On the public citation graph

Surface Diffusion Control Enables Tailored-Aspect-Ratio Nanostructures in Area-Selective Atomic Layer Deposition

https://doi.org/10.1021/acsami.0c22121
0 signed · 57 inferred · view as graph

Inferred edges come from two machine sources: sweeps of open repository metadata (mostly SSRN and Zenodo), and a bulk OpenAlex citation snapshot. Every row below is labelled with the one it came from. Neither is a complete citation index — absence here is not evidence of absence.

Is this your work? Sign in with ORCID and put your name on the claims that are yours.
Claim with ORCID
Reference health. See whether every reference in this work resolves to a known work and none has been retracted — and get a dated CiteStamped badge you can embed.
See reference health

What this work says

Outgoing claims: the papers this work cites, builds on, or argues with.

inferredcites →https://doi.org/10.1002/9783527639915.ch9openalex-snapshot
Nanopatterning by Area‐Selective Atomic Layer Deposition
inferredcites →https://doi.org/10.1002/adma.200502470openalex-snapshot
Chemistry for Positive Pattern Transfer Using Area‐Selective Atomic Layer Deposition
inferredcites →https://doi.org/10.1002/anie.199002561openalex-snapshot
On the Conformation and Structure of Organometal Complexes in the Solid State: Two Studies Relevant to Chemical Synthesis
inferredcites →https://doi.org/10.1016/j.eurpolymj.2008.09.005openalex-snapshot
Surface modification of thermoplastics by atomic layer deposition of Al2O3 and TiO2 thin films
inferredcites →https://doi.org/10.1016/j.msec.2016.01.093openalex-snapshot
Recent progress of atomic layer deposition on polymeric materials
inferredcites →https://doi.org/10.1016/j.tsf.2009.09.010openalex-snapshot
Low temperature atomic layer deposition of titania thin films
inferredcites →https://doi.org/10.1016/s0022-0248(00)00897-6openalex-snapshot
Anomalous effect of temperature on atomic layer deposition of titanium dioxide
inferredcites →https://doi.org/10.1021/acs.chemmater.0c00722openalex-snapshot
Area-Selective Deposition: Fundamentals, Applications, and Future Outlook
inferredcites →https://doi.org/10.1021/acs.chemmater.0c00838openalex-snapshot
A Selective Toolbox for Nanofabrication
inferredcites →https://doi.org/10.1021/acs.chemmater.0c02588openalex-snapshot
Area-Selective Deposition of Ruthenium by Area-Dependent Surface Diffusion
inferredcites →https://doi.org/10.1021/acs.chemmater.8b03165openalex-snapshot
Area-Selective Atomic Layer Deposition of ZnO by Area Activation Using Electron Beam-Induced Deposition
inferredcites →https://doi.org/10.1021/acs.chemmater.8b03454openalex-snapshot
From the Bottom-Up: Toward Area-Selective Atomic Layer Deposition with High Selectivity
inferredcites →https://doi.org/10.1021/acs.chemmater.8b04926openalex-snapshot
Area-Selective Atomic Layer Deposition Assisted by Self-Assembled Monolayers: A Comparison of Cu, Co, W, and Ru
inferredcites →https://doi.org/10.1021/acs.chemmater.9b00193openalex-snapshot
Area-Selective Deposition of Ruthenium by Combining Atomic Layer Deposition and Selective Etching
inferredcites →https://doi.org/10.1021/acsami.9b14596openalex-snapshot
Area-Selective ALD of Ru on Nanometer-Scale Cu Lines through Dimerization of Amino-Functionalized Alkoxy Silane Passivation Films
inferredcites →https://doi.org/10.1021/acsnano.5b03125openalex-snapshot
