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Micro–Nanostructured TiN Thin Film: Synthesis from a Photo-Patternable TiO2 Sol–Gel Coating and Rapid Thermal Nitridation

https://doi.org/10.1021/acs.jpcc.0c07157
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What this work says

Outgoing claims: the papers this work cites, builds on, or argues with.

inferredcites →https://doi.org/10.1002/adma.201401874openalex-snapshot
Refractory Plasmonics with Titanium Nitride: Broadband Metamaterial Absorber
inferredcites →https://doi.org/10.1007/bf01103533openalex-snapshot
Nitridation of TiO2 fibres prepared by the sol-gel method
inferredcites →https://doi.org/10.1007/bf02403875openalex-snapshot
Nitridation of the sol-gel derived TiO2 coating films and the infrared ray reflection
inferredcites →https://doi.org/10.1007/s10853-010-4949-7openalex-snapshot
New insights in photo-patterned sol–gel-derived TiO2 films
inferredcites →https://doi.org/10.1007/s10971-014-3304-xopenalex-snapshot
Thermoplasticity of sol–gel-derived titanoxanes chemically modified with benzoylacetone
inferredcites →https://doi.org/10.1016/0257-8972(94)90169-4openalex-snapshot
Formation of TiN by nitridation of TiO2 films deposited by ultrasonically assisted sol-gel technique
inferredcites →https://doi.org/10.1016/j.matlet.2005.07.047openalex-snapshot
Characterization of nano-structured TiN thin films prepared by R.F. magnetron sputtering
inferredcites →https://doi.org/10.1016/j.mee.2017.01.037openalex-snapshot
Colloidal photolithography applied to functional microstructure on cylinder based on photopatternable TiO 2 sol-gel
inferredcites →https://doi.org/10.1016/j.optmat.2013.05.010openalex-snapshot
Sub-micrometric patterns written using a DIL method coupled to a TiO2 photo-resist
inferredcites →https://doi.org/10.1016/j.ultramic.2006.03.006openalex-snapshot
Quantification of crystalline and amorphous content in porous samples from electron energy loss spectroscopy
inferredcites →https://doi.org/10.1016/s0257-8972(05)80002-7openalex-snapshot
Review of CVD TiN coatings for wear-resistant applications: deposition processes, properties and performance
inferredcites →https://doi.org/10.1016/s0257-8972(99)00072-9openalex-snapshot
Raman microscopic studies of PVD hard coatings
inferredcites →https://doi.org/10.1017/s1551929513000254openalex-snapshot
International Centre for Diffraction Data
inferredcites →https://doi.org/10.1021/acs.langmuir.5b01191openalex-snapshot
Large Area Fabrication of Periodic TiO2Nanopillars Using Microsphere Photolithography on a Photopatternable Sol–Gel Film
inferredcites →https://doi.org/10.1021/acsphotonics.7b00942openalex-snapshot
Fabrication of Highly Metallic TiN Films by Pulsed Laser Deposition Method for Plasmonic Applications
inferredcites →https://doi.org/10.1021/acsphotonics.9b00617openalex-snapshot
Titanium Nitride Epitaxial Films as a Plasmonic Material Platform: Alternative to Gold
inferredcites →https://doi.org/10.1021/cm00018a034openalex-snapshot
Chemical vapor deposition of titanium, zirconium, and hafnium nitride thin films
inferredcites →https://doi.org/10.1038/ncomms2207openalex-snapshot
Dual-polarity plasmonic metalens for visible light
inferredcites →https://doi.org/10.1038/s41598-019-51236-3openalex-snapshot
Highly Plasmonic Titanium Nitride by Room-Temperature Sputtering
inferredcites →https://doi.org/10.1039/c9ce00488bopenalex-snapshot
