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A Novel High Transduction Efficiency Micro Shell Resonator Gyroscope With 16 T-Shape Masses Using Out-of-Plane Electrodes

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What this work says

Outgoing claims: the papers this work cites, builds on, or argues with.

inferredcites →https://doi.org/10.1016/0022-460x(90)90554-dopenalex-snapshot
A simple theory for the analysis and correction of frequency splitting in slightly imperfect rings
inferredcites →https://doi.org/10.1016/j.cirp.2013.03.035openalex-snapshot
A study on the optimal fabrication method for micro-scale gyroscopes using a hybrid process consisting of electric discharge machining, chemical etching or micro-mechanical milling
inferredcites →https://doi.org/10.1016/j.proeng.2014.11.580openalex-snapshot
MEMS Micro-glassblowing Paradigm for Wafer-level Fabrication of Fused Silica Wineglass Gyroscopes
inferredcites →https://doi.org/10.1016/j.sna.2012.11.040openalex-snapshot
High temperature micro-glassblowing process demonstrated on fused quartz and ULE TSG
inferredcites →https://doi.org/10.1016/j.sna.2014.02.001openalex-snapshot
Electrostatic and mechanical characterization of 3-D micro-wineglass resonators
inferredcites →https://doi.org/10.1021/nl070716topenalex-snapshot
Macroscopic Tuning of Nanomechanics: Substrate Bending for Reversible Control of Frequency and Quality Factor of Nanostring Resonators
inferredcites →https://doi.org/10.1038/s41598-017-14049-wopenalex-snapshot
On-Chip Glass Microspherical Shell Whispering Gallery Mode Resonators
inferredcites →https://doi.org/10.1038/srep46660openalex-snapshot
Attogram mass sensing based on silicon microbeam resonators
inferredcites →https://doi.org/10.1063/1.4972971openalex-snapshot
Stiffness-mass decoupled silicon disk resonator for high resolution gyroscopic application with long decay time constant (8.695 s)
inferredcites →https://doi.org/10.1088/0960-1317/19/11/113001openalex-snapshot
The development of micro-gyroscope technology
inferredcites →https://doi.org/10.1088/0960-1317/23/12/125016openalex-snapshot
Hemispherical wineglass resonators fabricated from the microcrystalline diamond
inferredcites →https://doi.org/10.1088/0960-1317/25/8/085006openalex-snapshot
High Q diamond hemispherical resonators: fabrication and energy loss mechanisms
inferredcites →https://doi.org/10.1088/1361-6439/aad730openalex-snapshot
Application of micro-blowtorching process with whirling platform for enhancing frequency symmetry of microshell structure
inferredcites →https://doi.org/10.1109/icsens.2015.7370395openalex-snapshot
Modal coupling error suppression in micromachined gyroscopes by UV laser trimming
inferredcites →https://doi.org/10.1109/isiss.2017.7935688openalex-snapshot
Controlled capacitive gaps for electrostatic actuation and tuning of 3D fused quartz micro wineglass resonator gyroscope
inferredcites →https://doi.org/10.1109/isiss.2017.7935697openalex-snapshot
Effect of drive-axis displacement on MEMS Birdbath Resonator Gyroscope performance
inferredcites →https://doi.org/10.1109/jmems.2013.2286820openalex-snapshot
Achieving Sub-Hz Frequency Symmetry in Micro-Glassblown Wineglass Resonators
inferredcites →https://doi.org/10.1109/jmems.2013.2291534openalex-snapshot
Fused-Silica Micro Birdbath Resonator Gyroscope ($\mu$-BRG)
inferredcites →https://doi.org/10.1109/jmems.2014.2327107openalex-snapshot
A Polysilicon Microhemispherical Resonating Gyroscope
inferredcites →https://doi.org/10.1109/jmems.2014.2365113openalex-snapshot
Demonstration of 1 Million $Q$ -Factor on Microglassblown Wineglass Resonators With Out-of-Plane Electrostatic Transduction
inferredcites →https://doi.org/10.1109/jmems.2016.2558197openalex-snapshot
Design of a Disk Resonator Gyroscope With High Mechanical Sensitivity by Optimizing the Ring Thickness Distribution
inferredcites →https://doi.org/10.1109/jmems.2017.2773563openalex-snapshot
Fused Silica Micro Shell Resonator With T-Shape Masses for Gyroscopic Application
inferredcites →https://doi.org/10.1109/jsen.2014.2314614openalex-snapshot
Quality Factor Maximization Through Dynamic Balancing of Tuning Fork Resonator
inferredcites →https://doi.org/10.1109/jsen.2017.2712599openalex-snapshot
Frequency Tuning of a Disk Resonator Gyroscope via Stiffness Perturbation
inferredcites →https://doi.org/10.1109/memsys.2012.6170120openalex-snapshot
3-D micromachined hemispherical shell resonators with integrated capacitive transducers
inferredcites →https://doi.org/10.1109/memsys.2015.7051085openalex-snapshot
A high-q all-fused silica solid-stem wineglass hemispherical resonator formed using micro blow torching and welding
inferredcites →https://doi.org/10.1109/memsys.2017.7863623openalex-snapshot
Ultra conformal high aspect-ratio small-gap capacitive electrode formation technology for 3D micro shell resonators
inferredcites →https://doi.org/10.1109/plans.2006.1650648openalex-snapshot
Type I and Type II Micromachined Vibratory Gyroscopes
inferredcites →https://doi.org/10.1109/plans.2018.8373358openalex-snapshot
Design and fabrication of high-Q birdbath resonator for MEMS gyroscopes
inferredcites →https://doi.org/10.1109/transducers.2013.6627150openalex-snapshot
A high-Q birdbath resonator gyroscope (BRG)
inferredcites →https://doi.org/10.1109/transducers.2013.6627293openalex-snapshot
Micromachined polycrystalline diamond hemispherical shell resonators
inferredcites →https://doi.org/10.1109/transducers.2017.7994252openalex-snapshot
Effective mechanical trimming of micro shell resonator with T-shape masses
inferredcites →https://doi.org/10.1109/transducers.2017.7994441openalex-snapshot
Micro shell resonator with T-shape masses fabricated by micro blow-torching using whirling platform

