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Versatile Zirconium Oxide (ZrO2) Sol-Gel Development for the Micro-Structuring of Various Substrates (Nature and Shape) by Optical and Nano-Imprint Lithography

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What this work says

Outgoing claims: the papers this work cites, builds on, or argues with.

inferredcites →https://doi.org/10.1002/adfm.201202577openalex-snapshot
A Universal Scheme for Patterning of Oxides via Thermal Nanoimprint Lithography
inferredcites →https://doi.org/10.1002/adma.200306296openalex-snapshot
Formation of TiO2 and ZrO2 Nanotubes Using Atomic Layer Deposition with Ultraprecise Control of the Wall Thickness
inferredcites →https://doi.org/10.1002/adma.200903708openalex-snapshot
The Langmuir‐Blodgett Approach to Making Colloidal Photonic Crystals from Silica Spheres
inferredcites →https://doi.org/10.1007/s10853-010-4949-7openalex-snapshot
New insights in photo-patterned sol–gel-derived TiO2 films
inferredcites →https://doi.org/10.1007/s10971-014-3304-xopenalex-snapshot
Thermoplasticity of sol–gel-derived titanoxanes chemically modified with benzoylacetone
inferredcites →https://doi.org/10.1016/j.apsusc.2004.05.155openalex-snapshot
Laser conditioning of ZrO2:Y2O3/SiO2 mirror coatings prepared by E-beam evaporation
inferredcites →https://doi.org/10.1016/j.apsusc.2021.151422openalex-snapshot
Dependence of the ZrO2 growth on the crystal orientation: growth simulations and magnetron sputtering
inferredcites →https://doi.org/10.1016/j.ceramint.2020.03.109openalex-snapshot
Development of ZrO2 and YSZ coatings deposited by PE-CVD below 800 °C for the protection of Ni alloys
inferredcites →https://doi.org/10.1016/j.cis.2013.11.010openalex-snapshot
Plasmonic films based on colloidal lithography
inferredcites →https://doi.org/10.1016/j.colsurfa.2021.127715openalex-snapshot
Phase and photoluminescence analysis of dual-color emissive Eu3+-doped ZrO2 nanoparticles for advanced security features in anti-counterfeiting
inferredcites →https://doi.org/10.1016/j.jdent.2007.07.008openalex-snapshot
An overview of zirconia ceramics: Basic properties and clinical applications
inferredcites →https://doi.org/10.1016/j.jma.2021.07.010openalex-snapshot
Biocompatibility and electrochemical evaluation of ZrO2 thin films deposited by reactive magnetron sputtering on MgZnCa alloy
inferredcites →https://doi.org/10.1016/j.jmrt.2021.05.068openalex-snapshot
Direct liquid injection chemical vapor deposition of ZrO2 films from a heteroleptic Zr precursor: interplay between film characteristics and corrosion protection of stainless steel
inferredcites →https://doi.org/10.1016/j.matlet.2020.128854openalex-snapshot
Atomic layer deposition of ZnO thin film on ZrO2 dental implant surface for enhanced antibacterial and bioactive performance
inferredcites →https://doi.org/10.1016/j.mee.2013.03.054openalex-snapshot
Zirconia based functional sol–gel resist for UV and high resolution lithography
inferredcites →https://doi.org/10.1016/j.mee.2021.111616openalex-snapshot
Microstructuring technology for large and cylindrical receivers for concentrated solar plants (CSP)
inferredcites →https://doi.org/10.1016/j.micromeso.2005.05.014openalex-snapshot
Synthesis of ZrO2–SiO2 mesocomposite with high ZrO2 content via a novel sol–gel method
inferredcites →https://doi.org/10.1016/j.nimb.2006.06.028openalex-snapshot
Formation of ZrO2 coating on the NiTi alloys for improving their surface properties
inferredcites →https://doi.org/10.1016/j.photonics.2012.06.007openalex-snapshot
Low-cost micro-lens arrays fabricated by photosensitive sol–gel and multi-beam laser interference
inferredcites →https://doi.org/10.1016/j.protcy.2016.03.035openalex-snapshot
Investigation of Various Properties for Zirconium Oxide Films Synthesized by Sputtering
inferredcites →https://doi.org/10.1016/j.surfcoat.2013.01.040openalex-snapshot
Deposition and properties of zirconia coatings on a zirconium alloy produced by pulsed DC plasma electrolytic oxidation
inferredcites →https://doi.org/10.1016/j.surfcoat.2020.125729openalex-snapshot
Corrosion, oxidation and wear study of electro-co-deposited ZrO2-TiO2 reinforced Ni-W coatings
inferredcites →https://doi.org/10.1016/j.surfcoat.2022.128686openalex-snapshot
In vitro corrosion behavior of coated Ti6Al4V with TiO2, ZrO2, and TiO2/ZrO2 mixed nanofilms using atomic layer deposition for dental implants
inferredcites →https://doi.org/10.1016/j.tsep.2021.100968openalex-snapshot
Evaluation of a ZrO2/ZrO2-aerogel one-dimensional photonic crystal as an optical filter for thermophotovoltaic applications
inferredcites →https://doi.org/10.1016/j.tsf.2010.02.067openalex-snapshot
Properties of zirconium oxide films prepared by filtered cathodic vacuum arc deposition and pulsed DC substrate bias
inferredcites →https://doi.org/10.1016/s0167-577x(00)00124-5openalex-snapshot
ZrO2 thin films and ZrO2/SiO2 optical reflection filters deposited by sol–gel method
inferredcites →https://doi.org/10.1016/s0169-4332(02)00247-7openalex-snapshot
Synthesis of ZrO2 thin films by atomic layer deposition: growth kinetics, structural and electrical properties
inferredcites →https://doi.org/10.1021/acs.jpcc.0c07157openalex-snapshot
Micro–Nanostructured TiN Thin Film: Synthesis from a Photo-Patternable TiO2 Sol–Gel Coating and Rapid Thermal Nitridation
inferredcites →https://doi.org/10.1021/acs.langmuir.5b01191openalex-snapshot
Large Area Fabrication of Periodic TiO2Nanopillars Using Microsphere Photolithography on a Photopatternable Sol–Gel Film
inferredcites →https://doi.org/10.1021/jp066615lopenalex-snapshot
Phase Transformation and Photoluminescence Properties of Nanocrystalline ZrO2Powders Prepared via the Pechini-type Sol−Gel Process
inferredcites →https://doi.org/10.1039/c0jm01403fopenalex-snapshot
Facile nanopatterning of zirconium dioxide films via direct ultraviolet-assisted nanoimprint lithography
inferredcites →https://doi.org/10.1063/5.0022460openalex-snapshot
Photoluminescence properties of zirconium oxide (ZrO2) nanoparticles
inferredcites →https://doi.org/10.1088/0957-4484/21/6/065303openalex-snapshot
Direct ArF laser photopatterning of metal oxide nanostructures prepared by the sol–gel route
inferredcites →https://doi.org/10.1111/j.1551-2916.2005.00420.xopenalex-snapshot
Mechanical Properties of Zirconia Thin Films Deposited by Filtered Cathodic Vacuum Arc
inferredcites →https://doi.org/10.1116/1.1410948openalex-snapshot
Structural and optical properties of thin lead oxide films produced by reactive direct current magnetron sputtering
inferredcites →https://doi.org/10.1116/1.5100307openalex-snapshot
Homologous substrate-temperature dependence of structure and properties of TiO2, ZrO2, and HfO2 thin films deposited by reactive sputtering
inferredcites →https://doi.org/10.1186/2251-7235-7-55openalex-snapshot
Structural, electrical, and decorative properties of sputtered zirconium thin films during post-annealing process
inferredcites →https://doi.org/10.1364/ao.39.000489openalex-snapshot
Diffraction gratings of photosensitive ZrO_2 gel films fabricated with the two-ultraviolet-beam interference method
inferredcites →https://doi.org/10.1364/ao.56.005054openalex-snapshot
Sol-gel zirconia diffraction grating using a soft imprinting process

