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Design considerations for bulk micromachined 6H-SiC high-G piezoresistive accelerometers

https://doi.org/10.1109/memsys.2002.984347

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What this work says

Outgoing claims: the papers this work cites, builds on, or argues with.

inferredcites →https://doi.org/10.1088/0022-3735/21/12/001openalex-snapshot

Silicon in mechanical sensors

inferredcites →https://doi.org/10.1109/16.285013openalex-snapshot

Characterization of monolithic n-type 6H-SiC piezoresistive sensing elements

inferredcites →https://doi.org/10.1109/20.911831openalex-snapshot

Characterization of silicon carbide and commercial-off-the-shelf (COTS) components for high-g launch and EM applications

inferredcites →https://doi.org/10.1109/20.911850openalex-snapshot

Strap-down microelectromechanical (MEMS) sensors for high-g munition applications

inferredcites →https://doi.org/10.1109/hitec.1998.676801openalex-snapshot

An aluminum nitride package for 600°C and beyond

What points at this work

Incoming claims: where this work appears in other papers’ reference lists and arguments.

inferred← citeshttps://doi.org/10.2139/ssrn.4051374openalex-extracted

Fabrication and Performance of a Bulk 4h-Sic Mems Piezoresistive Accelerometer

inferred← citeshttps://doi.org/10.1007/s00542-012-1435-yopenalex-snapshot

Studies on SiC, DLC and TiO2 thin films as piezoresistive sensor materials for high temperature application

inferred← citeshttps://doi.org/10.1007/s10854-021-06966-4openalex-snapshot

Boron doped SiC thin film on Silicon synthesized from polycarbosilane: a new lead free material for applications in piezosensors

inferred← citeshttps://doi.org/10.1088/0960-1317/25/3/033001openalex-snapshot

Micromachined high-g accelerometers: a review

inferred← citeshttps://doi.org/10.1088/1742-6596/2246/1/012007openalex-snapshot

Simulation Analysis and Fabrication of a Silicon Carbide-Based Piezoresistive Accelerometer

inferred← citeshttps://doi.org/10.1109/icia.2007.4295711openalex-snapshot

Boolean Symbolic Expression Method for the Material Layer of Information Acquisition

inferred← citeshttps://doi.org/10.1109/isiss.2019.8739507openalex-snapshot

Frequency Staggered Accelerometer Array for Improved Ringdown Behavior

inferred← citeshttps://doi.org/10.1115/1.3144149openalex-snapshot

In Situ Chip Stress Extractions for LFBGA Packages Through Piezoresistive Sensors

inferred← citeshttps://doi.org/10.1117/12.2037344openalex-snapshot

Design and fabrication of three-axis accelerometer sensor microsystem for wide temperature range applications using semi-custom process

inferred← citeshttps://doi.org/10.3390/electronicmat7030021openalex-snapshot

4H-SiC MEMS Accelerometer with Integrated SiC-FET Readout for High Temperature Harsh Environment: Design and System-Level Simulation

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