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Study on Silicon Carbide High-Temperature Pressure Sensor Based on Mems Technology

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Outgoing claims: the papers this work cites, builds on, or argues with.

inferredcites →https://doi.org/10.1007/978-1-4419-7121-0openalex-extracted

Silicon Carbide Microsystems for Harsh Environments

inferredcites →https://doi.org/10.1016/j.apsusc.2013.11.030openalex-extracted

Fabrication of through holes in silicon carbide using femtosecond laser irradiation and acid etching

inferredcites →https://doi.org/10.1016/j.apsusc.2019.05.262openalex-extracted

Accelerated ICP etching of 6H-SiC by femtosecond laser modification

inferredcites →https://doi.org/10.1016/j.matdes.2010.06.024openalex-extracted

Design of laser micromachined single crystal 6H–SiC diaphragms for high-temperature micro-electro-mechanical-system pressure sensors

inferredcites →https://doi.org/10.1016/j.matdes.2018.07.014openalex-extracted

Highly sensitive 4H-SiC pressure sensor at cryogenic and elevated temperatures

inferredcites →https://doi.org/10.1016/j.sna.2007.09.015openalex-extracted

A silicon carbide capacitive pressure sensor for in-cylinder pressure measurement

inferredcites →https://doi.org/10.1016/j.sna.2012.03.027openalex-extracted

High-temperature piezoresistive pressure sensor based on implantation of oxygen into silicon wafer

inferredcites →https://doi.org/10.1016/j.sna.2012.05.043openalex-extracted

A robust pressure sensor for harsh environmental applications

inferredcites →https://doi.org/10.1016/j.sna.2020.112017openalex-extracted

Application of femtosecond laser micromachining in silicon carbide deep etching for fabricating sensitive diaphragm of high temperature pressure sensor

inferredcites →https://doi.org/10.1016/j.sna.2022.113363openalex-extracted

Batch-producible all-silica fiber-optic Fabry–Perot pressure sensor for high-temperature applications up to 800 °C

inferredcites →https://doi.org/10.1039/c7ra11922dopenalex-extracted

Highly sensitive p-type 4H-SiC van der Pauw sensor

inferredcites →https://doi.org/10.1063/1.5037545openalex-extracted

Isotropic piezoresistance of p-type 4H-SiC in (0001) plane

inferredcites →https://doi.org/10.1088/0960-1317/22/8/085034openalex-extracted

Design-dependent gauge factors of highly doped n-type 4H-SiC piezoresistors

inferredcites →https://doi.org/10.1109/5.704265openalex-extracted

Silicon carbide MEMS for harsh environments

inferredcites →https://doi.org/10.1109/icsenst.2017.8304457openalex-extracted

The roadmap for development of piezoresistive micro mechanical sensors for harsh environment applications

inferredcites →https://doi.org/10.1109/jmems.2005.845460openalex-extracted

Thermal hysteresis analysis of MEMS pressure sensors

inferredcites →https://doi.org/10.1109/jsen.2004.830301openalex-extracted

High-Temperature Single-Crystal 3C-SiC Capacitive Pressure Sensor

inferredcites →https://doi.org/10.1109/jsen.2006.870145openalex-extracted

Fabrication and testing of bulk micromachined silicon carbide piezoresistive pressure sensors for high temperature applications

inferredcites →https://doi.org/10.1109/jsen.2008.2006452openalex-extracted

New Automotive Sensors—A Review

inferredcites →https://doi.org/10.1109/jsen.2014.2371243openalex-extracted

Novel High-Temperature Fiber-Optic Pressure Sensor Based on Etched PCF F-P Interferometer Micromachined by a 157-nm Laser

inferredcites →https://doi.org/10.1109/jsen.2018.2872915openalex-extracted

A Novel Surface $LC$ Wireless Passive Temperature Sensor Applied in Ultra-High Temperature Measurement

inferredcites →https://doi.org/10.1109/led.2014.2379262openalex-extracted

4H-SiC Piezoresistive Pressure Sensors at 800 °C With Observed Sensitivity Recovery

inferredcites →https://doi.org/10.1364/ol.35.001443openalex-extracted

Ultrafast femtosecond-laser-induced fiber Bragg gratings in air-hole microstructured fibers for high-temperature pressure sensing

inferredcites →https://doi.org/10.3390/mi9010005openalex-extracted

Research of a Novel Ultra-High Pressure Sensor with High-Temperature Resistance

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inferred← citeshttps://doi.org/10.1049/nde2.12094openalex-snapshot

Monitoring high‐temperature sensor with optical performance using graphene in power plant industries

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