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Fabrication and Performance of a Bulk 4h-Sic Mems Piezoresistive Accelerometer

https://doi.org/10.2139/ssrn.4051374
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Outgoing claims: the papers this work cites, builds on, or argues with.

inferredcites →https://doi.org/10.1016/s0924-4247(02)00436-3openalex-extracted
Simulation, fabrication and testing of bulk micromachined 6H-SiC high-g piezoresistive accelerometers
inferredcites →https://doi.org/10.1016/s0924-4247(99)00335-0openalex-extracted
Silicon carbide as a new MEMS technology
inferredcites →https://doi.org/10.1109/5.704265openalex-extracted
Silicon carbide MEMS for harsh environments
inferredcites →https://doi.org/10.1109/asdam.2008.4743323openalex-extracted
3-D silicon carbide surface micromachined accelerometer compatible with CMOS processing
inferredcites →https://doi.org/10.1109/icsens.2003.1279043openalex-extracted
A CMOS compatible SiC accelerometer
inferredcites →https://doi.org/10.1109/icsens.2015.7370307openalex-extracted
Fabrication of a three-axis capacitive MEMS accelerometer on a single substrate
inferredcites →https://doi.org/10.1109/icsens.2016.7808650openalex-extracted
Design, fabrication and characterization of a high performance MEMS accelerometer
inferredcites →https://doi.org/10.1109/inertial48129.2020.9090069openalex-extracted
A Gold Proof-Mass Differential MEMS Accelerometer for Micro-G Level Sensing
inferredcites →https://doi.org/10.1109/jsen.2017.2777864openalex-extracted
Parasitic Resistance-Based High Precision Capacitive MEMS Accelerometer Phase Shift and Its Usage for Temperature Compensation
inferredcites →https://doi.org/10.1109/led.2009.2033720openalex-extracted
A Single-Axis Low-Cost Accelerometer Fabricated Using Printed-Circuit-Board Techniques
inferredcites →https://doi.org/10.1109/led.2013.2277541openalex-extracted
Molecular Electronic Transducer-Based Low-Frequency Accelerometer Fabricated With Post-CMOS Compatible Process Using Droplet as Sensing Body
inferredcites →https://doi.org/10.1109/led.2014.2379262openalex-extracted
4H-SiC Piezoresistive Pressure Sensors at 800 °C With Observed Sensitivity Recovery
inferredcites →https://doi.org/10.1109/memsys.2002.984347openalex-extracted
Design considerations for bulk micromachined 6H-SiC high-G piezoresistive accelerometers
inferredcites →https://doi.org/10.1109/sensors47087.2021.9639506openalex-extracted
Piezoresistive 4H-Silicon Carbide (SiC) pressure sensor
inferredcites →https://doi.org/10.1117/12.758245openalex-extracted
Design, fabrication, and testing of 3C-SiC sensors for high temperature applications
inferredcites →https://doi.org/10.3390/ma14206222openalex-extracted
Modeling and Analysis of a SiC Microstructure-Based Capacitive Micro-Accelerometer
inferredcites →https://doi.org/10.3390/mi12010056openalex-extracted
Design and Fabrication of Bulk Micromachined 4H-SiC Piezoresistive Pressure Chips Based on Femtosecond Laser Technology
inferredcites →https://doi.org/10.4028/www.scientific.net/msf.600-603.859openalex-extracted
A Silicon Carbide Accelerometer for Extreme Environment Applications
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