On the public citation graph
Separate control of the ion flux and ion energy in capacitively coupled radio-frequency discharges using voltage waveform tailoring
0 signed · 120 inferred · view as graph
Inferred edges come from two machine sources: sweeps of open repository metadata (mostly SSRN and Zenodo), and a bulk OpenAlex citation snapshot. Every row below is labelled with the one it came from. Neither is a complete citation index — absence here is not evidence of absence.
Is this your work? Sign in with ORCID and put your name on the
claims that are yours.
Reference health. See whether every reference in this work resolves to a
known work and none has been retracted — and get a dated CiteStamped
badge you can embed.
What this work says
Outgoing claims: the papers this work cites, builds on, or argues with.
inferredcites →https://doi.org/10.1002/0471724254openalex-snapshot
Principles of Plasma Discharges and Materials Processing
inferredcites →https://doi.org/10.1016/j.jnoncrysol.2012.01.014openalex-snapshot
Hydrogenated microcrystalline silicon thin films deposited by RF-PECVD under low ion bombardment energy using voltage waveform tailoring
inferredcites →https://doi.org/10.1016/s1387-3806(02)00940-5openalex-snapshot
Interpretation of ion distribution functions measured by a combined energy and mass analyzer
inferredcites →https://doi.org/10.1063/1.1652247openalex-snapshot
The hairpin resonator: A plasma density measuring technique revisited
inferredcites →https://doi.org/10.1063/1.2194824openalex-snapshot
Nonlinear electron resonance heating in capacitive radio frequency discharges
inferredcites →https://doi.org/10.1063/1.2795634openalex-snapshot
Comparison of measurements and particle-in-cell simulations of ion energy distribution functions in a capacitively coupled radio-frequency discharge
inferredcites →https://doi.org/10.1063/1.3110056openalex-snapshot
Self-excited nonlinear plasma series resonance oscillations in geometrically symmetric capacitively coupled radio frequency discharges
inferredcites →https://doi.org/10.1063/1.3505794openalex-snapshot
Hydrogenated amorphous silicon deposited under accurately controlled ion bombardment using pulse-shaped substrate biasing
inferredcites →https://doi.org/10.1063/1.3699222openalex-snapshot
Microcrystalline silicon solar cells deposited using a plasma process excited by tailored voltage waveforms
inferredcites →https://doi.org/10.1063/1.4712128openalex-snapshot
Enhanced sheath heating in capacitively coupled discharges due to non-sinusoidal voltage waveforms
inferredcites →https://doi.org/10.1088/0022-3727/41/16/165202openalex-snapshot
On the possibility of making a geometrically symmetric RF-CCP discharge electrically asymmetric
inferredcites →https://doi.org/10.1088/0022-3727/42/2/025205openalex-snapshot
PIC simulations of the separate control of ion flux and energy in CCRF discharges via the electrical asymmetry effect
inferredcites →https://doi.org/10.1088/0022-3727/42/9/092005openalex-snapshot
The electrical asymmetry effect in capacitively coupled radio frequency discharges – measurements of dc self bias, ion energy and ion flux
inferredcites →https://doi.org/10.1088/0022-3727/43/41/412001openalex-snapshot
Nanocrystalline silicon film growth morphology control through RF waveform tailoring
inferredcites →https://doi.org/10.1088/0022-3727/45/39/395203openalex-snapshot
Control of the ion flux and ion energy in CCP discharges using non-sinusoidal voltage waveforms
inferredcites →https://doi.org/10.1088/0963-0252/14/4/012openalex-snapshot
Hairpin resonator probe measurements in RF plasmas
inferredcites →https://doi.org/10.1088/0963-0252/16/2/007openalex-snapshot
Arbitrary substrate voltage wave forms for manipulating energy distribution of bombarding ions during plasma processing
inferredcites →https://doi.org/10.1088/0963-0252/20/1/015017openalex-snapshot
The electrical asymmetry effect in multi-frequency capacitively coupled radio frequency discharges
inferredcites →https://doi.org/10.1103/physrevlett.96.205001openalex-snapshot
Collisionless Heating in Capacitive Discharges Enhanced by Dual-Frequency Excitation
inferredcites →https://doi.org/10.1109/tps.2004.924575openalex-snapshot
Numerical Modeling of Electron Beams Accelerated by the Radio Frequency Boundary Sheath
What points at this work
Incoming claims: where this work appears in other papers’ reference lists and arguments.
