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Evolutionary phase diagrams for plasma-enhanced chemical vapor deposition of silicon thin films from hydrogen-diluted silane

https://doi.org/10.1063/1.124992
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Outgoing claims: the papers this work cites, builds on, or argues with.

inferredcites →https://doi.org/10.1016/0022-3093(87)90328-0openalex-snapshot
Guiding principle for preparing highly photosensitive Si-based amorphous alloys
inferredcites →https://doi.org/10.1016/s0040-6090(97)00764-5openalex-snapshot
Advances in multichannel spectroscopic ellipsometry
inferredcites →https://doi.org/10.1063/1.106355openalex-snapshot
A novel preparation technique for preparing hydrogenated amorphous silicon with a more rigid and stable Si network
inferredcites →https://doi.org/10.1063/1.118064openalex-snapshot
Parameterization of the optical functions of amorphous materials in the interband region
inferredcites →https://doi.org/10.1063/1.118155openalex-snapshot
Erratum: ‘‘Parameterization of the optical functions of amorphous materials in the interband region’’ [Appl. Phys. Lett. 69, 371 (1996)]
inferredcites →https://doi.org/10.1063/1.119928openalex-snapshot
Effect of hydrogen dilution on the structure of amorphous silicon alloys
inferredcites →https://doi.org/10.1063/1.122194openalex-snapshot
Optimization of hydrogenated amorphous silicon p–i–n solar cells with two-step i layers guided by real-time spectroscopic ellipsometry
inferredcites →https://doi.org/10.1063/1.123693openalex-snapshot
Structural, defect, and device behavior of hydrogenated amorphous Si near and above the onset of microcrystallinity
inferredcites →https://doi.org/10.1063/1.328849openalex-snapshot
On light-induced effect in amorphous hydrogenated silicon
inferredcites →https://doi.org/10.1063/1.363541openalex-snapshot
Hydrogen in amorphous and microcrystalline silicon films prepared by hydrogen dilution
inferredcites →https://doi.org/10.1063/1.370323openalex-snapshot
Real time spectroscopic ellipsometry studies of the nucleation and growth of p-type microcrystalline silicon films on amorphous silicon using B2H6, B(CH3)3 and BF3 dopant source gases
inferredcites →https://doi.org/10.1063/1.89674openalex-snapshot
Reversible conductivity changes in discharge-produced amorphous Si
inferredcites →https://doi.org/10.1103/physrevb.47.3661openalex-snapshot
Defect formation during growth of hydrogenated amorphous silicon
inferredcites →https://doi.org/10.1143/jjap.35.26openalex-snapshot
New Interpretation of the Effect of Hydrogen Dilution of Silane on Glow-Discharged Hydrogenated Amorphous Silicon for Stable Solar Cells
inferredcites →https://doi.org/10.1557/proc-336-595openalex-snapshot
Process-Property Relationships For a-Si1-xCx:H Deposition: Excursions in Parameter Space Guided by Real Time Spectroellipsometry
inferredcites →https://doi.org/10.1557/proc-420-33openalex-snapshot
Material Basis of Highly Stable a-Si:H Solar Cells

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Incoming claims: where this work appears in other papers’ reference lists and arguments.

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Strategies for realizing high-efficiency silicon heterojunction solar cells
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Temperature dependence of the optical functions of amorphous silicon-based materials: application to in situ temperature measurements by spectroscopic ellipsometry
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inferred← citeshttps://doi.org/10.1557/proc-715-a18.2openalex-snapshot
Effects of Deposition Temperature and Film Thickness on the Structural, Electrical, and Optical Properties of Germanium Thin Films
inferred← citeshttps://doi.org/10.1557/proc-715-a26.1openalex-snapshot
Correlation of Light-induced Enhancement of Open-Circuit Voltage and Structural Change of Heterogeneous Silicon Solar Cells
inferred← citeshttps://doi.org/10.1557/proc-715-a5.4openalex-snapshot
Infrared Charge-Modulation Spectroscopy of Defects in Phosphorus Doped Amorphous Silicon
inferred← citeshttps://doi.org/10.1557/proc-715-a6.1openalex-snapshot
Protocrystalline Si:H p-type Layers for Maximization of the Open Circuit Voltage in a-Si:H n-i-p Solar Cells
inferred← citeshttps://doi.org/10.1557/proc-762-a5.10openalex-snapshot
Evolution of Crystallinity in Mixed-Phase (a+μc)-Si:H as Determined by Real Time Spectroscopic Ellipsometry
inferred← citeshttps://doi.org/10.1557/proc-762-a6.5openalex-snapshot
Structural Evolution of Nanocrystalline Germanium Thin Films with Film Thickness and Substrate Temperature
inferred← citeshttps://doi.org/10.1557/proc-762-a6.7openalex-snapshot
Process Parameters for Poly-Silicon Deposition at a High Growth Rate (1-7 nm/s) by Hot-Wire Chemical Vapour Deposition
inferred← citeshttps://doi.org/10.1557/proc-762-a7.2openalex-snapshot
Recombination in n-i-p (Substrate) a-Si:H Solar Cells with Silicon Carbide and Protocrystalline p-Layers
inferred← citeshttps://doi.org/10.1557/proc-762-a7.3openalex-snapshot
Nanocrystalline silicon ( nc-Si ) from single ion beam sputtering
inferred← citeshttps://doi.org/10.1557/proc-769-h6.8openalex-snapshot
Evolution of Nanocrystalline Silicon Layers Deposited at 150°C for Thin Film Transistor Channels
inferred← citeshttps://doi.org/10.1590/s0038-23532009000100025openalex-snapshot
The structural characterisation of HWCVD-deposited nanocrystalline silicon films
inferred← citeshttps://doi.org/10.17725/rensit.2015.07.015openalex-snapshot
THIN-FILM SILICON SOLAR CELLS ON FLEXIBLE SUBSTRATES
inferred← citeshttps://doi.org/10.3390/books978-3-03842-217-4openalex-snapshot
Photovoltaic Materials and Electronic Devices
inferred← citeshttps://doi.org/10.3390/coatings10080759openalex-snapshot
Versatility of Nanocrystalline Silicon Films: from Thin-Film to Perovskite/c-Si Tandem Solar Cell Applications
inferred← citeshttps://doi.org/10.3390/ma11010145openalex-snapshot
Real Time Spectroscopic Ellipsometry Analysis of First Stage CuIn1−xGaxSe2 Growth: Indium-Gallium Selenide Co-Evaporation
inferred← citeshttps://doi.org/10.3390/ma9030128openalex-snapshot
Spectroscopic Ellipsometry Studies of n-i-p Hydrogenated Amorphous Silicon Based Photovoltaic Devices
inferred← citeshttps://doi.org/10.4102/sajs.v105i1/2.41openalex-snapshot
The structural characterisation of HWCVD-deposited nanocrystalline silicon films
inferred← citeshttps://doi.org/10.4313/jkem.2012.25.12.1009openalex-snapshot
Energy Materials : Effect of Hydrogen Dilution Ratio on The Si Hetero-junction Interface and Its Application to Solar Cells
inferred← citeshttps://doi.org/10.70675/10bf2b22z3074z4eefzb68fz77c2e0cb9113openalex-snapshot
Novel Concepts in the PECVD Deposition of Silicon Thin Films : from Plasma Chemistry to Photovoltaic Device Applications
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