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Identification of nanoindentation-induced phase changes in silicon by in situ electrical characterization

https://doi.org/10.1063/1.2724803
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What this work says

Outgoing claims: the papers this work cites, builds on, or argues with.

inferredcites →https://doi.org/10.1002/pssa.2210140121openalex-snapshot
Phase transition in diamond-structure crystals during hardness measurements
inferredcites →https://doi.org/10.1016/j.actamat.2004.12.025openalex-snapshot
Indentation-induced phase transformations in silicon: influences of load, rate and indenter angle on the transformation behavior
inferredcites →https://doi.org/10.1063/1.1150122openalex-snapshot
Microindentation device for in situ study of pressure-induced phase transformations
inferredcites →https://doi.org/10.1063/1.126300openalex-snapshot
Effect of phase transformations on the shape of the unloading curve in the nanoindentation of silicon
inferredcites →https://doi.org/10.1063/1.1332110openalex-snapshot
Transmission electron microscopy observation of deformation microstructure under spherical indentation in silicon
inferredcites →https://doi.org/10.1063/1.2210767openalex-snapshot
Phase transformations induced by spherical indentation in ion-implanted amorphous silicon
inferredcites →https://doi.org/10.1063/1.2339039openalex-snapshot
High pressure crystalline phase formation during nanoindentation: Amorphous versus crystalline silicon
inferredcites →https://doi.org/10.1063/1.364340openalex-snapshot
Phase transformations of silicon caused by contact loading
inferredcites →https://doi.org/10.1080/01418610208235704openalex-snapshot
Contact resistance and phase transformations during nanoindentation of silicon
inferredcites →https://doi.org/10.1103/physrevb.67.085205openalex-snapshot
In situelectrical characterization of phase transformations in Si during indentation
inferredcites →https://doi.org/10.1103/physrevlett.60.2156openalex-snapshot
Amorphization and Conductivity of Silicon and Germanium Induced by Indentation
inferredcites →https://doi.org/10.1557/jmr.1991.1129openalex-snapshot
New evidence for a pressure-induced phase transformation during the indentation of silicon
inferredcites →https://doi.org/10.1557/jmr.1992.0961openalex-snapshot
Electrical resistance of metallic contacts on silicon and germanium during indentation
inferredcites →https://doi.org/10.1557/jmr.1993.0830openalex-snapshot
Observation, analysis, and simulation of the hysteresis of silicon using ultra-micro-indentation with spherical indenters
inferredcites →https://doi.org/10.1557/jmr.1999.0310openalex-snapshot
Ultra-micro-indentation of silicon and compound semiconductors with spherical indenters
inferredcites →https://doi.org/10.1557/jmr.2000.0124openalex-snapshot
Cyclic Nanoindentation and Raman Microspectroscopy Study of Phase Transformations in Semiconductors
inferredcites →https://doi.org/10.1557/jmr.2000.0253openalex-snapshot
Size-dependent Phase Transformations During Point Loading of Silicon
inferredcites →https://doi.org/10.1557/jmr.2001.0209openalex-snapshot
Mechanical deformation in silicon by micro-indentation
inferredcites →https://doi.org/10.1557/jmr.2003.0164openalex-snapshot
Effect of indentation unloading conditions on phase transformation induced events in silicon
inferredcites →https://doi.org/10.1557/jmr.2004.0403openalex-snapshot
Examining pressure-induced phase transformations in silicon by spherical indentation and Raman spectroscopy: A statistical study
inferredcites →https://doi.org/10.1557/jmr.2007.0100openalex-snapshot
An in situ electrical measurement technique via a conducting diamond tip for nanoindentation in silicon

What points at this work

Incoming claims: where this work appears in other papers’ reference lists and arguments.