Chemical vapor deposition of titanium nitride thin films: kinetics and experiments
inferredcites →https://doi.org/10.1063/1.2214438openalex-snapshot
In situ spectroscopic ellipsometry study on the growth of ultrathin TiN films by plasma-assisted atomic layer deposition
inferredcites →https://doi.org/10.1063/1.4759019openalex-snapshot
Coherent growth of superconducting TiN thin films by plasma enhanced molecular beam epitaxy
inferredcites →https://doi.org/10.1063/1.4913751openalex-snapshot
Flexible metasurfaces and metamaterials: A review of materials and fabrication processes at micro- and nano-scales
inferredcites →https://doi.org/10.1063/1.4941413openalex-snapshot
Fully CMOS-compatible titanium nitride nanoantennas
inferredcites →https://doi.org/10.1073/pnas.1319446111openalex-snapshot
Epitaxial superlattices with titanium nitride as a plasmonic component for optical hyperbolic metamaterials
inferredcites →https://doi.org/10.1088/0022-3735/16/12/023openalex-snapshot
Determination of the thickness and optical constants of amorphous silicon
inferredcites →https://doi.org/10.1088/1361-6668/aab7d6openalex-snapshot
High quality superconducting titanium nitride thin film growth using infrared pulsed laser deposition
inferredcites →https://doi.org/10.1103/physrevb.17.1095openalex-snapshot
Raman scattering, superconductivity, and phonon density of states of stoichiometric and nonstoichiometric TiN
inferredcites →https://doi.org/10.1103/physrevb.30.1155openalex-snapshot
Dielectric properties of TiC x , TiN x , VC x , and VN x from 1.5 to 40 eV determined by electron-energy-loss spectroscopy
inferredcites →https://doi.org/10.1111/j.1151-2916.1990.tb06758.xopenalex-snapshot
Nitridation of the Sol–Gel‐Derived Titanium Oxide Films by Heating in Ammonia Gas
inferredcites →https://doi.org/10.1126/science.1232009openalex-snapshot
Planar Photonics with Metasurfaces
inferredcites →https://doi.org/10.1155/2014/373847openalex-snapshot
Effects of Annealing on TiN Thin Film Growth by DC Magnetron Sputtering
inferredcites →https://doi.org/10.1364/oe.24.001143openalex-snapshot
Plasmonic arrays of titanium nitride nanoparticles fabricated from epitaxial thin films
inferredcites →https://doi.org/10.1364/oe.25.009003openalex-snapshot
Efficient reversible phase mask for TiO_2 submicron gratings directly printed on cylindrical surfaces
inferredcites →https://doi.org/10.1364/ome.2.000478openalex-snapshot
Titanium nitride as a plasmonic material for visible and near-infrared wavelengths
inferredcites →https://doi.org/10.1364/ome.5.001316openalex-snapshot
Gyroidal titanium nitride as nonmetallic metamaterial
inferredcites →https://doi.org/10.1364/ome.5.002786openalex-snapshot
Optimization of sputtered titanium nitride as a tunable metal for plasmonic applications
inferredcites →https://doi.org/10.1364/ome.6.002508openalex-snapshot
Direct fabrication of a metal-like TiN-based plasmonic grating using nitridation of a photo-patternable TiO_2 sol-gel film
inferredcites →https://doi.org/10.1364/ome.7.000777openalex-snapshot
Substrate-insensitive atomic layer deposition of plasmonic titanium nitride films
inferredcites →https://doi.org/10.1364/ome.7.004171openalex-snapshot
High aspect ratio titanium nitride trench structures as plasmonic biosensor
inferredcites →https://doi.org/10.1515/nanoph-2017-0130openalex-snapshot
Material platforms for optical metasurfaces

