MEMS magnetometer
inferred← citeshttps://doi.org/10.1016/j.mtcomm.2026.116128openalex-snapshot
Material modelling and dynamic analysis of functionally graded-MEMS accelerometer subjected to thermal shock loads
inferred← citeshttps://doi.org/10.1016/j.nanoen.2017.02.036openalex-snapshot
Self-powered triboelectric nano vibration accelerometer based wireless sensor system for railway state health monitoring
inferred← citeshttps://doi.org/10.1016/j.nantod.2020.100932openalex-snapshot
An in-situ TEM microreactor for real-time nanomorphology & physicochemical parameters interrelated characterization
inferred← citeshttps://doi.org/10.1016/j.nucengdes.2026.115154openalex-snapshot
Seismic analysis of TMSR graphite core with viscous damping
inferred← citeshttps://doi.org/10.1016/j.physd.2025.134887openalex-snapshot
Nonlinear dynamics of periodic solutions in electrostatic MEMS: Theory and numerical bifurcation analysis
inferred← citeshttps://doi.org/10.1016/j.physe.2011.05.004openalex-snapshot
Molecular dynamics simulation of squeeze-film damping effect on nano resonators in the free molecular regime
inferred← citeshttps://doi.org/10.1016/j.physleta.2017.05.046openalex-snapshot
Evidence for structural damping in a high-stress silicon nitride nanobeam and its implications for quantum optomechanics
inferred← citeshttps://doi.org/10.1016/j.physrep.2013.09.003openalex-snapshot
Dissipation in nanoelectromechanical systems
inferred← citeshttps://doi.org/10.1016/j.pquantelec.2025.100565openalex-snapshot
Recent advances in high-performance millimeter-Wave acoustic resonators and filters using thin-film lithium niobate
inferred← citeshttps://doi.org/10.1016/j.precisioneng.2018.01.006openalex-snapshot
Experimental and theoretical study of dynamic characteristics of Bernoulli gripper
inferred← citeshttps://doi.org/10.1016/j.proeng.2011.12.045openalex-snapshot
Reliability Aspects of Capacitive MEMS Devices
inferred← citeshttps://doi.org/10.1016/j.proeng.2014.11.279openalex-snapshot
Investigation of the Effects of Hydrodynamic and Parasitic Electrostatic Forces on the Dynamics of a High Aspect Ratio MEMS Accelerometer
inferred← citeshttps://doi.org/10.1016/j.proeng.2016.05.108openalex-snapshot
Effect of Squeeze Film Damping and AC Actuation Voltage on Pull-in Phenomenon of Electrostatically Actuated Microswitch
inferred← citeshttps://doi.org/10.1016/j.proeng.2016.11.310openalex-snapshot
An Accurate Analytical Squeeze-film Model for Lateral MEMS/MOEMS Oscillators
inferred← citeshttps://doi.org/10.1016/j.sna.2009.03.025openalex-snapshot
Squeeze film damping in the free molecular flow regime with full thermal accommodation
inferred← citeshttps://doi.org/10.1016/j.sna.2011.08.021openalex-snapshot
Influences of perforation ratio in characteristics of capacitive micromachined ultrasonic transducers in air
inferred← citeshttps://doi.org/10.1016/j.sna.2012.03.034openalex-snapshot
Static and dynamic characterization of pull-in protected CMOS compatible poly-SiGe grating light valves
inferred← citeshttps://doi.org/10.1016/j.sna.2012.05.010openalex-snapshot
Multi stage noise shaping sigma–delta modulator (MASH) for capacitive MEMS accelerometers
inferred← citeshttps://doi.org/10.1016/j.sna.2012.09.020openalex-snapshot
Temperature and humidity effects on the quality factor of a silicon lateral rotary micro-resonator in atmospheric air
inferred← citeshttps://doi.org/10.1016/j.sna.2013.01.028openalex-snapshot
A virtually floating dual-mass accelerometer
inferred← citeshttps://doi.org/10.1016/j.sna.2013.02.011openalex-snapshot
Mitigation of MEMS switch contact bouncing: Effectiveness of dual pulse actuation waveforms and robustness against variations in switch and waveform parameters
inferred← citeshttps://doi.org/10.1016/j.sna.2013.04.032openalex-snapshot
Measurement of the temperature coefficient of Young's modulus of single crystal silicon and 3C silicon carbide below 273 K using micro-cantilevers
inferred← citeshttps://doi.org/10.1016/j.sna.2013.11.025openalex-snapshot
An electromagnetically actuated micromirror with precise angle control for harsh environment optical switching applications
inferred← citeshttps://doi.org/10.1016/j.sna.2014.05.014openalex-snapshot
Performance optimization of high order RF microresonators in the presence of squeezed film damping
inferred← citeshttps://doi.org/10.1016/j.sna.2014.06.008openalex-snapshot
Accurate modeling of air shear damping of a silicon lateral rotary micro-resonator for MEMS environmental monitoring applications
inferred← citeshttps://doi.org/10.1016/j.sna.2014.12.029openalex-snapshot
Dynamic modeling of a bidirectional magnetoelastic rotary micro-motor
inferred← citeshttps://doi.org/10.1016/j.sna.2015.04.004openalex-snapshot
Viscous damping on flexural mechanical resonators
inferred← citeshttps://doi.org/10.1016/j.sna.2015.09.005openalex-snapshot
Vacuum behavior and control of a MEMS stage with integrated thermal displacement sensor
inferred← citeshttps://doi.org/10.1016/j.sna.2015.11.005openalex-snapshot
