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An Emerging Local Annealing Method for Simultaneous Crystallization and Activation in Three-Dimensional Nand Flash

https://doi.org/10.2139/ssrn.4142099

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Outgoing claims: the papers this work cites, builds on, or argues with.

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Excellent Reliability of Xtacking™ Bonding Interface

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A New Isolation Technique for Reverse Blocking IGBT with Ion Implantation and Laser Annealing to Tapered Chip Edge Sidewalls

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Millisecond anneal for ultra-shallow junction applications

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Via Diode in Cu Backend Process for 3D Cross-Point RRAM Arrays

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FinFET Versus Gate-All-Around Nanowire FET: Performance, Scaling, and Variability

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IntAct: A 96-Core Processor With Six Chiplets 3D-Stacked on an Active Interposer With Distributed Interconnects and Integrated Power Management

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Laser Annealing of Amorphous Germanium on Silicon–Germanium Source/Drain for Strain and Performance Enhancement in pMOSFETs

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Low-Temperature Hybrid Dopant Activation Technique Using Pulsed Green Laser for Heavily-Doped n-Type SiGe Source/Drain

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Investigation of Erase Cycling Induced TSG Vt Shift in 3D NAND Flash Memory

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Recurrent Neural Network for Rain Estimation Using Commercial Microwave Links

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