What points at this work

Incoming claims: where this work appears in other papers’ reference lists and arguments.

inferred← citeshttps://doi.org/10.2139/ssrn.4161323openalex-extracted
Research on the Temperature-Dependent Bias Instability Improvement of Mems Butterfly Gyroscope Based on Real-Time Demodulation Phase Compensation
inferred← citeshttps://doi.org/10.1007/s00542-020-05034-xopenalex-snapshot
Frequency split suppression of fused silica micro shell resonator based on rotating forming process
inferred← citeshttps://doi.org/10.1007/s13320-023-0693-xopenalex-snapshot
MEMS and MOEMS Gyroscopes: A Review
inferred← citeshttps://doi.org/10.1007/s40997-025-00876-0openalex-snapshot
Vibration and Buckling of a Laminated Nano-composite Truncated Conical Micro Sandwich Shell with Balsa Wood/Aluminum Honeycomb Cores
inferred← citeshttps://doi.org/10.1016/j.ijengsci.2020.103413openalex-snapshot
Vibration analysis of scale-dependent thin shallow microshells with arbitrary planform and boundary conditions
inferred← citeshttps://doi.org/10.1016/j.ijleo.2022.169861openalex-snapshot
Femtosecond laser modification combined with chemical etching to achieve high-quality cutting of millimeter-thick fused silica
inferred← citeshttps://doi.org/10.1016/j.ijmecsci.2025.110644openalex-snapshot
Linear calibration models for mass defects of hemispherical resonator
inferred← citeshttps://doi.org/10.1016/j.measurement.2021.109924openalex-snapshot
High-precision synchronous test method of vibration performance parameters for fused quartz hemispherical resonator
inferred← citeshttps://doi.org/10.1016/j.sna.2024.115583openalex-snapshot
Electrical-feed-through elimination in micro-hemisphere resonator measurement based on mixed-frequency-excitation of different harmonic signals
inferred← citeshttps://doi.org/10.1038/s41378-024-00659-8openalex-snapshot
A 3D-printed microhemispherical shell resonator with electrostatic tuning for a Coriolis vibratory gyroscope
inferred← citeshttps://doi.org/10.1088/1361-6439/abedccopenalex-snapshot
Ultrafast laser in fabrication of micro hemispherical resonators with quality factor over millions
inferred← citeshttps://doi.org/10.1088/1361-6501/acfd4aopenalex-snapshot
The influence of photothermal effect on the resonance frequency of fused silica micro hemispherical resonator
inferred← citeshttps://doi.org/10.1088/1361-6501/adeba6openalex-snapshot
Mechanism of frequency splitting in micro hemispherical resonator with T-shape masses: study on the harmonic error order characteristics
inferred← citeshttps://doi.org/10.1088/1361-6501/ae6359openalex-snapshot
Prediction of assembly posture errors between microhemispherical resonators and electrode plates
inferred← citeshttps://doi.org/10.1088/1402-4896/ad44ecopenalex-snapshot
Theoretical prediction of soft-forming micro-hemispherical shells from fused silica substrates in reclining mold
inferred← citeshttps://doi.org/10.1088/2631-8695/ad755bopenalex-snapshot
Mitigating rim bending in fused silica micro shell resonators by a chamfered mold
inferred← citeshttps://doi.org/10.1109/inertial53425.2022.9787721openalex-snapshot
A Novel Modeling Method Based on 3D CT Images for Dynamics Analysis of The Micro-Hemispherical Resonator Gyroscope
inferred← citeshttps://doi.org/10.1109/jmems.2019.2945713openalex-snapshot
Development of 3D Fused Quartz Hemi-Toroidal Shells for High-Q Resonators and Gyroscopes
