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The reason why thin-film silicon grows layer by layer in plasma-enhanced chemical vapor deposition

https://doi.org/10.1038/srep09052
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What this work says

Outgoing claims: the papers this work cites, builds on, or argues with.

inferredcites →https://doi.org/10.1016/0039-6028(89)90106-4openalex-snapshot
Sticking and recombination of the SiH3 radical on hydrogenated amorphous silicon: The catalytic effect of diborane
inferredcites →https://doi.org/10.1016/0167-2584(89)90788-3openalex-snapshot
Sticking and recombination of the SiH3 radical on hydrogenated amorphous silicon: The catalytic effect of diborane
inferredcites →https://doi.org/10.1016/0956-7151(93)90173-popenalex-snapshot
Diffusional coalescence of island films on the real crystal surface in the case of layer-by-layer growth of islands—I. An isolated system
inferredcites →https://doi.org/10.1016/0956-7151(93)90174-qopenalex-snapshot
Diffusional coalescence of island films on the real crystal surface in the case of layer-by-layer growth of islands—II. An open system. Undamped sources of deposited atoms
inferredcites →https://doi.org/10.1016/0956-7151(94)90220-8openalex-snapshot
Diffusional coalescence of island films on the real crystal surface in the case of layer-by-layer growth of islands—III. Analysis of the model
inferredcites →https://doi.org/10.1016/0956-7151(94)90221-6openalex-snapshot
Diffusional coalescence of island films on the real crystal surface in the case of layer-by-layer growth of islands—IV. Theory and experiment
inferredcites →https://doi.org/10.1016/s0009-2614(00)00795-8openalex-snapshot
Cavity ring down detection of SiH3 on the broadband à A1′ ← X A1 transition in a remote Ar–H2–SiH4 plasma
inferredcites →https://doi.org/10.1016/s0022-3093(98)00274-9openalex-snapshot
Morphological study of kinetic roughening on amorphous and microcrystalline silicon surface
inferredcites →https://doi.org/10.1016/s0040-6090(00)01594-7openalex-snapshot
On the growth mechanism of a-Si:H
inferredcites →https://doi.org/10.1016/s0040-6090(98)01171-7openalex-snapshot
Deposition, defect and weak bond formation processes in a-Si:H
inferredcites →https://doi.org/10.1016/s0927-0256(03)00111-3openalex-snapshot
A generalized synchronous transit method for transition state location
inferredcites →https://doi.org/10.1016/s1359-0286(02)00095-5openalex-snapshot
Advances in plasma-enhanced chemical vapor deposition of silicon films at low temperatures
inferredcites →https://doi.org/10.1021/jp3002542openalex-snapshot
Development of Crystal Growth Simulator Based on Tight-Binding Quantum Chemical Molecular Dynamics Method and Its Application to Silicon Chemical Vapor Deposition Processes
inferredcites →https://doi.org/10.1021/jp4021504openalex-snapshot
Different Crystal Growth Mechanisms of Si(001)-(2 × 1):H during Plasma-Enhanced Chemical Vapor Deposition of SiH3 and SiH2 Radicals: Tight-Binding Quantum Chemical Molecular Dynamics Simulations
inferredcites →https://doi.org/10.1063/1.1316015openalex-snapshot
From molecules to solids with the DMol3 approach
inferredcites →https://doi.org/10.1063/1.1334639openalex-snapshot
Deposition of microcrystalline silicon: Direct evidence for hydrogen-induced surface mobility of Si adspecies
inferredcites →https://doi.org/10.1063/1.1543237openalex-snapshot
Temperature dependence of the surface roughness evolution during hydrogenated amorphous silicon film growth
inferredcites →https://doi.org/10.1063/1.336920openalex-snapshot
Film formation mechanisms in the plasma deposition of hydrogenated amorphous silicon
inferredcites →https://doi.org/10.1063/1.370639openalex-snapshot
Growth mechanism of hydrogenated amorphous silicon studied by in situ scanning tunneling microscopy
inferredcites →https://doi.org/10.1103/physrevb.13.5188openalex-snapshot
Special points for Brillouin-zone integrations
inferredcites →https://doi.org/10.1103/physrevb.45.13709openalex-snapshot
Fractional occupations and density-functional energies and forces
inferredcites →https://doi.org/10.1103/physrevb.47.3661openalex-snapshot
Defect formation during growth of hydrogenated amorphous silicon
inferredcites →https://doi.org/10.1103/physrevb.51.12947openalex-snapshot
Construction of tight-binding-like potentials on the basis of density-functional theory: Application to carbon
inferredcites →https://doi.org/10.1103/physrevb.56.4243openalex-snapshot
Surface roughening during plasma-enhanced chemical-vapor deposition of hydrogenated amorphous silicon on crystal silicon substrates
inferredcites →https://doi.org/10.1103/physrevb.58.7260openalex-snapshot
Self-consistent-charge density-functional tight-binding method for simulations of complex materials properties
inferredcites →https://doi.org/10.1103/physrevb.62.16808openalex-snapshot
Hydrogen elimination model of the formation of hydrogen bonding structures during the growth of hydrogenated amorphous silicon by plasma CVD
inferredcites →https://doi.org/10.1103/physrevb.65.035311openalex-snapshot
Surface transport kinetics in low-temperature silicon deposition determined from topography evolution
inferredcites →https://doi.org/10.1103/physrevb.75.235311openalex-snapshot
Quantitative estimate of H abstraction by thermal SiH3 on hydrogenated Si(001)(2×1)
inferredcites →https://doi.org/10.1103/physrevlett.100.046105openalex-snapshot
Thermal-Hydrogen Promoted Selective Desorption and Enhanced Mobility of Adsorbed Radicals in Silicon Film Growth
inferredcites →https://doi.org/10.1103/physrevlett.95.216102openalex-snapshot
Surface Smoothening Mechanism of Amorphous Silicon Thin Films
inferredcites →https://doi.org/10.1116/1.584566openalex-snapshot
I n s i t u ellipsometry of thin-film deposition: Implications for amorphous and microcrystalline Si growth
inferredcites →https://doi.org/10.1126/science.276.5311.377openalex-snapshot
Atomistic Processes in the Early Stages of Thin-Film Growth
inferredcites →https://doi.org/10.1126/science.285.5428.692openalex-snapshot
Photovoltaic Technology: The Case for Thin-Film Solar Cells
inferredcites →https://doi.org/10.1143/jjap.43.7909openalex-snapshot
Thin-Film Silicon –Growth Process and Solar Cell Application–