inferred← citeshttps://doi.org/10.2139/ssrn.4755939openalex-extracted
Study of Plasma-Surface Interactions Using Different Types of Plasma Discharge Excitations
inferred← citeshttps://doi.org/10.1002/ppap.201600117openalex-snapshot
A Simple Model for Ion Flux‐Energy Distribution Functions in Capacitively Coupled Radio‐Frequency Plasmas Driven by Arbitrary Voltage Waveforms
inferred← citeshttps://doi.org/10.1002/ppap.201700087openalex-snapshot
Magnetical asymmetric effect in geometrically and electrically symmetric capacitively coupled plasma
inferred← citeshttps://doi.org/10.1007/s41614-022-00092-2openalex-snapshot
Two-dimensional particle-in-cell simulation parallelized with graphics processing units for the investigation of plasma kinetics in a dual-frequency capacitively coupled plasma
inferred← citeshttps://doi.org/10.1016/j.physleta.2023.128745openalex-snapshot
Magnetic field induced electron temperature inhomogeneity effects on discharge properties in cylindrical capacitively coupled plasmas
inferred← citeshttps://doi.org/10.1017/s0022377826102098openalex-snapshot
Experimental investigation of particle levitation in the sheath of single-frequency and dual-frequency discharges in push–pull mode
inferred← citeshttps://doi.org/10.1063/1.4773540openalex-snapshot
Radio frequency current-voltage probe for impedance and power measurements in multi-frequency unmatched loads
inferred← citeshttps://doi.org/10.1063/1.4802241openalex-snapshot
Frequency dependence of the electrical asymmetry effect in dual-frequency capacitively coupled discharges
inferred← citeshttps://doi.org/10.1063/1.4815823openalex-snapshot
Wall current probe: A non-invasive in situ plasma diagnostic for space and time resolved current density distribution measurement
inferred← citeshttps://doi.org/10.1063/1.4816952openalex-snapshot
Simulation study of wave phenomena from the sheath region in single frequency capacitively coupled plasma discharges; field reversals and ion reflection
inferred← citeshttps://doi.org/10.1063/1.4884017openalex-snapshot
Kinetic simulation of capacitively coupled plasmas driven by trapezoidal asymmetric voltage pulses
inferred← citeshttps://doi.org/10.1063/1.4907567openalex-snapshot
Tailoring the nonlinear frequency coupling between odd harmonics for the optimisation of charged particle dynamics in capacitively coupled oxygen plasmas
inferred← citeshttps://doi.org/10.1063/1.4907887openalex-snapshot
Prevention of ion flux lateral inhomogeneities in large area capacitive radio frequency plasmas via the electrical asymmetry effect
inferred← citeshttps://doi.org/10.1063/1.4921399openalex-snapshot
Power supply and impedance matching to drive technological radio-frequency plasmas with customized voltage waveforms
inferred← citeshttps://doi.org/10.1063/1.4922631openalex-snapshot
Control of ion energy distributions using phase shifting in multi-frequency capacitively coupled plasmas
inferred← citeshttps://doi.org/10.1063/1.4937403openalex-snapshot
Experimental investigations of electron heating dynamics and ion energy distributions in capacitive discharges driven by customized voltage waveforms
inferred← citeshttps://doi.org/10.1063/1.4947453openalex-snapshot
Slope and amplitude asymmetry effects on low frequency capacitively coupled carbon tetrafluoride plasmas
inferred← citeshttps://doi.org/10.1063/1.4973889openalex-snapshot
The effect of intermediate frequency on sheath dynamics in collisionless current driven triple frequency capacitive plasmas
inferred← citeshttps://doi.org/10.1063/1.5009484openalex-snapshot
Electron series resonance in a magnetized 13.56 MHz symmetric capacitive coupled discharge
inferred← citeshttps://doi.org/10.1063/1.5023884openalex-snapshot
The electrical asymmetry effect in a multi frequency geometrically asymmetric capacitively coupled plasma: A study by a nonlinear global model