inferred← citeshttps://doi.org/10.1109/jmems.2022.3166213openalex-snapshot
Fused Quartz Dual-Shell Resonator Gyroscope
inferred← citeshttps://doi.org/10.1109/jmems.2022.3228268openalex-snapshot
Analysis and Compensation of Bias Drift of Force-to-Rebalanced Micro-Hemispherical Resonator Gyroscope Caused by Assembly Eccentricity Error
inferred← citeshttps://doi.org/10.1109/jphot.2024.3432744openalex-snapshot
Optomechanical Gyroscope Based on Micro-Hemispherical Shell and Optical Ring Resonators
inferred← citeshttps://doi.org/10.1109/jsen.2019.2959241openalex-snapshot
Dynamic Response and Frequency Split Predictions for Cylindrical Fused Silica Resonators
inferred← citeshttps://doi.org/10.1109/jsen.2021.3065818openalex-snapshot
Micro Hemispherical Resonator Gyroscope With Teeth-Like Tines
inferred← citeshttps://doi.org/10.1109/jsen.2021.3072046openalex-snapshot
Modeling and Compensation of Assembly Inclination Error of Micro Hemispherical Resonator Gyroscope Under Force-to-Rebalance Mode
inferred← citeshttps://doi.org/10.1109/jsen.2023.3342790openalex-snapshot
Research on Frequency Splitting Analysis and Tuning Methods of Six-Antinode Cylindrical Resonator Gyroscope
inferred← citeshttps://doi.org/10.1109/jsen.2025.3545282openalex-snapshot
Full Symmetric MEMS Rate Gyroscope Automatic Mode-Matching Method Based on Pendulum Variable Demodulation and Phase-Shifted Virtual Coriolis Force Modulation
inferred← citeshttps://doi.org/10.1109/jsen.2026.3662743openalex-snapshot
Improved Positioning of Mechanical Trimming for the Microshell Resonators With T-Shaped Masses
inferred← citeshttps://doi.org/10.1109/jsen.2026.3715477openalex-snapshot
An Improved Dual-Attention Transformer–LSTM for Small-Sample Prediction of Modal Frequency in Micro Hemispherical Resonator
inferred← citeshttps://doi.org/10.1109/rose52750.2021.9611757openalex-snapshot
Compensation of Assembly Eccentricity Error of Micro Hemispherical Resonator Gyroscope
inferred← citeshttps://doi.org/10.1364/oe.482859openalex-snapshot
High-precision angular rate detection based on an optomechanical micro hemispherical shell resonator gyroscope
inferred← citeshttps://doi.org/10.20944/preprints202312.1797.v1openalex-snapshot
Using Chamfered Mold to Manufacture Micro Glass-Blown Shell Resonator for Gyroscopes
inferred← citeshttps://doi.org/10.21203/rs.3.rs-3309122/v1openalex-snapshot
A 3D-printed micro-hemispherical shell resonator with electrostatic tuning for Coriolis vibratory gyroscope
inferred← citeshttps://doi.org/10.2139/ssrn.5213933openalex-snapshot
Ultrafast Identification Methods for Mass Defects of Hemispherical Resonator
inferred← citeshttps://doi.org/10.22213/2410-9304-2023-2-4-10openalex-snapshot
Investigation of the Solid-State Wave Gyroscope Toroidal Resonator Design Parameters Effect on the Second Mode Frequency
inferred← citeshttps://doi.org/10.3390/mi11010075openalex-snapshot
A Design Methodology of Digital Control System for MEMS Gyroscope Based on Multi-Objective Parameter Optimization
inferred← citeshttps://doi.org/10.3390/s25196193openalex-snapshot
Review of Research Advances in Gyroscopes’ Structural Forms and Processing Technologies Viewed from Performance Indices
inferred← citeshttps://doi.org/10.3788/lop242294openalex-snapshot
先进激光用于图形化加工基底的技术与应用
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