What points at this work

Incoming claims: where this work appears in other papers’ reference lists and arguments.

inferred← citeshttps://doi.org/10.2139/ssrn.4521664openalex-extracted
inferred← citeshttps://doi.org/10.1002/admi.202102340openalex-snapshot
Growth‐Related Formation Mechanism of I3‐Type Basal Stacking Fault in Epitaxially Grown Hexagonal Ge‐2H
inferred← citeshttps://doi.org/10.1002/ppap.201600145openalex-snapshot
Molecular Dynamics Simulations for Plasma‐Surface Interactions
inferred← citeshttps://doi.org/10.1007/s10854-017-6618-yopenalex-snapshot
Evolution of nanostructure in hydrogenated amorphous silicon thin films with substrate temperature studied by Raman mapping, Raman scattering and spectroscopic ellipsometry
inferred← citeshttps://doi.org/10.1016/b978-0-7020-7096-9.00010-0openalex-snapshot
Optical techniques and microtools for subcellular delivery and sampling
inferred← citeshttps://doi.org/10.1016/j.apsusc.2017.02.086openalex-snapshot
Simulation study of temperature-dependent diffusion behaviors of Ag/Ag(001) at low substrate temperature
inferred← citeshttps://doi.org/10.1016/j.surfcoat.2023.130257openalex-snapshot
Plasma Deposited Amorphous Silicon Passivation Layers on Inas Surfaces
inferred← citeshttps://doi.org/10.1021/acs.jpcc.5b08561openalex-snapshot
Origin of Chemical Order in a-SixCyHz: Density-Functional Tight-Binding Molecular Dynamics and Statistical Thermodynamics Calculations
inferred← citeshttps://doi.org/10.1021/acsami.5b11910openalex-snapshot
Atomistic Mechanisms of Chemical Mechanical Polishing of a Cu Surface in Aqueous H 2 O 2 : Tight-Binding Quantum Chemical Molecular Dynamics Simulations
inferred← citeshttps://doi.org/10.1021/acsami.8b00794openalex-snapshot
Understanding the Mechanism of SiC Plasma-Enhanced Chemical Vapor Deposition (PECVD) and Developing Routes toward SiC Atomic Layer Deposition (ALD) with Density Functional Theory
inferred← citeshttps://doi.org/10.1039/c5cp06515aopenalex-snapshot
Tight-binding quantum chemical molecular dynamics simulations for the elucidation of chemical reaction dynamics in SiC etching with SF 6 /O 2 plasma
inferred← citeshttps://doi.org/10.1039/d0ce00817fopenalex-snapshot
Transmission electron microscopy characterization of low temperature boron doped silicon epitaxial films
inferred← citeshttps://doi.org/10.1063/1.4960106openalex-snapshot
Insights into gold-catalyzed plasma-assisted CVD growth of silicon nanowires
inferred← citeshttps://doi.org/10.1063/1.4996797openalex-snapshot
Two dimensional radial gas flows in atmospheric pressure plasma-enhanced chemical vapor deposition
inferred← citeshttps://doi.org/10.1149/2162-8777/acabe4openalex-snapshot
Low-Temperature Epitaxial Growth by Quiescent Plasma-Enhanced Chemical Vapor Deposition at Atmospheric Pressure
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