inferred← citeshttps://doi.org/10.1063/1.5045816openalex-snapshot
Plasma density and ion energy control via driving frequency and applied voltage in a collisionless capacitively coupled plasma discharge
inferred← citeshttps://doi.org/10.1063/1.5054607openalex-snapshot
Pulsed DC bias for the study of negative-ion production on surfaces of insulating materials in low pressure hydrogen plasmas
inferred← citeshttps://doi.org/10.1063/1.5118762openalex-snapshot
Transverse magnetic field effects on spatial electron temperature distribution in a 13.56 MHz parallel plate capacitive discharge
inferred← citeshttps://doi.org/10.1063/5.0045947openalex-snapshot
Non-linear effects and electron heating dynamics in radio-frequency capacitively coupled plasmas with a non-uniform transverse magnetic field
inferred← citeshttps://doi.org/10.1063/5.0061605openalex-snapshot
Ion energy distribution function in very high frequency capacitive discharges excited by saw-tooth waveform
inferred← citeshttps://doi.org/10.1063/5.0085311openalex-snapshot
The effects of match circuit on the breakdown process of capacitively coupled plasma driven by radio frequency
inferred← citeshttps://doi.org/10.1063/5.0145263openalex-snapshot
Scale-invariant resonance characteristics in magnetized capacitive radio frequency plasmas
inferred← citeshttps://doi.org/10.1063/5.0160506openalex-snapshot
Discharge characteristics of a low-pressure geometrically asymmetric cylindrical capacitively coupled plasma with an axisymmetric magnetic field
inferred← citeshttps://doi.org/10.1063/5.0344454openalex-snapshot
Ion energy distribution transitions in capacitive discharges caused by abnormal dc self-bias formation induced by very-low-frequency voltage waveform tailoring
inferred← citeshttps://doi.org/10.1088/0022-3727/45/46/465205openalex-snapshot
The effect of the driving frequencies on the electrical asymmetry of dual-frequency capacitively coupled plasmas
inferred← citeshttps://doi.org/10.1088/0022-3727/46/13/135201openalex-snapshot
Secondary electron induced asymmetry in capacitively coupled plasmas
inferred← citeshttps://doi.org/10.1088/0022-3727/46/23/235201openalex-snapshot
Radio-frequency capacitively coupled plasmas excited by tailored voltage waveforms: comparison of experiment and particle-in-cell simulations
inferred← citeshttps://doi.org/10.1088/0022-3727/49/26/265203openalex-snapshot
Tailored voltage waveform capacitively coupled plasmas in electronegative gases: frequency dependence of asymmetry effects
inferred← citeshttps://doi.org/10.1088/0741-3335/55/12/124002openalex-snapshot
Capacitively coupled radio-frequency plasmas excited by tailored voltage waveforms
inferred← citeshttps://doi.org/10.1088/0963-0252/22/4/045016openalex-snapshot
Modelling of electric characteristics of capacitively coupled discharges including nonlinear effects of sheaths
inferred← citeshttps://doi.org/10.1088/0963-0252/22/6/065009openalex-snapshot
Electron heating and control of ion properties in capacitive discharges driven by customized voltage waveforms
inferred← citeshttps://doi.org/10.1088/0963-0252/22/6/065013openalex-snapshot
Theory for the self-bias formation in capacitively coupled plasmas excited by arbitrary waveforms
inferred← citeshttps://doi.org/10.1088/0963-0252/23/1/015001openalex-snapshot
Ion distribution functions at the electrodes of capacitively coupled high-pressure hydrogen discharges
inferred← citeshttps://doi.org/10.1088/0963-0252/23/6/065010openalex-snapshot
Ion flux asymmetry in radiofrequency capacitively-coupled plasmas excited by sawtooth-like waveforms
inferred← citeshttps://doi.org/10.1088/0963-0252/23/6/065049openalex-snapshot
Radio-frequency capacitively coupled plasmas in hydrogen excited by tailored voltage waveforms: comparison of simulations with experiments