What points at this work

Incoming claims: where this work appears in other papers’ reference lists and arguments.

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inferred← citeshttps://doi.org/10.1002/adfm.202410613openalex-snapshot
Neutral‐Colored Transparent Radiative Cooler by Tailoring Solar Absorption with Punctured Bragg Reflectors
inferred← citeshttps://doi.org/10.1002/admi.202201159openalex-snapshot
Versatile Micro and Nano Patterning Technique for TiO2 and TiN‐Based Sol–Gel Thin Films
inferred← citeshttps://doi.org/10.1002/smll.202501840openalex-snapshot
Flexible Self‐Cleaning Janus Emitter for Transparent Radiative Cooling in Enclosed Spaces
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Cooperative effects of surface plasmon resonance and type-II band alignment to significantly boost photoelectrochemical H2 generation of TiO2/CdS/TiN nanorod array photoanode
inferred← citeshttps://doi.org/10.1016/j.apsadv.2025.100854openalex-snapshot
Ti/TiOxNy thin films as highly efficient photoelectrode via engineered interfacial facet on plasmonic schottky barriers
inferred← citeshttps://doi.org/10.1016/j.ccr.2024.216353openalex-snapshot
A comprehensive Review based on the synthesis, properties, morphology, functionalization, and potential applications of transition metals nitrides
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Chemical vapor deposition of zirconium oxynitride thin films for SERS applications
inferred← citeshttps://doi.org/10.1016/j.jallcom.2023.169888openalex-snapshot
A review on 2D transition metal nitrides: Structural and morphological impacts on energy storage and photocatalytic applications
inferred← citeshttps://doi.org/10.1016/j.jeurceramsoc.2025.117330openalex-snapshot
Advancements in nitridation of TiO2 layers: Mechanisms, techniques, and applications for TiN thin films
inferred← citeshttps://doi.org/10.1016/j.mtadv.2023.100430openalex-snapshot
Innovative process to obtain thin films and micro-nanostructured ZrN films from a photo-structurable ZrO2 sol-gel using rapid thermal nitridation
inferred← citeshttps://doi.org/10.1016/j.progsolidstchem.2024.100462openalex-snapshot
Influence of initial crystalline phase of TiO2 to obtain TiN thin films from sol-gel route by rapid thermal nitridation process
inferred← citeshttps://doi.org/10.1016/j.surfcoat.2021.127089openalex-snapshot
Optical, electrical and mechanical properties of TiN thin film obtained from a TiO2 sol-gel coating and rapid thermal nitridation
inferred← citeshttps://doi.org/10.1016/j.tsf.2025.140603openalex-snapshot
Revealing plasmonic TiN films with low power radio-frequency magnetron sputtering technique
inferred← citeshttps://doi.org/10.1021/acsami.3c13479openalex-snapshot
Colloidal Plasmonic TiN Nanoparticles for Efficient Solar Seawater Desalination
inferred← citeshttps://doi.org/10.1021/acsomega.5c11587openalex-snapshot
Influence of the Rapid Thermal Nitriding Process on the Properties of TiN Thin Films Obtained from TiO 2 Sol–Gel Layers
inferred← citeshttps://doi.org/10.1080/14686996.2022.2029686openalex-snapshot
Metal nitride-based nanostructures for electrochemical and photocatalytic hydrogen production
inferred← citeshttps://doi.org/10.1088/1742-6596/2980/1/012012openalex-snapshot
Thermodynamic Assessment of Phase Transformation during Carbothermic Ilmenite Using Non-Carbonization Palm Kernel Shell Biomass
inferred← citeshttps://doi.org/10.1117/12.2596229openalex-snapshot
Direct patterning of TiO2 and TiN based sol-gel using laser interference and nanospheres UV lithography
inferred← citeshttps://doi.org/10.1117/12.2635170openalex-snapshot
Laser interference and nanospheres UV lithography to produce micro and nanostructured TiO2 and TiN based sol-gel layers
inferred← citeshttps://doi.org/10.1364/ome.468682openalex-snapshot
Micro-nanostructured plasmonic TiN layer produced using rapid thermal nitridation of a nanoimprinted TiO 2 sol-gel
inferred← citeshttps://doi.org/10.3390/ma15165596openalex-snapshot
Versatile Zirconium Oxide (ZrO2) Sol-Gel Development for the Micro-Structuring of Various Substrates (Nature and Shape) by Optical and Nano-Imprint Lithography
inferred← citeshttps://doi.org/10.3390/mi16050573openalex-snapshot
Laser-Fabricated Micro/Nanostructures: Mechanisms, Fabrication Techniques, and Applications
inferred← citeshttps://doi.org/10.3390/nano12061008openalex-snapshot
Influence of the Micro-Nanostructuring of Titanium Dioxide Films on the Photocatalytic Degradation of Formic Acid under UV Illumination
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