Air damping as design feature in lateral oscillators
inferred← citeshttps://doi.org/10.1016/j.sna.2016.12.023openalex-snapshot
Accurate analytical model for air damping in lateral MEMS/MOEMS oscillators
inferred← citeshttps://doi.org/10.1016/j.sna.2017.01.017openalex-snapshot
A stainless-steel-based implantable pressure sensor chip and its integration by microwelding
inferred← citeshttps://doi.org/10.1016/j.sna.2017.09.003openalex-snapshot
Squeeze film damping and stiffening in circular CMUT with air-filled cavity: Influence of the lateral venting boundary conditions and the bias voltage
inferred← citeshttps://doi.org/10.1016/j.sna.2017.11.043openalex-snapshot
A mems variable optical attenuator based on a vertical comb drive with self-elevated stators
inferred← citeshttps://doi.org/10.1016/j.sna.2018.08.039openalex-snapshot
Reducing ring-down time of pMUTs with phase shift of driving waveform
inferred← citeshttps://doi.org/10.1016/j.sna.2019.111530openalex-snapshot
Analytical solution of squeeze film and thermoelastic damping in bulk resonators
inferred← citeshttps://doi.org/10.1016/j.sna.2019.111588openalex-snapshot
Squeeze film pressure sensors based on SiN membrane sandwiches
inferred← citeshttps://doi.org/10.1016/j.sna.2020.112068openalex-snapshot
Modeling the damping mechanism of MEMS oscillators in the transitional flow regime with thermal waves
inferred← citeshttps://doi.org/10.1016/j.sna.2020.112175openalex-snapshot
A novel MEMS triboelectric energy harvester and sensor with a high vibrational operating frequency and wide bandwidth fabricated using UV-LIGA technique
inferred← citeshttps://doi.org/10.1016/j.sna.2020.112201openalex-snapshot
Computationally efficient model for viscous damping in perforated MEMS structures
inferred← citeshttps://doi.org/10.1016/j.sna.2021.112997openalex-snapshot
Linear harmonic oscillatory rarefied gas flow with arbitrary frequency in comb finger blocks
inferred← citeshttps://doi.org/10.1016/j.sna.2022.113614openalex-snapshot
Thermal resonance model for micro-oscillators in the vicinity of a geometric boundary
inferred← citeshttps://doi.org/10.1016/j.sna.2022.113813openalex-snapshot
Proof of concept of an air-coupled electrostatic ultrasonic transducer based on lateral motion
inferred← citeshttps://doi.org/10.1016/j.sna.2023.114166openalex-snapshot
Understanding Compound Effect of Shear and Squeeze-Film Dissipation in a Silicon Lateral Micro-Resonator for Mems-Based Environmental Monitoring Applications
inferred← citeshttps://doi.org/10.1016/j.sna.2024.115450openalex-snapshot
Squeeze film absolute pressure sensors with sub-millipascal sensitivity
inferred← citeshttps://doi.org/10.1016/j.sna.2024.115584openalex-snapshot
Quantifying squeeze film damping in four-leaf clover-coupled micro-resonators: A comprehensive study under variable vacuum degrees
inferred← citeshttps://doi.org/10.1016/j.sna.2024.115764openalex-snapshot
Tilt effect on squeeze-film damping in electrostatic micro-actuators
inferred← citeshttps://doi.org/10.1016/j.sna.2024.115822openalex-snapshot
A coupled-mode analysis of mode localization on weakly-coupled silicon micromechanical resonators with damping
inferred← citeshttps://doi.org/10.1016/j.sna.2026.117583openalex-snapshot
Structure–damping co-optimization of a Z-axis MEMS accelerometer with μP-scaling gas damping and optimized low-pressure packaging
inferred← citeshttps://doi.org/10.1016/j.sna.2026.118164openalex-snapshot
Piezoelectric MEMS speakers: Structural evolution and systematic methodology from acoustic short circuit suppression to high-performance design
inferred← citeshttps://doi.org/10.1016/j.snb.2015.07.085openalex-snapshot
An analytical model for the resonance frequency of square perforated Lamé-mode resonators
inferred← citeshttps://doi.org/10.1016/j.snb.2016.05.110openalex-snapshot
Stochastic resonance in MEMS capacitive sensors
inferred← citeshttps://doi.org/10.1016/j.snb.2021.131070openalex-snapshot
A silicon micromechanical resonator with capacitive transduction for enhanced photoacoustic spectroscopy
inferred← citeshttps://doi.org/10.1016/j.snr.2025.100319openalex-snapshot
Meander-shaped piezoelectric MEMS loudspeaker with maximized area efficiency for in-ear applications
inferred← citeshttps://doi.org/10.1016/j.sse.2015.02.004openalex-snapshot
Mechanical characterization and modelling of Lorentz force based MEMS magnetic field sensors
inferred← citeshttps://doi.org/10.1016/j.sse.2017.02.010openalex-snapshot
Modelling of resonant MEMS magnetic field sensor with electromagnetic induction sensing
inferred← citeshttps://doi.org/10.1016/j.supflu.2013.06.013openalex-snapshot
Frequency response of microcantilevers immersed in gaseous, liquid, and supercritical carbon dioxide
inferred← citeshttps://doi.org/10.1016/j.triboint.2010.10.001openalex-snapshot
An investigation of the damping effects of various gas environments on a vibratory MEMS device
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