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Nanoscale Electro-Mechanical Stability of Carbon Films: The Ex-Situ and In-Situ Electro-Nanoindentation Study
inferred← citeshttps://doi.org/10.1002/adem.202001494openalex-snapshot
Understanding Nanoscale Plasticity by Quantitative In Situ Conductive Nanoindentation
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Nanoscale Characterization of Energy Generation from Piezoelectric Thin Films
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Hexagonal Silicon Formation and Its Phase Transformability
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Piezoelectric Performance of Cubic‐Phase BaTiO3 Nanoparticles Vertically Aligned via Electric Field
inferred← citeshttps://doi.org/10.1007/s00339-016-0142-4openalex-snapshot
Volumetric and timescale analysis of phase transformation in single-crystal silicon during nanoindentation
inferred← citeshttps://doi.org/10.1007/s11665-018-3493-5openalex-snapshot
A Review on Micro- and Nanoscratching/Tribology at High Temperatures: Instrumentation and Experimentation
inferred← citeshttps://doi.org/10.1007/s11671-008-9130-8openalex-snapshot
Cathodoluminescence and Cross-sectional Transmission Electron Microscopy Studies for Deformation Behaviors of GaN Thin Films Under Berkovich Nanoindentation
inferred← citeshttps://doi.org/10.1016/j.actamat.2013.04.049openalex-snapshot
Simultaneous measurement of mechanical and electrical contact resistances during nanoindentation of NiTi shape memory alloys
inferred← citeshttps://doi.org/10.1016/j.actamat.2014.02.028openalex-snapshot
Quantitative electromechanical characterization of materials using conductive ceramic tips
inferred← citeshttps://doi.org/10.1016/j.apsusc.2008.04.078openalex-snapshot
Berkovich indentation-induced deformation behaviors of GaN thin films observed using cathodoluminescence and cross-sectional transmission electron microscopy
inferred← citeshttps://doi.org/10.1016/j.apsusc.2013.08.088openalex-snapshot
Mechanical and electrical properties of GeSb2Te4 film with external voltage applied
inferred← citeshttps://doi.org/10.1016/j.apsusc.2015.04.193openalex-snapshot
Modification of mechanical properties of Si crystal irradiated by Kr-beam
inferred← citeshttps://doi.org/10.1016/j.apsusc.2025.164165openalex-snapshot
Continuous phase transformation in monocrystalline silicon during indentation
inferred← citeshttps://doi.org/10.1016/j.commatsci.2021.110344openalex-snapshot
Evolution of high-pressure metastable phase Si-XIII during silicon nanoindentation: A molecular dynamics study
inferred← citeshttps://doi.org/10.1016/j.electacta.2010.01.024openalex-snapshot
Fabrication of nanopatterned metal layers on silicon by nanoindentation/nanoscratching and electrodeposition
inferred← citeshttps://doi.org/10.1016/j.jmps.2016.03.017openalex-snapshot
Stress induced phase transitions in silicon
inferred← citeshttps://doi.org/10.1016/j.matdes.2021.109545openalex-snapshot
Mechanical characterization and properties of continuous wave laser irradiated Ge2Sb2Te5 stripes
inferred← citeshttps://doi.org/10.1016/j.measurement.2019.107286openalex-snapshot
Table top experimental setup for electrical contact resistance measurement during indentation
inferred← citeshttps://doi.org/10.1016/j.measurement.2023.113974openalex-snapshot
An uncertainty-based quality evaluation tool for nanoindentation systems
inferred← citeshttps://doi.org/10.1016/j.microrel.2011.01.005openalex-snapshot
Luminescence properties of mechanically nanoindented ZnSe
inferred← citeshttps://doi.org/10.1016/j.pmatsci.2012.08.001openalex-snapshot
In situ nanoindentation: Probing nanoscale multifunctionality
inferred← citeshttps://doi.org/10.1016/j.procir.2026.01.182openalex-snapshot
Definition of a nanoindentation-based methodology to optimize process parameters of coating deposition on silicon wafer
inferred← citeshttps://doi.org/10.1016/j.scriptamat.2015.02.008openalex-snapshot
New insights into phase transformations in single crystal silicon by controlled cyclic nanoindentation
inferred← citeshttps://doi.org/10.1016/j.surfcoat.2019.02.082openalex-snapshot
Failure mechanism and protective role of ultrathin ta-C films on Si (100) during cyclic nano-impact
inferred← citeshttps://doi.org/10.1016/j.tsf.2021.138891openalex-snapshot
Development of a multifunctional nanoindenter integrated in-situ Scanning Electron Microscope - application to the monitoring of piezoresponse and electro-mechanical failures
