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Characterization of damage in ion implanted Ge

https://doi.org/10.1063/1.93643
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What this work says

Outgoing claims: the papers this work cites, builds on, or argues with.

inferredcites →https://doi.org/10.1007/978-1-4684-2064-7openalex-snapshot
Ion Implantation in Semiconductors and Other Materials
inferredcites →https://doi.org/10.1016/b978-0-12-002901-3.50009-xopenalex-snapshot
Ion Implantation in Semiconductors
inferredcites →https://doi.org/10.1080/00337577008236304openalex-snapshot
Diffusion effects in ion implanted germanium
inferredcites →https://doi.org/10.1080/00337577208230470openalex-snapshot
Voids in irradiated metals (Part I)

What points at this work

Incoming claims: where this work appears in other papers’ reference lists and arguments.

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Enabling Tailored Nanoporous Germanium by Quantifying the Evolution of Structural Properties During Self-Irradiation
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Damage Formation, Amorphization and Crystallization in Semiconductors at Elevated Temperatures
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Process-Induced Defects in Germanium
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Ion Beam Implantation Technology for Production of Thin Nanoporous Ge Layers Suited for Li-Ion Batteries
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Ion Beam Implantation Technology for Production of Thin Nanoporous Ge Layers Suited for Li-Ion Batteries
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Amorphous solid foam structures on germanium by heavy ion irradiation
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From holes to sponge at irradiated Ge surfaces with increasing ion energy—an effect of defect kinetics?
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Interfacial phase-change and geometry modify nanoscale pattern formation in irradiated thin films
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Optical Properties of GaSb Nanofibers
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Rutherford backscattering studies of surface density reduction in ion-implanted and excimer-laser-annealed Ge
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Ion implantation distributions in crystalline multilayer targets
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Optical hyperdoping
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Fabrication of high aspect ratio nanocell lattices by ion beam irradiation
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White luminescence emission from silicon implanted germanium
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Anomalous activation of shallow B+ implants in Ge
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Influence of microstructure on voids nucleation in nanoporous Ge
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High performance Ge ultra-shallow junctions fabricated by a novel formation technique featuring spin-on dopant and laser annealing for sub-10nm technology applications
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The application of FIB milling for specimen preparation from crystalline germanium
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Self-implantation energy and dose effects on Ge solid-phase epitaxial growth
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Porous structure formation in ion irradiated germanium
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Room temperature ferromagnetism in low dose ion implanted counter-doped Ge:Mn, As
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Effects of Ion-beam irradiation on microscale regions in Germanium
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Hydrogen in amorphous Si and Ge during solid phase epitaxy
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Insights for void formation in ion-implanted Ge
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Morphological changes in Ge surfaces induced by step ion beam irradiation
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A study of ion-bombarded nanostructures on germanium surfaces by scanning probe microscopy
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Implantation-induced disorder in amorphous Ge: Production and relaxation
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Effects of Si/Ge multilayered structures on bi projected range distributions
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Void formation in Ge induced by high energy heavy ion irradiation
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Structural changes in ultra-high-dose self-implanted crystalline and amorphous silicon
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Ion implantation into GaN
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Nanoporous amorphous Ge–Si alloys – unraveling the physics behind ion beam induced morphogenesis
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Radiation-induced formation of cavities in amorphous germanium
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Differential photoconductive sampling with a resolution independent of carrier lifetime
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Interface modification in Co∕Ge bilayer using swift heavy ions
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Nanoscale morphology and photoemission of arsenic implanted germanium films
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Segregation and precipitation of Er in Ge
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Ion implantation damage and annealing in germanium
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Low-temperature annealing of As-implanted Ge
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Role of nucleation sites on the formation of nanoporous Ge
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Porosity as a function of stoichiometry and implantation temperature in Ge/Si1−xGex alloys
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Morphology of ion irradiation induced nano-porous structures in Ge and Si1−xGex alloys
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Unprecedented severe atomic redistribution in germanium induced by MeV self-irradiation
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Atomic scale defect formation and phase transformation in Si implanted β -Ga2O3
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High hole mobility and non-localized states in amorphous germanium
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Comparative analysis of surface morphologies for porous structure development under ion beam irradiation in GaSb, InSb, and Ge
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Amorphization, morphological instability and crystallization of Krypton ion irradiated germanium
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Secondary defects induced by ion and electron irradiation of GaSb
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Tilted InSb nanostructures fabricated by off-normal ion beam irradiation
