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Wet etching rates of InGaZnO for the fabrication of transparent thin-film transistors on plastic substrates
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What this work says
Outgoing claims: the papers this work cites, builds on, or argues with.
inferredcites →https://doi.org/10.1002/adma.200602223openalex-snapshot
Inorganic Semiconductors for Flexible Electronics
inferredcites →https://doi.org/10.1002/pssa.200778909openalex-snapshot
Zn–In–O based thin‐film transistors: Compositional dependence
inferredcites →https://doi.org/10.1002/pssa.200778910openalex-snapshot
Amorphous oxide TFT and their applications in electrophoretic displays
inferredcites →https://doi.org/10.1016/j.jnoncrysol.2007.10.105openalex-snapshot
Processing effects on the stability of amorphous indium gallium zinc oxide thin-film transistors
inferredcites →https://doi.org/10.1016/j.matchemphys.2003.11.021openalex-snapshot
The effect of solvent on the etching of ITO electrode
inferredcites →https://doi.org/10.1016/j.sse.2006.02.004openalex-snapshot
Transparent ring oscillator based on indium gallium oxide thin-film transistors
inferredcites →https://doi.org/10.1016/j.tsf.2007.03.161openalex-snapshot
Amorphous oxide channel TFTs
inferredcites →https://doi.org/10.1016/j.tsf.2008.04.063openalex-snapshot
Transparent thin-film transistors with zinc oxide semiconductor fabricated by reactive sputtering using metallic zinc target
inferredcites →https://doi.org/10.1021/la015543gopenalex-snapshot
Patterning Indium Tin Oxide and Indium Zinc Oxide Using Microcontact Printing and Wet Etching
inferredcites →https://doi.org/10.1063/1.2353811openalex-snapshot
High-mobility thin-film transistor with amorphous InGaZnO4 channel fabricated by room temperature rf-magnetron sputtering
inferredcites →https://doi.org/10.1063/1.2742790openalex-snapshot
High mobility bottom gate InGaZnO thin film transistors with SiOx etch stopper
inferredcites →https://doi.org/10.1063/1.3013842openalex-snapshot
Modeling of amorphous InGaZnO thin-film transistors based on the density of states extracted from the optical response of capacitance-voltage characteristics
inferredcites →https://doi.org/10.1063/1.3112566openalex-snapshot
Amorphous In–Ga–Zn–O coplanar homojunction thin-film transistor
inferredcites →https://doi.org/10.1088/0268-1242/24/1/015013openalex-snapshot
Charge trapping and detrapping characteristics in amorphous InGaZnO TFTs under static and dynamic stresses
inferredcites →https://doi.org/10.1116/1.1692270openalex-snapshot
Properties of indium zinc oxide thin films on heat withstanding plastic substrate
inferredcites →https://doi.org/10.1116/1.2366569openalex-snapshot
Thin-film transistors with amorphous indium gallium oxide channel layers
inferredcites →https://doi.org/10.1143/jjap.43.745openalex-snapshot
Optimization and Properties of Zn Doped Indium Oxide Films on Plastic Substrate
inferredcites →https://doi.org/10.1149/1.2069228openalex-snapshot
Reductive Corrosion of ITO in Contact with Al in Alkaline Solutions
inferredcites →https://doi.org/10.1149/1.2135221openalex-snapshot
Organic Acid Mixing to Improve ITO Film Etching in Flat Panel Display Manufacturing
inferredcites →https://doi.org/10.1149/1.2221071openalex-snapshot
On the Mechanism of ITO Etching: The Specificity of Halogen Acids
inferredcites →https://doi.org/10.1149/1.2903294openalex-snapshot
High-Performance Indium Gallium Zinc Oxide Transparent Thin-Film Transistors Fabricated by Radio-Frequency Sputtering
What points at this work
Incoming claims: where this work appears in other papers’ reference lists and arguments.