inferred← citeshttps://doi.org/10.1088/0963-0252/24/1/015021openalex-snapshot
Control and optimization of the slope asymmetry effect in tailored voltage waveforms for capacitively coupled plasmas
inferred← citeshttps://doi.org/10.1088/0963-0252/24/2/025037openalex-snapshot
Collisionless sheath heating in current-driven capacitively coupled plasma discharges via higher order sinusoidal signals
inferred← citeshttps://doi.org/10.1088/0963-0252/24/4/044009openalex-snapshot
Electron heating via self-excited plasma series resonance in geometrically symmetric multi-frequency capacitive plasmas
inferred← citeshttps://doi.org/10.1088/0963-0252/24/4/045013openalex-snapshot
Customized ion flux-energy distribution functions in capacitively coupled plasmas by voltage waveform tailoring
inferred← citeshttps://doi.org/10.1088/0963-0252/25/1/013001openalex-snapshot
Tailored-waveform excitation of capacitively coupled plasmas and the electrical asymmetry effect
inferred← citeshttps://doi.org/10.1088/0963-0252/25/1/015004openalex-snapshot
Experimental and simulation study of a capacitively coupled oxygen discharge driven by tailored voltage waveforms
inferred← citeshttps://doi.org/10.1088/0963-0252/25/1/015024openalex-snapshot
The influence of electron reflection/sticking coefficients at the electrodes on plasma parameters in particle-in-cell simulations of capacitive radio-frequency plasmas
inferred← citeshttps://doi.org/10.1088/0963-0252/25/1/01lt02openalex-snapshot
Effect of gas properties on the dynamics of the electrical slope asymmetry effect in capacitive plasmas: comparison of Ar, H2and CF4
inferred← citeshttps://doi.org/10.1088/0963-0252/25/2/025006openalex-snapshot
Controlling the shape of the ion energy distribution at constant ion flux and constant mean ion energy with tailored voltage waveforms
inferred← citeshttps://doi.org/10.1088/0963-0252/25/4/045015openalex-snapshot
Electron power absorption dynamics in capacitive radio frequency discharges driven by tailored voltage waveforms in CF 4
inferred← citeshttps://doi.org/10.1088/0963-0252/25/4/045019openalex-snapshot
Capacitively coupled hydrogen plasmas sustained by tailored voltage waveforms: excitation dynamics and ion flux asymmetry
inferred← citeshttps://doi.org/10.1088/0963-0252/26/1/01lt01openalex-snapshot
Electrode-selective deposition/etching processes using an SiF4/H2/Ar plasma chemistry excited by sawtooth tailored voltage waveforms
inferred← citeshttps://doi.org/10.1088/1009-0630/18/12/06openalex-snapshot
Simulation of Dual-Electrode Capacitively Coupled Plasma Discharges
inferred← citeshttps://doi.org/10.1088/1361-6463/aa6299openalex-snapshot
Two-dimensional fluid simulation on transient behavior and plasma uniformity in pulsed RF CCP sustained in SiH 4 /N 2 /O 2
inferred← citeshttps://doi.org/10.1088/1361-6463/aaca64openalex-snapshot
Acoustic standing wave modulation of capacitively coupled plasmas
inferred← citeshttps://doi.org/10.1088/1361-6463/abefecopenalex-snapshot
Chemical kinetics and density measurements of OH in an atmospheric pressure He + O2 + H2O radiofrequency plasma
inferred← citeshttps://doi.org/10.1088/1361-6463/ac49b6openalex-snapshot
Self-consistent simulation of the impedance matching network for single frequency capacitively coupled plasma
inferred← citeshttps://doi.org/10.1088/1361-6463/ac5da5openalex-snapshot
Plasma asymmetry and electron and ion energy distribution function in capacitive discharges excited by tailored waveforms
inferred← citeshttps://doi.org/10.1088/1361-6463/ae6926openalex-snapshot
Upscaling of atmospheric pressure plasma jets for large area surface treatment via customized electrode designs
inferred← citeshttps://doi.org/10.1088/1361-6595/aa56d6openalex-snapshot
Power coupling mode transitions induced by tailored voltage waveforms in capacitive oxygen discharges
