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Ultrafast laser in fabrication of micro hemispherical resonators with quality factor over millions

https://doi.org/10.1088/1361-6439/abedcc
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What this work says

Outgoing claims: the papers this work cites, builds on, or argues with.

inferredcites →https://doi.org/10.1002/latj.200790142openalex-snapshot
Micromachining with industrial picosecond lasers
inferredcites →https://doi.org/10.1007/bf01352182openalex-snapshot
Wet chemical etching of silicate glasses in hydrofluoric acid based solutions
inferredcites →https://doi.org/10.1007/bf01567637openalex-snapshot
Femtosecond, picosecond and nanosecond laser ablation of solids
inferredcites →https://doi.org/10.1007/s00339-019-2754-yopenalex-snapshot
Improvement of rear damage of thin fused silica by liquid-assisted femtosecond laser cutting
inferredcites →https://doi.org/10.1016/j.jsv.2009.09.011openalex-snapshot
A model for an extensional mode resonator used as a frequency-adjustable vibration energy harvester
inferredcites →https://doi.org/10.1016/j.nanoen.2019.05.081openalex-snapshot
Micro/nano-structures-enhanced triboelectric nanogenerators by femtosecond laser direct writing
inferredcites →https://doi.org/10.1021/jp900915ropenalex-snapshot
Examination of Etching Agent and Etching Mechanism on Femotosecond Laser Microfabrication of Channels Inside Vitreous Silica Substrates
inferredcites →https://doi.org/10.1038/lsa.2014.10openalex-snapshot
Protein-based soft micro-optics fabricated by femtosecond laser direct writing
inferredcites →https://doi.org/10.1038/lsa.2014.30openalex-snapshot
Ultrafast lasers—reliable tools for advanced materials processing
inferredcites →https://doi.org/10.1038/lsa.2017.11openalex-snapshot
Three-dimensional chiral microstructures fabricated by structured optical vortices in isotropic material
inferredcites →https://doi.org/10.1038/nphoton.2008.47openalex-snapshot
Femtosecond laser micromachining in transparent materials
inferredcites →https://doi.org/10.1038/nphoton.2013.112openalex-snapshot
Integrated multimode interferometers with arbitrary designs for photonic boson sampling
inferredcites →https://doi.org/10.1038/s41378-018-0035-0openalex-snapshot
0.04 degree-per-hour MEMS disk resonator gyroscope with high-quality factor (510 k) and long decaying time constant (74.9 s)
inferredcites →https://doi.org/10.1039/c2lc40377copenalex-snapshot
Highly sensitive optofluidic chips for biochemical liquid assay fabricated by 3D femtosecond laser micromachining followed by polymer coating
inferredcites →https://doi.org/10.1063/1.4971334openalex-snapshot
Direct fabrication of compound-eye microlens array on curved surfaces by a facile femtosecond laser enhanced wet etching process
inferredcites →https://doi.org/10.1088/0960-1317/25/8/085006openalex-snapshot
High Q diamond hemispherical resonators: fabrication and energy loss mechanisms
inferredcites →https://doi.org/10.1088/1361-6439/aad730openalex-snapshot
Application of micro-blowtorching process with whirling platform for enhancing frequency symmetry of microshell structure
inferredcites →https://doi.org/10.1088/1742-6596/59/1/080openalex-snapshot
A deep micro-trench on silica glass fabricated by laserinduced backside wet etching (LIBWE)
inferredcites →https://doi.org/10.1109/inertial48129.2020.9090086openalex-snapshot
0.00016 deg/√hr Angle Random Walk (ARW) and 0.0014 deg/hr Bias Instability (BI) from a 5.2M-Q and 1-cm Precision Shell Integrating (PSI) Gyroscope
inferredcites →https://doi.org/10.1109/jmems.2013.2279165openalex-snapshot
3-Dimensional Blow Torch-Molding of Fused Silica Microstructures
inferredcites →https://doi.org/10.1109/jmems.2017.2715319openalex-snapshot
Thermoelastic Dissipation in Micromachined Birdbath Shell Resonators
inferredcites →https://doi.org/10.1109/jmems.2017.2773563openalex-snapshot
Fused Silica Micro Shell Resonator With T-Shape Masses for Gyroscopic Application
inferredcites →https://doi.org/10.1109/jsen.2019.2903199openalex-snapshot
A Novel High Transduction Efficiency Micro Shell Resonator Gyroscope With 16 T-Shape Masses Using Out-of-Plane Electrodes
inferredcites →https://doi.org/10.1109/memsys.2019.8870889openalex-snapshot
1.5-Million Q-Factor Vacuum-Packaged Birdbath Resonator Gyroscope (BRG)
inferredcites →https://doi.org/10.1109/plans.2018.8373358openalex-snapshot
Design and fabrication of high-Q birdbath resonator for MEMS gyroscopes
inferredcites →https://doi.org/10.1134/s2075108714020047openalex-snapshot
HRG and marine applications
inferredcites →https://doi.org/10.1364/oe.20.008535openalex-snapshot
A nano-opto-mechanical pressure sensor via ring resonator