Self-Correcting Process for High Quality Patterning by Atomic Layer Deposition
inferredcites →https://doi.org/10.1021/acsnano.7b04701openalex-snapshot
Area-Selective Atomic Layer Deposition of SiO2 Using Acetylacetone as a Chemoselective Inhibitor in an ABC-Type Cycle
inferredcites →https://doi.org/10.1021/cm00034a004openalex-snapshot
Selective metalization by chemical vapor deposition
inferredcites →https://doi.org/10.1021/cm050704dopenalex-snapshot
Nucleation and Growth during Al 2 O 3 Atomic Layer Deposition on Polymers
inferredcites →https://doi.org/10.1021/cr900056bopenalex-snapshot
Atomic Layer Deposition: An Overview
inferredcites →https://doi.org/10.1021/jp803872sopenalex-snapshot
Selective-Area Atomic Layer Deposition Using Poly(methyl methacrylate) Films as Mask Layers
inferredcites →https://doi.org/10.1039/c2jm32343eopenalex-snapshot
Quantitative in situ infrared analysis of reactions between trimethylaluminum and polymers during Al2O3 atomic layer deposition
inferredcites →https://doi.org/10.1039/c39940002165openalex-snapshot
X-Ray absorption spectroscopy investigation on the structure of methyl acrylate–TiCl 4 complexes in solution
inferredcites →https://doi.org/10.1039/c6ra23923dopenalex-snapshot
Nanoscale selective area atomic layer deposition of TiO 2 using e-beam patterned polymers
inferredcites →https://doi.org/10.1063/1.1810193openalex-snapshot
Island growth as a growth mode in atomic layer deposition: A phenomenological model
inferredcites →https://doi.org/10.1063/1.1940727openalex-snapshot
Surface chemistry of atomic layer deposition: A case study for the trimethylaluminum/water process
inferredcites →https://doi.org/10.1063/1.3431351openalex-snapshot
Local deposition of high-purity Pt nanostructures by combining electron beam induced deposition and atomic layer deposition
inferredcites →https://doi.org/10.1063/1.5060967openalex-snapshot
Conformality in atomic layer deposition: Current status overview of analysis and modelling
inferredcites →https://doi.org/10.1088/0268-1242/27/7/074001openalex-snapshot
Diffusion phenomena in atomic layer deposition
inferredcites →https://doi.org/10.1088/0957-4484/27/40/405302openalex-snapshot
Area-selective atomic layer deposition of platinum using photosensitive polyimide
inferredcites →https://doi.org/10.1109/iitc-amc.2017.7968958openalex-snapshot
Feasibility study of fully self aligned vias for 5nm node BEOL
inferredcites →https://doi.org/10.1111/j.1151-2916.1964.tb14435.xopenalex-snapshot
Properties and Structure of Glasses in the Binary Systems Alkali—TiO 2
inferredcites →https://doi.org/10.1116/1.2359728openalex-snapshot
Area selective atomic layer deposition of titanium dioxide: Effect of precursor chemistry
inferredcites →https://doi.org/10.1116/1.2782546openalex-snapshot
Transport behavior of atomic layer deposition precursors through polymer masking layers: Influence on area selective atomic layer deposition
inferredcites →https://doi.org/10.1116/1.4938481openalex-snapshot
Inherent substrate-dependent growth initiation and selective-area atomic layer deposition of TiO2 using “water-free” metal-halide/metal alkoxide reactants
inferredcites →https://doi.org/10.1149/1.2184068openalex-snapshot
Area-Selective ALD of Titanium Dioxide Using Lithographically Defined Poly(methyl methacrylate) Films

What points at this work

Incoming claims: where this work appears in other papers’ reference lists and arguments.