inferred← citeshttps://doi.org/10.1088/1361-6595/aa8dcdopenalex-snapshot
Controlling plasma properties under differing degrees of electronegativity using odd harmonic dual frequency excitation
inferred← citeshttps://doi.org/10.1088/1361-6595/aab870openalex-snapshot
Plasma characteristics in an electrically asymmetric capacitive discharge sustained by multiple harmonics: operating in the very high frequency regime
inferred← citeshttps://doi.org/10.1088/1361-6595/aad2cdopenalex-snapshot
Multi frequency matching for voltage waveform tailoring
inferred← citeshttps://doi.org/10.1088/1361-6595/aae199openalex-snapshot
Experimental investigations of the magnetic asymmetry effect in capacitively coupled radio frequency plasmas
inferred← citeshttps://doi.org/10.1088/1361-6595/ab067dopenalex-snapshot
Impact of charged species transport coefficients on self-bias voltage in an electrically asymmetric RF discharge
inferred← citeshttps://doi.org/10.1088/1361-6595/ab3c7copenalex-snapshot
Control of charged particle dynamics in capacitively coupled plasmas driven by tailored voltage waveforms in mixtures of Ar and CF 4
inferred← citeshttps://doi.org/10.1088/1361-6595/ab53a0openalex-snapshot
Magnetic control of nonlinear electron resonance heating in a capacitively coupled radio frequency discharge
inferred← citeshttps://doi.org/10.1088/1361-6595/ab9350openalex-snapshot
How to address the issue of uniformity in large area capacitively coupled plasmas? A modeling investigation
inferred← citeshttps://doi.org/10.1088/1361-6595/abb2e7openalex-snapshot
Electron power absorption dynamics in magnetized capacitively coupled radio frequency oxygen discharges
inferred← citeshttps://doi.org/10.1088/1361-6595/abbac2openalex-snapshot
High frequency sheath modulation and higher harmonic generation in a low pressure very high frequency capacitively coupled plasma excited by sawtooth waveform
inferred← citeshttps://doi.org/10.1088/1361-6595/abc6f7openalex-snapshot
Suppression of nonlinear standing wave excitation via the electrical asymmetry effect
inferred← citeshttps://doi.org/10.1088/1361-6595/abd0e0openalex-snapshot
Micro atmospheric pressure plasma jets excited in He/O 2 by voltage waveform tailoring: a study based on a numerical hybrid model and experiments
inferred← citeshttps://doi.org/10.1088/1361-6595/abe9f9openalex-snapshot
Electron dynamics in radio frequency magnetron sputtering argon discharges with a dielectric target
inferred← citeshttps://doi.org/10.1088/1361-6595/abf71bopenalex-snapshot
‘Virtual IED sensor’ for df rf CCP discharges
inferred← citeshttps://doi.org/10.1088/1361-6595/ac287bopenalex-snapshot
Magnetic attenuation of the self-excitation of the plasma series resonance in low-pressure capacitively coupled discharges
inferred← citeshttps://doi.org/10.1088/1361-6595/ac6130openalex-snapshot
Effects of humidity on the dynamics and electron recombination of a pin-to-pin discharge in He + H2O at atmospheric pressure
inferred← citeshttps://doi.org/10.1088/1361-6595/ac9a6eopenalex-snapshot
Application of similarity laws to dual-frequency capacitively coupled radio frequency plasmas with the electrical asymmetry effect
inferred← citeshttps://doi.org/10.1088/1361-6595/aca560openalex-snapshot
Foundations of plasmas as ion sources
inferred← citeshttps://doi.org/10.1088/1361-6595/ad5df7openalex-snapshot
Kinetic simulations of capacitively coupled plasmas driven by tailored voltage waveforms with multi-frequency matching
inferred← citeshttps://doi.org/10.1088/1361-6595/ad6587openalex-snapshot
Ozone production by an He+O2 radio-frequency atmospheric pressure plasma jet driven by tailored voltage waveforms
inferred← citeshttps://doi.org/10.1088/1361-6595/ad69c0openalex-snapshot
Energy efficient F atom generation and control in CF4 capacitively coupled plasmas driven by tailored voltage waveforms
