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Evaluation of subsurface damage by light scattering techniques

https://doi.org/10.1364/ao.52.006579

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What this work says

Outgoing claims: the papers this work cites, builds on, or argues with.

inferredcites →https://doi.org/10.1007/bf00044418openalex-snapshot

A review of indentation fracture theory: its development, principles and limitations

inferredcites →https://doi.org/10.1016/j.jnoncrysol.2006.09.012openalex-snapshot

Sub-surface mechanical damage distributions during grinding of fused silica

inferredcites →https://doi.org/10.1016/j.jnoncrysol.2009.01.037openalex-snapshot

The effect of HF/NH4F etching on the morphology of surface fractures on fused silica

inferredcites →https://doi.org/10.1016/j.nimb.2004.01.129openalex-snapshot

Assessment of subsurface damage in polished II–VI semiconductors by ion channeling

inferredcites →https://doi.org/10.1016/s0022-3093(97)00378-5openalex-snapshot

Investigation of the origin of the Rayleigh scattering in SiO2 glass

inferredcites →https://doi.org/10.1063/1.112633openalex-snapshot

Cross-section transmission electron microscope observations of diamond-turned single-crystal Si surfaces

inferredcites →https://doi.org/10.1103/physrevb.30.5460openalex-snapshot

Theory of light scattering from a rough surface with an inhomogeneous dielectric permittivity

inferredcites →https://doi.org/10.1109/tap.2006.879208openalex-snapshot

Electromagnetic Scattering From a Buried Cylinder in Layered Media With Rough Interfaces

inferredcites →https://doi.org/10.1109/tap.2012.2194641openalex-snapshot

Scattering by a Circular Cylinder Buried Under a Slightly Rough Surface: The Cylindrical-Wave Approach

inferredcites →https://doi.org/10.1111/j.1151-2916.1994.tb04585.xopenalex-snapshot

Effect of Etching and Imaging Mode on the Measurement of Subsurface Damage in Microground Optical Glasses

inferredcites →https://doi.org/10.1117/1.1467360openalex-snapshot

Polarimetric microfacet scattering theory with applications to absorptive and reflective surfaces

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Advanced methods for surface and subsurface defect characterization of optical components

inferredcites →https://doi.org/10.1117/12.507180openalex-snapshot

Surface characterization of optically polished CaF 2 crystal by quasi-Brewster angle technique

inferredcites →https://doi.org/10.1117/12.523864openalex-snapshot

Influence of subsurface cracks on laser-induced surface damage

inferredcites →https://doi.org/10.1117/12.638840openalex-snapshot

Utilization of magnetorheological finishing as a diagnostic tool for investigating the three-dimensional structure of fractures in fused silica

inferredcites →https://doi.org/10.1117/12.7972337openalex-snapshot

Relationship between Surface Scattering and Microtopographic Features

inferredcites →https://doi.org/10.1117/12.891280openalex-snapshot

Efficient specification and characterization of surface roughness for extreme ultraviolet optics

inferredcites →https://doi.org/10.1117/12.893912openalex-snapshot

New approach for pre-polish grinding with low subsurface damage

inferredcites →https://doi.org/10.1117/12.896792openalex-snapshot

Roughness characterization of large EUV mirror optics by laser light scattering

inferredcites →https://doi.org/10.1117/12.929887openalex-snapshot

Roughness characterization of EUV multilayer coatings and ultra-smooth surfaces by light scattering

inferredcites →https://doi.org/10.1117/12.929923openalex-snapshot

Sophisticated light scattering techniques from the VUV to the IR regions

inferredcites →https://doi.org/10.1117/12.977453openalex-snapshot

Light scattering to detect imperfections relevant for laser-induced damage

inferredcites →https://doi.org/10.1117/3.203079openalex-snapshot

Optical Scattering: Measurement and Analysis

inferredcites →https://doi.org/10.1364/ao.33.004248openalex-snapshot

Subsurface damage identification in optically transparent materials using a nondestructive method

inferredcites →https://doi.org/10.1364/ao.36.008798openalex-snapshot

Angular dependence and polarization of out-of-plane optical scattering from particulate contamination, subsurface defects, and surface microroughness

inferredcites →https://doi.org/10.1364/ao.41.000154openalex-snapshot

Surface characterization techniques for determining the root-mean-square roughness and power spectral densities of optical components

inferredcites →https://doi.org/10.1364/ao.44.002241openalex-snapshot

Subsurface damage in some single crystalline optical materials

inferredcites →https://doi.org/10.1364/ao.45.005621openalex-snapshot

Surface assessment of CaF_2 deep-ultraviolet and vacuum-ultraviolet optical components by the quasi-Brewster angle technique

inferredcites →https://doi.org/10.1364/ao.48.005155openalex-snapshot

Using quantum dots to tag subsurface damage in lapped and polished glass samples

inferredcites →https://doi.org/10.1364/ao.49.001503openalex-snapshot

Angle-resolved scattering and reflectance of extreme-ultraviolet multilayer coatings: measurement and analysis