inferred← citeshttps://doi.org/10.2139/ssrn.4657934openalex-extracted
Improvement of Electrical and Wet-Etching Characteristics for Ingatio Electrodes in Organic Light-Emitting Diodes Through Hydrogen Doping
inferred← citeshttps://doi.org/10.1002/adma.201502159openalex-snapshot
Room Temperature Oxide Deposition Approach to Fully Transparent, All‐Oxide Thin‐Film Transistors
inferred← citeshttps://doi.org/10.1002/aelm.201400024openalex-snapshot
High‐Performance Solution‐Processed Amorphous‐Oxide‐Semiconductor TFTs with Organic Polymeric Gate Dielectrics
inferred← citeshttps://doi.org/10.1002/j.2168-0159.2013.tb06292.xopenalex-snapshot
46.3: Development of Source/Drain Electrodes for Amorphous Indium Gallium Zinc Oxide Thin Film Transistors
inferred← citeshttps://doi.org/10.1002/jsid.208openalex-snapshot
Process development of inverted‐staggered amorphous InGaZnO thin‐film transistors with wet‐etched electrodes
inferred← citeshttps://doi.org/10.1002/sdtp.10859openalex-snapshot
P‐13: Influence of Oxide Thinning by Selective Etching Process on Solution Processed Indium Zinc Oxide Thin Film Transistor
inferred← citeshttps://doi.org/10.1002/sdtp.14627openalex-snapshot
11‐2: Technology Developments in High‐Resolution FMM‐free OLED and BEOL IGZO TFTs for Power‐Efficient Microdisplays
inferred← citeshttps://doi.org/10.1007/s11741-011-0730-1openalex-snapshot
Effect of annealing on wet etch of amorphous IGZO thin film
inferred← citeshttps://doi.org/10.1016/b978-0-443-26554-9.00009-2openalex-snapshot
Metal oxide-based thin-film transistors (IGZO)
inferred← citeshttps://doi.org/10.1016/j.cap.2015.02.017openalex-snapshot
The effect of annealing in forming gas on the a-IGZO thin film transistor performance and valence band cut-off of IGZO on SiNx
inferred← citeshttps://doi.org/10.1016/j.ceja.2025.101016openalex-snapshot
Understanding of indium-gallium-zinc oxide wet etching in acidic solutions: Reaction mechanism, kinetics, and surface properties
inferred← citeshttps://doi.org/10.1016/j.jallcom.2024.174106openalex-snapshot
Improvement of electrical characteristics and wet etching procedures for InGaTiO electrodes in organic light-emitting diodes through hydrogen doping
inferred← citeshttps://doi.org/10.1016/j.mee.2012.02.003openalex-snapshot
Laser ablation of amorphous indium gallium zinc oxide films deposited by different RF powers
inferred← citeshttps://doi.org/10.1016/j.mee.2013.06.005openalex-snapshot
Surface reaction effects on dry etching of IGZO thin films in N2/BCl3/Ar plasma
inferred← citeshttps://doi.org/10.1016/j.tsf.2013.05.031openalex-snapshot
Comparison of chlorine- and fluorine-based inductively coupled plasmas for dry etching of InGaZnO4 films
inferred← citeshttps://doi.org/10.1016/j.tsf.2014.07.027openalex-snapshot
Study of wet etching thin films of indium tin oxide in oxalic acid by monitoring the resistance
inferred← citeshttps://doi.org/10.1016/j.tsf.2015.03.054openalex-snapshot
High-density plasma etching characteristics of indium–gallium–zinc oxide thin films in CF4/Ar plasma
inferred← citeshttps://doi.org/10.1021/acs.jpcc.5c05730openalex-snapshot
Thermal Atomic Layer Etching of Indium Gallium Zinc Oxide (IGZO), In 2 O 3 , Ga 2 O 3 , and ZnO Using Sequential Hydrogen Fluoride and Acetylacetone Exposures
inferred← citeshttps://doi.org/10.1021/acsami.7b06643openalex-snapshot
Silicon Cations Intermixed Indium Zinc Oxide Interface for High-Performance Thin-Film Transistors Using a Solution Process
inferred← citeshttps://doi.org/10.1039/c1cs15065kopenalex-snapshot
Solution processing of transparent conductors: from flask to film
inferred← citeshttps://doi.org/10.1039/c3tc31944jopenalex-snapshot
In–Ga–Zn oxide nanoparticles acting as an oxide semiconductor material synthesized via a coprecipitation-based method
inferred← citeshttps://doi.org/10.1039/c6ra09684kopenalex-snapshot