inferred← citeshttps://doi.org/10.1088/1361-6595/add9c6openalex-snapshot
Plasma generation method with controlled ion energy: hollow cathode discharge excited by the superposition of double pulse voltage
inferred← citeshttps://doi.org/10.1088/1361-6595/ae2158openalex-snapshot
Multi-diagnostic characterization of inductively coupled discharges with tailored waveform substrate bias for precise control of plasma etching
inferred← citeshttps://doi.org/10.1088/1361-6595/ae5e06openalex-snapshot
Magnetically induced formation and disruption of striations in capacitively coupled radio-frequency CF 4 plasmas
inferred← citeshttps://doi.org/10.1088/1402-4896/acbf84openalex-snapshot
Experimental investigation of the radially-dependent ignition process in a pulsed capacitively coupled RF discharge: Effects of pressure, voltage and afterglow duration
inferred← citeshttps://doi.org/10.1088/1402-4896/addb00openalex-snapshot
Asymmetric radio-frequency capacitively coupled plasma discharges: revisit for better understanding via kinetic simulation and statistical analysis
inferred← citeshttps://doi.org/10.1103/physrevresearch.4.013059openalex-snapshot
Electron bounce-cyclotron resonance in capacitive discharges at low magnetic fields
inferred← citeshttps://doi.org/10.1109/tps.2021.3121999openalex-snapshot
An Electrical Impedance-Based Technique to Infer Plasma Density in a 13.56-MHz Magnetized Capacitive Coupled RF Discharge
inferred← citeshttps://doi.org/10.1109/tps.2025.3611452openalex-snapshot
Nonlinear Dynamics of Capacitively Coupled Plasma Excited by Tailored Voltage Waveform
inferred← citeshttps://doi.org/10.1116/1.4915248openalex-snapshot
Control of ion energy and angular distributions in dual-frequency capacitively coupled plasmas through power ratios and phase: Consequences on etch profiles
inferred← citeshttps://doi.org/10.1116/1.4990137openalex-snapshot
Heating mechanisms of magnetized capacitively coupled argon plasmas excited by tailored voltage waveforms
inferred← citeshttps://doi.org/10.1116/6.0001327openalex-snapshot
Effects of structured electrodes on electron power absorption and plasma uniformity in capacitive RF discharges
inferred← citeshttps://doi.org/10.1116/6.0003324openalex-snapshot
Effects of magnetic field gradient on capacitively coupled plasma driven by tailored voltage waveforms
inferred← citeshttps://doi.org/10.1515/chem-2015-0044openalex-snapshot
Electron heating modes and frequency coupling effects in dual-frequency capacitive CF4 plasmas
inferred← citeshttps://doi.org/10.3390/app11219873openalex-snapshot
Dual-Frequency Microwave Plasma Source Based on Microwave Coaxial Transmission Line
inferred← citeshttps://doi.org/10.3390/books978-3-0365-3898-3openalex-snapshot
The Applications of Plasma Techniques II
inferred← citeshttps://doi.org/10.33915/etd.7576openalex-snapshot
Control of charged particle dynamics and electron power absorption dynamics utilizing voltage waveform tailoring in capacitively driven radio-frequency plasmas
inferred← citeshttps://doi.org/10.35848/1347-4065/ad53b0openalex-snapshot
Deposition of hydrogenated amorphous carbon films by CH4/Ar capacitively coupled plasma using tailored voltage waveform discharges
inferred← citeshttps://doi.org/10.7498/aps.67.20181400openalex-snapshot
Effect of phase angle on plasma characteristics in electrically asymmetric capacitive discharge
inferred← citeshttps://doi.org/10.7498/aps.70.20210473openalex-snapshot
Electron heating dynamics and plasma parameters control in capacitively coupled plasma
Editorial review for independent work. ICSAC — the Institute for Complexity
Science and Advanced Computing — runs a structured editorial panel for researchers
publishing outside journals, and publishes on CiteStamp rails. Submission is free
and goes through ORCID: icsacinstitute.org/submit.