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https://doi.org/10.2139/ssrn.4686136

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inferredcites →https://doi.org/10.1016/0042-207x(66)91162-6openalex-extracted
The theory of oscillating-vane vacuum gauges
inferredcites →https://doi.org/10.1016/0924-4247(91)87072-bopenalex-extracted
Q-factor and frequency shift of resonating silicon diaphragms in air
inferredcites →https://doi.org/10.1016/0924-4247(93)80144-6openalex-extracted
A comparison of squeeze-film theory with measurements on a microstructure
inferredcites →https://doi.org/10.1016/j.proeng.2014.11.326openalex-extracted
Optimization of Passive Air Damping of MOEMS Vibration Sensors
inferredcites →https://doi.org/10.1016/j.sna.2007.01.008openalex-extracted
Squeeze film air damping in MEMS
inferredcites →https://doi.org/10.1016/j.sna.2009.03.025openalex-extracted
Squeeze film damping in the free molecular flow regime with full thermal accommodation
inferredcites →https://doi.org/10.1016/j.sna.2011.12.039openalex-extracted
Dual-mode device for in situ testing of MEMS packaging quality
inferredcites →https://doi.org/10.1016/j.sna.2019.111588openalex-extracted
Squeeze film pressure sensors based on SiN membrane sandwiches
inferredcites →https://doi.org/10.1021/acs.nanolett.5b04251openalex-extracted
Graphene Squeeze-Film Pressure Sensors
inferredcites →https://doi.org/10.1021/acsami.2c09865openalex-extracted
Nano-optomechanical Resonators for Sensitive Pressure Sensing
inferredcites →https://doi.org/10.1021/acsphotonics.3c01488openalex-extracted
Self-Calibrating Gas Pressure Sensor with a 10-Decade Measurement Range
inferredcites →https://doi.org/10.1021/acsphotonics.8b01519openalex-extracted
Swept-Frequency Drumhead Optomechanical Resonators
inferredcites →https://doi.org/10.1038/s41378-020-00212-3openalex-extracted
Sensitive capacitive pressure sensors based on graphene membrane arrays
inferredcites →https://doi.org/10.1063/1.3141731openalex-extracted
Pressure dependent resonant frequency of micromechanical drumhead resonators
inferredcites →https://doi.org/10.1063/1.5004261openalex-extracted
Effects of pressure on suspended micromechanical membrane arrays
inferredcites →https://doi.org/10.1063/1.5108788openalex-extracted
Electromechanics in vertically coupled nanomembranes
inferredcites →https://doi.org/10.1063/5.0011795openalex-extracted
Membrane sandwich squeeze film pressure sensors
inferredcites →https://doi.org/10.1063/5.0093016openalex-extracted
Mechanical investigations of free-standing SiN membranes patterned with one-dimensional photonic crystal structures
inferredcites →https://doi.org/10.1088/0960-1317/15/1/025openalex-extracted
Dynamics and squeeze film gas damping of a capacitive RF MEMS switch
inferredcites →https://doi.org/10.1088/0960-1317/19/7/074021openalex-extracted
Squeezed film damping measurements on a parallel-plate MEMS in the free molecule regime
inferredcites →https://doi.org/10.1088/0960-1317/25/4/045011openalex-extracted
MEMS oscillating squeeze-film pressure sensor with optoelectronic feedback
inferredcites →https://doi.org/10.1103/physrevapplied.19.044005openalex-extracted
Experimental Verification of and Physical Interpretation for Adsorption-Dependent Squeeze-Film Damping
inferredcites →https://doi.org/10.1109/memsys.2001.906506openalex-extracted
An ultra-sensitive, high-vacuum absolute capacitive pressure sensor
inferredcites →https://doi.org/10.1109/sensor.2009.5285840openalex-extracted
Squeezed film damping measurements on a parallel-plate MEMS in the free molecule regime
inferredcites →https://doi.org/10.1364/ao.438942openalex-extracted
Pressure sensing with high-finesse monolithic buckled-dome microcavities
inferredcites →https://doi.org/10.1364/oe.416801openalex-extracted
Optical spatial differentiation with suspended subwavelength gratings
inferredcites →https://doi.org/10.1364/ol.42.001341openalex-extracted
Optomechanical characterization of silicon nitride membrane arrays
inferredcites →https://doi.org/10.3390/app9224845openalex-extracted
Stress-Controlled Frequency Tuning and Parametric Amplification of the Vibrations of Coupled Nanomembranes
inferredcites →https://doi.org/10.5281/zenodo.4042076openalex-extracted
Sensitive capacitive pressure sensors based on graphene membrane arrays
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