What points at this work

Incoming claims: where this work appears in other papers’ reference lists and arguments.

inferred← citeshttps://doi.org/10.2139/ssrn.4176850openalex-extracted
inferred← citeshttps://doi.org/10.1007/978-981-96-6235-7_35openalex-snapshot
Research on Effect of Charge Accumulation on Stiffness Asymmetry for Micro-Shell Resonator Gyroscope
inferred← citeshttps://doi.org/10.1007/s13320-023-0693-xopenalex-snapshot
MEMS and MOEMS Gyroscopes: A Review
inferred← citeshttps://doi.org/10.1016/j.ceramint.2025.12.375openalex-snapshot
Effect of surface morphology on the quality factor of fused silica micro hemispherical resonator
inferred← citeshttps://doi.org/10.1016/j.ijleo.2022.169861openalex-snapshot
Femtosecond laser modification combined with chemical etching to achieve high-quality cutting of millimeter-thick fused silica
inferred← citeshttps://doi.org/10.1016/j.nanoen.2022.107864openalex-snapshot
Numerical calculation and experimental investigation on optimization of bouncing ball triboelectric nanogenerator
inferred← citeshttps://doi.org/10.1016/j.ymssp.2026.114724openalex-snapshot
Noise analysis and suppression of whole-angle MEMS gyroscopes based on detection-axes-rotation
inferred← citeshttps://doi.org/10.1038/s41378-024-00659-8openalex-snapshot
A 3D-printed microhemispherical shell resonator with electrostatic tuning for a Coriolis vibratory gyroscope
inferred← citeshttps://doi.org/10.1063/5.0059443openalex-snapshot
Fabrication of fused silica microstructure based on the femtosecond laser
inferred← citeshttps://doi.org/10.1088/1361-6439/ac0a58openalex-snapshot
Research on dynamics of bouncing ball in triboelectric nanogenerator
inferred← citeshttps://doi.org/10.1088/1361-6439/ad5b6aopenalex-snapshot
Manufacturing fused silica hemispherical resonators using polymer glass suspension and replication molding
inferred← citeshttps://doi.org/10.1088/1361-6501/acfd4aopenalex-snapshot
The influence of photothermal effect on the resonance frequency of fused silica micro hemispherical resonator
inferred← citeshttps://doi.org/10.1109/jmems.2022.3199231openalex-snapshot
Effect of Metallization on Quality Factor and Noise Characteristics in Fused Silica Dual-Shell Gyroscopes
inferred← citeshttps://doi.org/10.1109/jmems.2023.3332669openalex-snapshot
Frequency Tuning Method on Teeth-Like Tines of the Fused Silica Micro-Hemispherical Resonator Using Femtosecond Laser
inferred← citeshttps://doi.org/10.1109/jsen.2023.3241019openalex-snapshot
Reducing the Sensitivity of Fabrication Error in the MEMS Butterfly Gyroscope by Adopting an Improved Vibration Beam
inferred← citeshttps://doi.org/10.1109/jsen.2024.3449100openalex-snapshot
Fused Silica Microhemispherical Resonators Fabricated by Femtosecond Laser Modification Ultrasonically Assisted Chemical Etching
inferred← citeshttps://doi.org/10.1109/jsen.2026.3662743openalex-snapshot
Improved Positioning of Mechanical Trimming for the Microshell Resonators With T-Shaped Masses
inferred← citeshttps://doi.org/10.1109/led.2024.3403866openalex-snapshot
Initial Demonstration of an Inductive Vibrating Ring Gyroscope Fabricated From Fused Silica
inferred← citeshttps://doi.org/10.1109/nems69704.2026.11633688openalex-snapshot
High-quality-factor Micro Hemispherical Resonators Achieved by Rim Width Modulation
inferred← citeshttps://doi.org/10.1116/5.0124150openalex-snapshot
High quality factor silicon nitride nanomechanical resonators fabricated by maskless femtosecond laser micromachining
inferred← citeshttps://doi.org/10.21203/rs.3.rs-3309122/v1openalex-snapshot
A 3D-printed micro-hemispherical shell resonator with electrostatic tuning for Coriolis vibratory gyroscope
inferred← citeshttps://doi.org/10.3390/mi13101676openalex-snapshot
Recent Advances in MEMS-Based 3D Hemispherical Resonator Gyroscope (HRG)—A Sensor of Choice
inferred← citeshttps://doi.org/10.3390/mi16040372openalex-snapshot
Research on the Method of Optimizing the Stress and Improving the Performance for MEMS Gyroscope Based on the Cantilever-Plate Structure
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