inferredcites →https://doi.org/10.1364/ao.50.00c148openalex-snapshot

Influence of the substrate finish and thin film roughness on the optical performance of Mo/Si multilayers

inferredcites →https://doi.org/10.1364/ao.50.00c164openalex-snapshot

Angle-resolved scattering: an effective method for characterizing thin-film coatings

inferredcites →https://doi.org/10.1364/ao.52.003279openalex-snapshot

Comprehensive nanostructure and defect analysis using a simple 3D light-scatter sensor

inferredcites →https://doi.org/10.1364/ao.9.000236openalex-snapshot

Effect of Polishing Technique on the Roughness and Residual Surface Film on Fused Quartz Optical Flats

inferredcites →https://doi.org/10.1364/josaa.16.001326openalex-snapshot

Polarization of light scattered by microrough surfaces and subsurface defects

inferredcites →https://doi.org/10.1364/oe.14.010537openalex-snapshot

Bulk scattering properties of synthetic fused silica at 193 nm

inferredcites →https://doi.org/10.1364/oe.15.012197openalex-snapshot

Subsurface damage in precision ground ULE® and Zerodur® surfaces

inferredcites →https://doi.org/10.1364/oe.17.003543openalex-snapshot

Imaging subsurface damage of grinded fused silica optics by confocal fluorescence microscopy

inferredcites →https://doi.org/10.1364/oe.17.020448openalex-snapshot

Subsurface damage measurement of ground fused silica parts by HF etching techniques

inferredcites →https://doi.org/10.1364/opex.13.010854openalex-snapshot

Elimination of polarized light scattered by surface roughness or bulk heterogeneity

inferredcites →https://doi.org/10.2971/jeos.2011.11005openalex-snapshot

Improved rubidium atomic beam clock based on lamp-pumping and fluorescence-detection scheme

What points at this work

Incoming claims: where this work appears in other papers’ reference lists and arguments.

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Detecting Subsurface Damage within Glasses with Polarization-Sensitive Optical Coherence Tomography

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Measurement and Control of Subsurface Damages

inferred← citeshttps://doi.org/10.1007/978-981-96-1035-8_11openalex-snapshot

Measurement and Control of Subsurface Damages

inferred← citeshttps://doi.org/10.1007/s00170-025-16302-3openalex-snapshot

Evolution mechanism of surface and subsurface micro-characteristics induced by grinding in fused silica

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inferred← citeshttps://doi.org/10.1016/j.ceramint.2021.05.220openalex-snapshot

Models of grinding-induced surface and subsurface damages in fused silica considering strain rate and micro shape/geometry of abrasive

inferred← citeshttps://doi.org/10.1016/j.compstruct.2022.115660openalex-snapshot

Feasibility of polarized laser scattering in detecting the grinding-induced subsurface damage in SiCf/SiC ceramic matrix composite

inferred← citeshttps://doi.org/10.1016/j.jmapro.2024.10.067openalex-snapshot

A review on the grinding of SiC-based ceramic matrix composites reinforced by continuous fibre: Damage mechanisms and evaluations

inferred← citeshttps://doi.org/10.1016/j.jmatprotec.2020.116746openalex-snapshot

Two-dimensional detection of subsurface damage in silicon wafers with polarized laser scattering

inferred← citeshttps://doi.org/10.1016/j.matpr.2021.03.221openalex-snapshot

Surface preparation and analysis on fused silica glass substrate with deterministic grinding method

inferred← citeshttps://doi.org/10.1016/j.mssp.2022.106570openalex-snapshot

Sensitivity of polarized laser scattering detection to subsurface damage in ground silicon wafers

inferred← citeshttps://doi.org/10.1016/j.mtcomm.2026.115437openalex-snapshot

Surface roughness and subsurface damage relationship in BK7G18 optical glass grinding: A combined theoretical and experimental study

inferred← citeshttps://doi.org/10.1016/j.optlaseng.2025.109437openalex-snapshot

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inferred← citeshttps://doi.org/10.1016/j.optlastec.2024.111146openalex-snapshot

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The residual geological information in Liangzhu jades: Implications for their provenance

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Parameters optimization on surface roughness improvement of Zerodur optical glass using an innovative rotary abrasive fluid multi-jet polishing process

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Analysis of subsurface damage inhibition in magnetization-enhanced force-rheological polishing

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Surface Properties and Porosity of Silica Particles Studied by Wide-Angle Soft X-ray Scattering

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Characterization of subsurface damage in fused silica using non-destructive optical coherence tomography and a destructive approach by iterative plasma jet etching

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Ultra-Precision Polishing of N-Bk7 Using an Innovative Self-Propelled Abrasive Fluid Multi-Jet Polishing Tool

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Study on the influence of local optical field amplification effect on laser-induced damage of fused silica materials

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Open questions in surface topography measurement: a roadmap

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