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Process parameter analysis and parasitic reaction of ZnO grown through MOCVD

https://doi.org/10.1016/j.vacuum.2018.08.016
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Outgoing claims: the papers this work cites, builds on, or argues with.

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Hydrodynamic dispersion in rotating-disk omvpe reactors: Numerical simulation and experimental measurements
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Influencing factors of GaN growth uniformity through orthogonal test analysis
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Chemical reaction-transport model of diethylzinc hydrolysis in a vertical MOCVD reactor
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Surface-active element transport and its effect on liquid metal flow in laser-assisted additive manufacturing
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Computational analysis of GaN/InGaN deposition in MOCVD vertical rotating disk reactors
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Combined ab initio quantum chemistry and computational fluid dynamics calculations for prediction of gallium nitride growth
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Reactor design optimization based on 3D modeling of nitrides deposition in MOCVD vertical rotating disc reactors
inferredcites →https://doi.org/10.1016/j.jcrysgro.2006.04.117openalex-snapshot
Chemical vapor reactions of ZnO growth by metal-organic vapor phase epitaxy
inferredcites →https://doi.org/10.1016/j.jcrysgro.2006.11.247openalex-snapshot
Process conditions optimization for the maximum deposition rate and uniformity in vertical rotating disc MOCVD reactors based on CFD modeling
inferredcites →https://doi.org/10.1016/j.jcrysgro.2006.12.011openalex-snapshot
Modeling analysis of the MOCVD growth of ZnO film
inferredcites →https://doi.org/10.1016/j.jcrysgro.2008.12.036openalex-snapshot
Decomposition kinetics of tertiarybutanol and diethylzinc used as precursor sources for the growth of ZnO
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Species transport and chemical reaction in a MOCVD reactor and their influence on the GaN growth uniformity
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Surface plasmon-driven photoelectrochemical water splitting of aligned ZnO nanorod arrays decorated with loading-controllable Au nanoparticles
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Improved performance of sol–gel ZnO-based perovskite solar cells via TiCl4 interfacial modification
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Novel design and performance of the solidly mounted resonator with an AlN-buffered ZnO piezoelectric film
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The importance of predicting rate-limited growth for accurate modeling of commercial MOCVD reactors
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Computer simulation study of the MOCVD growth of titanium dioxide films
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Molecular Orbital Studies of Zinc Oxide Chemical Vapor Deposition: Gas-Phase Hydrolysis of Diethyl Zinc, Elimination Reactions, and Formation of Dimers and Tetramers
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Molecular Orbital Studies of Zinc Oxide Chemical Vapor Deposition: Gas-Phase Radical Reactions
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Chemical reaction-transport model of oxidized diethylzinc based on quantum mechanics and computational fluid dynamics approaches
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Quantum Chemical Study on Interactions of Diethylzinc with Nitrous Oxide and Water for ZnO Growth by Metal–Organic Vapor Phase Epitaxy
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Kinetic and Transport Modeling of the Metallorganic Chemical Vapor Deposition of InP from Trimethylindium and Phosphine and Comparison with Experiments
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What points at this work

Incoming claims: where this work appears in other papers’ reference lists and arguments.

inferred← citeshttps://doi.org/10.2139/ssrn.4705296openalex-extracted
Quantitative computational study of gas - phase reaction mechanism between DEZn and t -BuOH in ZnO growth by MOCVD
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Nanocolumn evolution and band-gap engineering in Bi-doped ZnO thin films: experimental investigation and DFT + U insights
inferred← citeshttps://doi.org/10.1016/j.ceramint.2024.02.117openalex-snapshot
A batch preparation of large-size graphite plate/SiC coating by CVD: CFD simulation and experimental
inferred← citeshttps://doi.org/10.1016/j.jcrysgro.2019.125247openalex-snapshot
Multi-scale modeling of gas-phase reactions in metal-organic chemical vapor deposition growth of WSe2
inferred← citeshttps://doi.org/10.1021/acsnano.9b04163openalex-snapshot
High Performance Vertical Resonant Photo-Effect-Transistor with an All-Around OLED-Gate for Ultra-Electromagnetic Stability
inferred← citeshttps://doi.org/10.1063/5.0120937openalex-snapshot
Study on stability of cavity in metal–organic chemical vapor deposition calculation based on neural network method
inferred← citeshttps://doi.org/10.1063/5.0141060openalex-snapshot
Theoretical adjustment of metalorganic chemical vapor deposition process parameters for high-quality gallium nitride epitaxial films
inferred← citeshttps://doi.org/10.1177/02670844261423649openalex-snapshot
Quantitative study of gas-phase reactions in ZnO thin-film coating process
inferred← citeshttps://doi.org/10.30919/esmm5f715openalex-snapshot
Optical and Structural Properties of Nickel Doped Zinc Oxide Grown by Metal Organic Chemical Vapor Deposition (MOCVD) at Different Reaction Chamber Conditions
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