Chemically robust solution-processed indium zinc oxide thin film transistors fabricated by back channel wet-etched Mo electrodes
inferred← citeshttps://doi.org/10.1039/c8ra07246aopenalex-snapshot
Controlled size reduction of rare earth doped nanoparticles for optical quantum technologies
inferred← citeshttps://doi.org/10.1063/1.3624594openalex-snapshot
High rate dry etching of InGaZnO by BCl3/O2 plasma
inferred← citeshttps://doi.org/10.1088/0268-1242/29/3/035003openalex-snapshot
High performance, transparent a-IGZO TFTs on a flexible thin glass substrate
inferred← citeshttps://doi.org/10.1088/1361-6641/aa8b33openalex-snapshot
ALD TiO x as a top-gate dielectric and passivation layer for InGaZnO 115 ISFETs
inferred← citeshttps://doi.org/10.1088/1674-4926/39/1/011005openalex-snapshot
Oxide-based thin film transistors for flexible electronics
inferred← citeshttps://doi.org/10.1109/cstic64481.2025.11017800openalex-snapshot
Use Damascus CMP to fabricate IGZO transistor in advanced Dram technology
inferred← citeshttps://doi.org/10.1109/led.2025.3647117openalex-snapshot
Gate-First/Channel-Last Process for High-Performance a-IGZO Gate-All-Around Nanosheet FETs
inferred← citeshttps://doi.org/10.1109/ted.2025.3550465openalex-snapshot
Effects of Mechanical Stress on Electrical Characteristics of IGZO-Based Integrated 1T1M on Flexible Substrate
inferred← citeshttps://doi.org/10.1116/6.0002248openalex-snapshot
Inhibition of the atomic layer deposition of ZnO and SnO2 using a vapor-based polymer thin film
inferred← citeshttps://doi.org/10.1116/6.0002798openalex-snapshot
Study on effective dry etching of InGaZnO thin films under capacitively coupled plasma-reactive ion etching with a nonfluorine-based etching gas
inferred← citeshttps://doi.org/10.1149/2.0191904jssopenalex-snapshot
Back-Channel-Etched Oxide Thin Film Transistors with a Corrosion Resistant Crystalline InGaO Channel
inferred← citeshttps://doi.org/10.1149/2.034204jesopenalex-snapshot
A Study of the Surface Chemical Reactions on IGZO Thin Film in BCl3/Ar Inductively Coupled Plasma
inferred← citeshttps://doi.org/10.1149/2162-8777/ae7544openalex-snapshot
Wet Etching Studies on CuGaO 2 and CuCrO 2 Thin Films
inferred← citeshttps://doi.org/10.1504/ijnt.2014.059806openalex-snapshot
Hydrogen ion sensing characteristics of IGZO/Si electrode in EGFET
inferred← citeshttps://doi.org/10.22677/thesis.200000008590openalex-snapshot
Fabrication and Characterization of Amorphous InGaZnO Thin Film Transistor for Flexible Devices
inferred← citeshttps://doi.org/10.3390/app11114838openalex-snapshot
Reliability-Aware SPICE Compatible Compact Modeling of IGZO Inverters on a Flexible Substrate
inferred← citeshttps://doi.org/10.3390/coatings14010088openalex-snapshot
Facile Synthesis and Characterization of TiO2/SnS Nanocomposites by Eco-Friendly Methods
inferred← citeshttps://doi.org/10.3390/ma14195808openalex-snapshot
Parameter Optimization of Laser Direct-Write Patterning on Indium Tin Oxide/Polycarbonate Thin Films Using Multi-Performance Characteristics Analysis
inferred← citeshttps://doi.org/10.3390/ma17246241openalex-snapshot
Dry Etching Characteristics of InGaZnO Thin Films Under Inductively Coupled Plasma–Reactive-Ion Etching with Hydrochloride and Argon Gas Mixture
inferred← citeshttps://doi.org/10.3390/mi6101439openalex-snapshot
Manufacturing and Characterization of a Thermoelectric Energy Harvester Using the CMOS-MEMS Technology
inferred← citeshttps://doi.org/10.3390/mi6111447openalex-snapshot
Fabrication of a Micromachined Capacitive Switch Using the CMOS-MEMS Technology
inferred← citeshttps://doi.org/10.3390/s151027047openalex-snapshot
Fabrication and Characterization of a Micro Methanol Sensor Using the CMOS-MEMS Technique
inferred← citeshttps://doi.org/10.4028/www.scientific.net/amr.476-478.2339openalex-snapshot
Analysis of Wet Etching Characteristics of a-IGZO Thin Film
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