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Elastic instability in Ge1-xSixalloys under heavy-ion irradiation
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Materials modification with ion beams
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Nanoporous structure formations on germanium surfaces by focused ion beam irradiations
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Synthesis and characterization of a granular Fe–Ge layer by ion implantation and subsequent ion beam annealing
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Dual-beam focused ion beam/electron microscopy processing and metrology of redeposition during ion–surface 3D interactions, from micromachining to self-organized picostructures
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Ion irradiation-induced bimodal surface morphology changes in InSb
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Swelling as a stabilizing mechanism in irradiated thin films: II. Effect of swelling rate
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Swelling as a stabilizing mechanism in irradiated thin films: III. Effect on critical angle in a composite model
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Mechanisms of stress generation during bombardment of Ge with keV ions: experiments and molecular dynamics simulations
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Nanometer ripple formation and self-affine roughening of ion-beam-eroded graphite surfaces
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Ion-dose-dependent microstructure in amorphous Ge
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Structural-relaxation-induced bond length and bond angle changes in amorphized Ge
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Ion-irradiation-induced stresses and swelling in amorphous Ge thin films
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Intrinsic and dopant-enhanced solid-phase epitaxy in amorphous germanium
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Radiation damage formation in InP, InSb, GaAs, GaP, Ge, and Si due to fast ions
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Influence of electronic energy deposition on the structural modification of swift heavy-ion-irradiated amorphous germanium layers
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Room-temperature ferromagnetism in Mn-implanted amorphous Ge
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Void formation in amorphous germanium due to high electronic energy deposition
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Structural modifications of low-energy heavy-ion irradiated germanium
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Nanoscale surface pattern formation kinetics on germanium irradiated by Kr + ions
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Ge deep sub-micron pFETs with etched TaN metal gate on a high-k dielectric, fabricated in a 200mm silicon prototyping line
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Ion implanted nanostructures on Ge(111) surfaces observed by atomic force microscopy
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Silicon-ion implantation induced doping and nanoporosity in molecular beam epitaxy grown GaSb epitaxial films
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Ion-Beam Processing
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Artefacts in germanium transmission electron microscope specimens prepared by focused ion beam milling
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Ion-Beam Processing
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Nanostructured germanium prepared via ion beam modification
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Fundamentals of Focused Ion Beam Nanostructural Processing: Below, At, and Above the Surface
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Multi-Ion Beam Lithography and Processing Studies
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Formation and characterization of swelled nano-porous structures on ion-irradiated Ge surfaces
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Pulsed Laser Annealing of Ion Implanted Ge
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Effects of Ion Dose on the Morphology and Crystallization of Amorphous Germanium
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Ion Induced Morphological Instabilities in Ge
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The Production of Porous Structures on Si, Ge and GaAs by High Dose Ion Implantation.
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Anisotropic Transport of Impurities in Ion Mixing
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Microstructure of Ultra High Dose Self Implanted Silicon
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Surface Elevation and Strain in Ion Implanted GaN
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Spontaneous Pattern Formation from Focused and Unfocused Ion Beam Irradiation
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Spontaneous Pattern Formation from Focused and Unfocused Ion Beam Irradiation
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Dynamics of Nanoscale Void/Fiber Assembly Formation in Irradiated Amorphous Materials
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In-Situ Control of Defect Dynamics By Ellipsometry During Ion Implantation – Evolution of Disorder and Cavity Structure in Single-Crystalline Ge During Implantation of Sb Ions
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Fabrication of Ordered Nano-Cell Structure on Ge Surface by Focused Ion Beam
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Formation of Nano-structure on Semiconductor Surface by Ion Irradiation
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Void Formation and Structure Change Induced by Heavy Ion Irradiation in GaSb and InSb
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Formation of Defect Structure on Ge Surface by Ion Irradiation at Controlled Substrate Temperature
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Surface Sink Effects on Void Formation in GaSb and InSb under Ion Irradiation
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Nanoporous Structure Formation in GaSb, InSb, and Ge by Ion Beam Irradiation under Controlled Point Defect Creation Conditions
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Nanoporous Structure Formation on the Surface of InSb by Ion Beam Irradiation
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Fabrication of ordered nanostructures on the Ge surface using electron-beam lithography and ion beam irradiation
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Defect Removal, Dopant Diffusion and Activation Issues in Ion-Implanted Shallow Junctions Fabricated in Crystalline Germanium Substrates
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Effect of temperature on GaSb nanocell lattice fabrication by void formation and development utilizing a focused ion beam
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Nanoporous structure formation on the surface of Ge by ion beam irradiation
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