What points at this work

Incoming claims: where this work appears in other papers’ reference lists and arguments.

inferred← citeshttps://doi.org/10.2139/ssrn.4530197openalex-extracted
inferred← citeshttps://doi.org/10.1002/admt.202501547openalex-snapshot
Pioneering Carboxylated Zirconium Oxo Cluster Resist for Precision Nanoscale Patterning
inferred← citeshttps://doi.org/10.1007/s11182-025-03445-9openalex-snapshot
Determination by scratch testing of the quality of thin-film oxide coatings formed by vacuum-arc plasma-assisted method
inferred← citeshttps://doi.org/10.1016/j.mtadv.2023.100430openalex-snapshot
Innovative process to obtain thin films and micro-nanostructured ZrN films from a photo-structurable ZrO2 sol-gel using rapid thermal nitridation
inferred← citeshttps://doi.org/10.1016/j.progsolidstchem.2024.100462openalex-snapshot
Influence of initial crystalline phase of TiO2 to obtain TiN thin films from sol-gel route by rapid thermal nitridation process
inferred← citeshttps://doi.org/10.1117/12.3016633openalex-snapshot
Micro-nanostructuring by optical-lithography and nitriding of photo-patternable ZrO2 sol-gel to obtain micro-nanostructured ZrN
inferred← citeshttps://doi.org/10.1117/12.3017373openalex-snapshot
Color effects based on resonant waveguide grating embedded in a luminescent sol-gel layer
inferred← citeshttps://doi.org/10.1117/12.3017396openalex-snapshot
2D nanopillars patterning of complex shape using multiple colloidal lithography illumination on photo-patternable TiO2 and ZrO2 based sol-gel layers
inferred← citeshttps://doi.org/10.3390/gels10070453openalex-snapshot
Cationic Gas-Permeable Mold Fabrication Using Sol–Gel Polymerization for Nano-Injection Molding
inferred← citeshttps://doi.org/10.3390/ma17020462openalex-snapshot
Sol–Gel Technology Applied to Materials Science: Synthesis, Characterization and Applications
inferred← citeshttps://doi.org/10.70675/a914ea04z3654z43b5z893ez3266dfb650e2openalex-snapshot
Phases cristallines et propriétés électro-optiques des films minces ferroélectriques de ZrO₂ et HfO₂
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