inferred← citeshttps://doi.org/10.2139/ssrn.4649319openalex-extracted
Photocatalytic Activity of Zno- and Tio2- Coated Pmma Microcapsules by Ald for Water Purification
inferred← citeshttps://doi.org/10.1002/admi.202100846openalex-snapshot
Selectivity Enhancement for Ruthenium Atomic Layer Deposition in Sub‐50 nm Nanopatterns by Diffusion and Size‐Dependent Reactivity
inferred← citeshttps://doi.org/10.1007/s41918-022-00146-6openalex-snapshot
Atomic Layer Deposition for Electrochemical Energy: from Design to Industrialization
inferred← citeshttps://doi.org/10.1016/j.apsusc.2023.157222openalex-snapshot
300 mm-wafer metrology for area-selective deposition in nanoscale patterns: A case study for ruthenium atomic layer deposition
inferred← citeshttps://doi.org/10.1016/j.apsusc.2025.165699openalex-snapshot
Inherently area-selective atomic layer deposition for the fabrication of 2D and 3D nanostructures
inferred← citeshttps://doi.org/10.1016/j.dche.2024.100140openalex-snapshot
Multiscale computational fluid dynamics modeling of an area-selective atomic layer deposition process using a discrete feed method
inferred← citeshttps://doi.org/10.1016/j.tsf.2024.140552openalex-snapshot
Photocatalytic activity of ZnO- and TiO2- coated poly (methyl methacrylate) microcapsules by atomic layer deposition for water purification
inferred← citeshttps://doi.org/10.1021/acs.chemmater.2c03404openalex-snapshot
Enhancing Performance and Function of Polymethacrylate Extreme Ultraviolet Resists Using Area-Selective Deposition
inferred← citeshttps://doi.org/10.1021/acs.chemmater.4c02902openalex-snapshot
Molecular Design in Area-Selective Atomic Layer Deposition: Understanding Inhibitors and Precursors
inferred← citeshttps://doi.org/10.1021/acs.chemmater.4c03477openalex-snapshot
Computational Ab Initio Approaches for Area-Selective Atomic Layer Deposition: Methods, Status, and Perspectives
inferred← citeshttps://doi.org/10.1021/acs.jpcc.4c02884openalex-snapshot
Mechanisms of Area-Selective Atomic Layer Deposition and Their Impact on Feature Sizes
inferred← citeshttps://doi.org/10.1021/acsaem.2c02236openalex-snapshot
Harnessing the Potential of Porous ZnO Photoanodes in Dye-Sensitized Solar Cells by Atomic Layer Deposition of Mg-Doped ZnO
inferred← citeshttps://doi.org/10.1021/acsomega.2c00346openalex-snapshot
The Development of New Catalytic Pigments Based on SiO2 Amorphous Photonic Crystals via Adding of Dual-Functional Black TiO2-x Nanoparticles
inferred← citeshttps://doi.org/10.1021/jacsau.3c00622openalex-snapshot
Electromigration Forces on Atoms on Graphene Nanoribbons: The Role of Adsorbate–Surface Bonding
inferred← citeshttps://doi.org/10.1039/d4mh01472copenalex-snapshot
Nanostructure fabrication by area selective deposition: a brief review
inferred← citeshttps://doi.org/10.1039/d5mh02445eopenalex-snapshot
Tuning surface reactivity pathways through molecular inhibitor redosing for precision nanopatterning
inferred← citeshttps://doi.org/10.1088/2053-1591/acf650openalex-snapshot
The growth mechanisms of TiO2 film onto PET surfaces by atomic layer deposition
inferred← citeshttps://doi.org/10.1109/isvlsi65124.2025.11130273openalex-snapshot
Technology and Power-aware Investigation of Nanostructures for Molecular Field-Coupled Nanocomputing
inferred← citeshttps://doi.org/10.3390/coatings14010038openalex-snapshot
Machine Learning Modeling and Run-to-Run Control of an Area-Selective Atomic Layer Deposition Spatial Reactor
inferred← citeshttps://doi.org/10.3390/nano15030164openalex-snapshot
Investigating Benzoic Acid Derivatives as Potential Atomic Layer Deposition Inhibitors Using Nanoscale Infrared Spectroscopy
inferred← citeshttps://doi.org/10.3390/polym13081346openalex-snapshot
Is Poly(methyl methacrylate) (PMMA) a Suitable Substrate for ALD?: A Review
Editorial review for independent work. ICSAC — the Institute for Complexity Science and Advanced Computing — runs a structured editorial panel for researchers publishing outside journals, and publishes on CiteStamp rails. Submission is free and goes through ORCID: icsacinstitute.org/submit.