inferred← citeshttps://doi.org/10.1016/j.vacuum.2024.113891openalex-snapshot
Exploring the edge effect of single crystal silicon in nanoindentation with two indenters: A molecular dynamics investigation
inferred← citeshttps://doi.org/10.1021/nl103637kopenalex-snapshot
Electrical Self-Healing of Mechanically Damaged Zinc Oxide Nanobelts
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An electric current spike linked to nanoscale plasticity
inferred← citeshttps://doi.org/10.1039/c6ra23534dopenalex-snapshot
Direct contact four-point probe characterization of Si microwire absorbers for artificial photosynthesis
inferred← citeshttps://doi.org/10.1063/1.2781394openalex-snapshot
Formation and growth of nanoindentation-induced high pressure phases in crystalline and amorphous silicon
inferred← citeshttps://doi.org/10.1063/1.3130154openalex-snapshot
Understanding pressure-induced phase-transformation behavior in silicon through in situ electrical probing under cyclic loading conditions
inferred← citeshttps://doi.org/10.1063/1.3151967openalex-snapshot
Rate-dependent phase transformations in nanoindented germanium
inferred← citeshttps://doi.org/10.1063/1.3575641openalex-snapshot
Wave function engineering: Other phases of Si for photovoltaic applications
inferred← citeshttps://doi.org/10.1063/1.3665250openalex-snapshot
Anisotropic effect of piezoelectric polarization on Schottky barrier height in elastically deformed bulk GaN crystal
inferred← citeshttps://doi.org/10.1063/1.4906034openalex-snapshot
Piezoresistive characterization of bottom-up, n-type silicon microwires undergoing bend deformation
inferred← citeshttps://doi.org/10.1063/5.0032682openalex-snapshot
Resistive-nanoindentation on gold: Experiments and modeling of the electrical contact resistance
inferred← citeshttps://doi.org/10.1063/5.0058501openalex-snapshot
In situ nanoelectromechanical characterization of phase transformation in Si phononic crystal during nanoindentation
inferred← citeshttps://doi.org/10.1088/1361-6641/abbba7openalex-snapshot
Electrical-mechanical coupling performance of gallium arsenide under nanoindentation
inferred← citeshttps://doi.org/10.1088/1742-6596/281/1/012028openalex-snapshot
Nanoindentation of semiconductors: experiment and atomistic simulations
inferred← citeshttps://doi.org/10.1103/physrevb.78.161202openalex-snapshot
Ab initiostudy of the optical properties of Si-XII
inferred← citeshttps://doi.org/10.1103/physrevb.83.075316openalex-snapshot
Experimental evidence for semiconducting behavior of Si-XII
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Computational search for direct band gap silicon crystals
inferred← citeshttps://doi.org/10.1109/ulis.2018.8354754openalex-snapshot
Nanoindentation effects on the electrical caracterizaron in Ψ-MOSFET configuration
inferred← citeshttps://doi.org/10.1111/jace.20338openalex-snapshot
A nanoindentation approach for unveiling the photoplastic effects by a “light switch”: A case study on ZnO
inferred← citeshttps://doi.org/10.1134/s0036029516100037openalex-snapshot
In situ detection of the phase transformations in silicon during nanoindentation
inferred← citeshttps://doi.org/10.1557/jmr.2007.0100openalex-snapshot
An in situ electrical measurement technique via a conducting diamond tip for nanoindentation in silicon
inferred← citeshttps://doi.org/10.1557/jmr.2009.0249openalex-snapshot
Phase transformations in (111) Si after spherical indentation
inferred← citeshttps://doi.org/10.1557/jmr.2011.377openalex-snapshot
Structural characterization of B-doped diamond nanoindentation tips
inferred← citeshttps://doi.org/10.1557/mrc.2019.74openalex-snapshot
Resistive-nanoindentation: contact area monitoring by real-time electrical contact resistance measurement
inferred← citeshttps://doi.org/10.1557/proc-1146-nn02-06openalex-snapshot
In-situ electrical probing of zones of nanoindentation-induced phases of silicon
inferred← citeshttps://doi.org/10.3103/s1068375511030185openalex-snapshot
Changes in the electric resistance of silicon under cyclic nanoindentation
inferred← citeshttps://doi.org/10.3103/s1068375512050122openalex-snapshot
Influence of loading holding time under quasistatic indentation on electrical properties and phase transformations of silicon
inferred← citeshttps://doi.org/10.3390/ma18174011openalex-snapshot
Incipient Plasticity of Si and GaAs: Review and Perspectives
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